Micro Structures & Sensors Lab
Kenny Group @ Stanford
The Micro Structures and Sensors Laboratory at Stanford University is directed by Professor Thomas Kenny of the Mechanical Engineering Department. Our group's research in the area of MicroElectroMechanical Systems (MEMS) leverages silicon microfabrication techniques to create micro-devices that include ultra-stable timing references and high performance sensors. Recent work encompasses the design, optimization, and effective realization of high performance MEMS devices, as well as the integration of various types of sensors.

Lab News

Vu Hong
  11:06pm Mar 10, 2014
Congratulations to Shirin Ghaffari for completing her PhD!
Vu Hong
  9:56am Mar 6, 2014
Congratulations to Tim (ALD platinum film characterization) and Yushi (Determination of non-linear elastic coefficients) for having papers accepted at the Hilton Head 2014 Workshop. In addition, collaborators from Bosch, UC Davis, UCLA will also be presenting papers at the workshop held in June. Congrats once again!
Vu Hong
  3:38pm Feb 12, 2014
Congratulations to Dave H. and Eldwin, as well as collaborators from the Pruitt Group, UC Davis, and UC Irvine, for presenting well-received papers at MEMS 2014 in San Francisco.