Micro Structures & Sensors Lab
Kenny Group @ Stanford
The Micro Structures and Sensors Laboratory at Stanford University is directed by Professor Thomas Kenny of the Mechanical Engineering Department. Our group's research in the area of MicroElectroMechanical Systems (MEMS) leverages silicon microfabrication techniques to create micro-devices that include ultra-stable timing references and high performance sensors. Recent work encompasses the design, optimization, and effective realization of high performance MEMS devices, as well as the integration of various types of sensors.

Lab News

Ryan (Hyun Keun) Kwon
  4:54pm Jan 17, 2018
Congratulations to Ian on his successful defense!!!
Kirsten Kaplan
  10:27am Dec 14, 2017
Congratulations to Dave on his successful defense!
Ryan (Hyun Keun) Kwon
  2:57pm Oct 20, 2017
Congratulations to Dustin on his successful defense!!