12:50pm Jun 17, 2014
Congrats to Tim for recently presenting his work at ALD 2014 in Kyoto, Japan on "Recipes for Increasing Uniformity and Reducing arbon Impurities of Plasma-Enhanced Atomic Layer Deposition Platinum Film"
3:35pm Jun 13, 2014
Congratulations to Tim (ALD platinum film characterization), Yushi (Determination of non-linear elastic coefficients), and Eldwin (Etch hole-free epi-seal process) for presenting papers at the Hilton Head 2014 Workshop this past week. In addition, collaborators from the Microsystems Lab (Stanford), Bosch, UC Davis, and UCLA, also presented papers at the workshop. Congrats once again!
11:45pm May 21, 2014
The latest epi-seal run is now complete (HDXI) with contributions from over 15 collaborators. Parts have all been shipped out and best of luck to everyone with their experiments. Congratulations to Chae on a job well done!