Micro Structures & Sensors Lab
Kenny Group @ Stanford
The Micro Structures and Sensors Laboratory at Stanford University is directed by Professor Thomas Kenny of the Mechanical Engineering Department. Our group's research in the area of MicroElectroMechanical Systems (MEMS) leverages silicon microfabrication techniques to create micro-devices that include ultra-stable timing references and high performance sensors. Recent work encompasses the design, optimization, and effective realization of high performance MEMS devices, as well as the integration of various types of sensors.

Lab News

Yunhan Chen
  2:12pm Jun 6, 2016
Dave is presenting at Hilton Head Workshop 2016 about his new stiction results. Our collaborators from UC Davis and HRL are also presenting their researches based on epi-seal devices. Congratulations!
Vu Hong
  1:39am Feb 10, 2016
Congratulations to Yunhan on his Best Paper Award at MEMS 2016 in Shanghai! 3 epi-seal papers were Best Paper Finalists (Yunhan, Vu, Parsa)!
Yunhan Chen
  4:05pm Dec 17, 2015
Congratulations to Yushi on her successful defense!!!!