Chae Hyuck Ahn
Ph.D Candidate
ahn1229 :at: mems.stanford.edu440 Escondido Mall, Bldg 530, Rm 224, Stanford, CA 94305, USA
Advisor: Thomas W. Kenny
Research
Design/Fabricate/Characterize MEMS sensors
- 3-axis Disk Resonating Gyroscope
- Develop the platform for multi-sensor integration
- 3-axis Disk Resonating Gyroscope
- Develop the platform for multi-sensor integration
Education
Stanford University
(2012 - present) PhD Candidate in Mechanical Engineering
Stanford University
(2010 - 2012) M.S. in Mechanical Engineering, Depth: Mechatronics, MEMS
Seoul National University (Seoul, South Korea)
(2003 - 2010) B.S. in Mechanical Engineering, Combined major in Biotechnology (Interdisciplinary Program)
(2012 - present) PhD Candidate in Mechanical Engineering
Stanford University
(2010 - 2012) M.S. in Mechanical Engineering, Depth: Mechatronics, MEMS
Seoul National University (Seoul, South Korea)
(2003 - 2010) B.S. in Mechanical Engineering, Combined major in Biotechnology (Interdisciplinary Program)
Experience
Military Service in Republic of Korea Air Force, Seoul, South Korea
(2005 - 2007)
(2005 - 2007)
Fellowships / Awards
Kwanjeong foundation Scholarship - Seoul, South Korea
(Aug.2013 - present)
KETEP Scholarship, Korea Institute of Energy Technology Evaluation and Planning - Seoul, South Korea
(Sep.2010 – Jun.2012)
Korea Science and Engineering Foundation (KOSEF) Scholarship, KOSEF
(Spring 2004)
(Aug.2013 - present)
KETEP Scholarship, Korea Institute of Energy Technology Evaluation and Planning - Seoul, South Korea
(Sep.2010 – Jun.2012)
Korea Science and Engineering Foundation (KOSEF) Scholarship, KOSEF
(Spring 2004)
Publications
James M.L. Miller, Jianing Zhao, Chae Hyuck Ahn, Eldwin J. Ng, Vu Hong, Yushi Yang, Nicholas E. Bousse, Thomas W. Kenny, Gaurav Bahl, "Giant non-reciprocity through frequency modulation of a two degree-of-freedom micromechanical resonator," Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2022, pp. 108-109, Jun 2022.
323_Miller_2022.pdf
G.D. Vukasin, J. Rodriguez, L. Comenencia Ortiz, G.M. Glaze, D.D. Gerrard, C.H. Ahn, Y. Yang, J. Lake, R.N. Candler, and Thomas .W. Kenny, "DIRECT MEASUREMENTS OF ANCHOR DAMPING IN PRESSURE-LIMITED RING RESONATORS," Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2018, pp. 370-371, Jun 2018.
Ian B. Flader, Yunhan Chen, Chae Hyuck Ahn, Dongsuk D. Shin, Anne L. Alter, Janna Rodriguez, and Thomas W. Kenny, "Epitaxial encapsulation of fully differential electrodes and large transduction gaps for MEMS resonant structures," 2018 IEEE 31st International Conference on Micro Electro Mechanical Systems (MEMS), pp. 483-486, Jan 2018.
10.1109/MEMSYS.2018.8346594
Yunhan Chen, Ian B. Flader, Dongsuk D. Shin, Chae Hyuck Ahn, Janna Rodriguez, and Thomas W. Kenny, "Robust Method of Fabricating Epitaxially Encapsulated MEMS Devices with Large Gaps," Journal of Microelectromechanical Systems, Vol. 26, No. 6, pp. 1235-1243, Dec 2017.
J. Rodriguez, D. D. Gerrard, S. Chandorkar, Y. Chen, G. M. Glaze, I. B. Flader, C. H. Ahn, E. J. Ng, and T. W. Kenny, "Wide-range temperature dependence studies for devices limited by thermoelastic dissipation and anchor damping," 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp. 1100-1103, Jun 2017.
Woosung Park, Dongsuk D. Shin, Soo Jin Kim, Joseph S. Katz, Joonsuk Park, Chae Hyuck Ahn, Takashi Kodama, Mehdi Asheghi, Thomas W. Kenny, and Kenneth E. Goodson, "Phonon conduction in silicon nanobeams," Applied Physics Letters, Vol. 110, No. 21, pp. 213102, May 2017.
Dongsuk D. Shin, Chae Hyuck Ahn, Yunhan Chen, Vu A. Hong, Eldwin J. Ng, Yushi Yang, and Thomas W. Kenny, "Electrostatic tuning of temperature coefficient of frequency of anisotropic disk-shaped resonators," 2017 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), pp. 164-167, Mar 2017.
Yunhan Chen, Ian B. Flader, Dongsuk D. Shin, Chae Hyuck Ahn, Lizmarie Comenencia Ortiz, and Thomas W. Kenny, "Fabrication of wide and deep cavities for silicon MEMS devices without wafer bonding," 2017 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), pp. 113-116, Mar 2017.
Alexandra Efimovskaya, Yu-Wei Lin, Yushi Yang, Eldwin Ng, Yunhan Chen, Ian Flader, Chae H. Ahn, Vu Hong, Thomas W. Kenny, and Andrei M. Shkel, "On cross-talk between gyroscopes integrated on a folded MEMS IMU Cube," 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 1142-1145, Jan 2017.
Dongsuk D. Shin, Chae Hyuck Ahn, Yunhan Chen, David L. Christensen, Ian B. Flader, and Thomas W. Kenny, "Environmentally robust differential resonant accelerometer in a wafer-scale encapsulation process," 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 17-20, Jan 2017.
C. H. Ahn, D. L. Christensen, D. B. Heinz, V. A. Hong, E. J. Ng, J. Rodriguez, Y. Yang, G. O'Brien, and T. W. Kenny, "Encapsulated inertial systems," 2016 IEEE International Electron Devices Meeting (IEDM), pp. 263-263, Dec 2016.
Ian B. Flader, Chae H. Ahn, Dustin D. Gerrard, Eldwin J. Ng, Yushi Yang, Vu A. Hong, Marco Pavone, and Thomas W. Kenny, "Autonomous calibration of MEMS disk resonating gyroscope for improved sensor performance," 2016 American Control Conference (ACC), pp. 5803-5810, Jul 2016.
Ian B. Flader, Chae H. Ahn, Dustin D. Gerrard, Eldwin J. Ng, Yushi Yang, Vu A. Hong, Marco Pavone, and Thomas W. Kenny, "Autonomous calibration of MEMS disk resonating gyroscope for improved sensor performance," 2016 American Control Conference (ACC), pp. 5803-5810, Jul 2016.
David B. Heinz, Vu A. Hong, Chae Hyuck Ahn, Eldwin J. Ng, Yushi Yang, and Thomas W. Kenny, "Experimental Investigation Into Stiction Forces and Dynamic Mechanical Anti-Stiction Solutions in Ultra-Clean Encapsulated MEMS Devices," Journal of Microelectromechanical Systems, Vol. 25, No. 3, pp. 469-478, Jun 2016.
Igor P. Prikhodko, Jeffrey A. Gregory, William A. Clark, John A. Geen, Michael W. Judy, Chae H. Ahn, and Thomas W. Kenny, "Mode-matched MEMS Coriolis vibratory gyroscopes: Myth or reality?," 2016 IEEE/ION Position, Location and Navigation Symposium (PLANS), pp. 1-4, Apr 2016.
Eldwin J. Ng, Kimberly L. Harrison, Yushi Yang, Chae Hyuck Ahn, Vu A. Hong, Roger T. Howe, and Thomas W. Kenny, "Stable Encapsulated Charge-Biased Resonators," Journal of Microelectromechanical Systems, Vol. 25, No. 1, pp. 30-37, Feb 2016.
Ian B. Flader, Chae Hyuck Ahn, Eldwin J. Ng, Yushi Yang, Vu A. Hong, and Thomas W. Kenny, "Stochastic method for disk resonating gyroscope mode matching and quadrature nulling," 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 998-1001, Jan 2016.
Chae Hyuck Ahn, Dongsuk D. Shin, Vu A. Hong, Yushi Yang, Eldwin J. Ng, Yunhan Chen, Ian B. Flader, and Thomas W. Kenny, "Encapsulated disk resonator gyroscope with differential internal electrodes," 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 962-965, Jan 2016.
Yunhan Chen, Eldwin J. Ng, Dongsuk D. Shin, Chae H. Ahn, Yushi Yang, Ian B. Flader, Vu A. Hong, and Thomas W. Kenny, "Ovenized dual-mode clock (ODMC) based on highly doped single crystal silicon resonators," 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 91-94, Jan 2016.
Vu A. Hong, David B. Heinz, David L. Christensen, Dongsuk D. Shin, Yunhan Chen, Chae Hyuck Ahn, Yushi Yang, Eldwin J. Ng, Ian B. Flader, and Thomas W. Kenny, "Overcoming stiction forces with resonant over-travel stops," 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 47-50, Jan 2016.
Dustin D. Gerrard, Chae H. Ahn, Ian B. Flader, Yunhan Chen, Eldwin J. Ng, Yushi Yang, and Thomas W. Kenny, "Q-factor optimization in disk resonator gyroscopes via geometric parameterization," 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 994-997, Jan 2016.
Bo Woon Soon, You Qian, Eldwin J. Ng, Vu A. Hong, Yushi Yang, Chae Hyuck Ahn, Thomas W. Kenny, and Chengkuo Lee, "Investigation of a Vacuum Encapsulated Si-to-Si Contact Microswitch Operated From −60 °C to 400 °C," Journal of Microelectromechanical Systems, Vol. 24, No. 6, pp. 1906-1915, Dec 2015.
Chae Hyuck Ahn, Eldwin J. Ng, Vu A. Hong, Julia Huynh, Shasha Wang, and Thomas W. Kenny, "Characterization of Oxide-Coated Polysilicon Disk Resonator Gyroscope Within a Wafer-Scale Encapsulation Process," Journal of Microelectromechanical Systems, Vol. 24, No. 6, pp. 1687-1694, Dec 2015.
Ian B. Flader, Chae H. Ahn, Yushi Yang, Eldwin J. Ng, Vu A. Hong, Jeesu Baek, and Thomas W. Kenny, "Tunable quality factor through 1:1 modal coupling in a disk resonator," 2015 IEEE SENSORS, pp. 1-4, Nov 2015.
Clifton L. Roozeboom, Bridget E. Hill, Vu Anh Hong, Chae Hyuck Ahn, Eldwin J. Ng, Yushi Yang, Thomas W. Kenny, Matthew A. Hopcroft, and Beth L. Pruitt, "Multifunctional Integrated Sensors for Multiparameter Monitoring Applications," Journal of Microelectromechanical Systems, Vol. 24, No. 4, pp. 810-821, Aug 2015.
C.H. Ahn, V.A. Hong, W. Park, Y. Yang, Y. Chen, E.J. Ng, J. Huynh, A.D. Challoner, K.E. Goodson, and T.W. Kenny, "On-chip ovenization of encapsulated Disk Resonator Gyroscope (drg)," 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp. 39-42, Jun 2015.
V.A. Hong, J. Stehle, C.H. Ahn, D.B. Heinz, G. Yama, B. Kim, G.J. O'Brien, and T.W. Kenny, "Capacitive sensor fusion: Co-fabricated X/Y and Z-axis accelerometers, pressure sensor, thermometer," 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp. 295-298, Jun 2015.
Yushi Yang, Eldwin J. Ng, Yunhan Chen, Ian B. Flader, Chae Hyuck Ahn, Vu A. Hong, and Thomas W. Kenny, "A unified epi-seal process for resonators and inertial sensors," 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp. 1326-1329, Jun 2015.
Dustin D. Gerrard, Eldwin J. Ng, Chae H. Ahn, Vu A. Hong, Yushi Yang, and Thomas W. Kenny, "Modeling the effect of anchor geometry on the quality factor of bulk mode resonators," 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp. 1997-2000, Jun 2015.
J. Rodriguez, Y. Yang, C.H. Ahn, Y. Chen, E.J. Ng, V.A. Hong, S. Ghaffari, and T.W. Kenny, "Damping mechanisms in light and heavy-doped dual-ring and double-ended tuning fork resonators (DETF)," 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp. 2005-2008, Jun 2015.
V. Zega, S. Nitzan, M. Li, C. H. Ahn, E. Ng, V. Hong, Y. Yang, T. Kenny, A. Corigliano, and D. A. Horsley, "Predicting the closed-loop stability and oscillation amplitude of nonlinear parametrically amplified oscillators," Applied Physics Letters, Vol. 106, No. 23, pp. 233111, Jun 2015.
Eldwin J. Ng, Vu A. Hong, Yushi Yang, Chae Hyuck Ahn, Camille L. M. Everhart, and Thomas W. Kenny, "Temperature Dependence of the Elastic Constants of Doped Silicon," Journal of Microelectromechanical Systems, Vol. 24, No. 3, pp. 730-741, Jun 2015.
Shirin Ghaffari, Eldwin Jiaqiang Ng, Chae Hyuck Ahn, Yushi Yang, Shasha Wang, Vu A. Hong, and Thomas W. Kenny, "Accurate Modeling of Quality Factor Behavior of Complex Silicon MEMS Resonators," Journal of Microelectromechanical Systems, Vol. 24, No. 2, pp. 276-288, Apr 2015.
Chae Hyuck Ahn, Eldwin J. Ng, Vu A. Hong, Yushi Yang, Brian J. Lee, Ian Flader, Thomas W. Kenny, "Mode-Matching of Wineglass Mode Disk Resonator Gyroscope in (100) Single Crystal Silicon," Journal of Microelectromechanical Systems, Vol. 24, No. 2, pp. 343-350, Apr 2015.
C.H. Ahn, E. Ng, V.A. Hong, J. Huynh, T.W. Kenny, and S. Wang, "Oxide-coated polysilicon disk resonator gyroscope (DRG) within the wafer-scale encapsulation process," 2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings, pp. 1-2, Mar 2015.
Parsa Taheri-Tehrani, Oleg Izyumin, Igor Izyumin, Chae H. Ahn, Eldwin J. Ng, Vu A. Hong, Yushi Yang, Thomas W. Kenny, Bernhard E. Boser, and David A. Horsley, "Disk resonator gyroscope with whole-angle mode operation," 2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings, pp. 1-4, Mar 2015.
Sarah H. Nitzan, Valentina Zega, Mo Li, Chae H. Ahn, Alberto Corigliano, Thomas W. Kenny, and David A. Horsley, "Self-induced parametric amplification arising from nonlinear elastic coupling in a micromechanical resonating disk gyroscope," Scientific Reports, Vol. 5, pp. 9036, Mar 2015.
E. Ng, Y. Yang, V.A. Hong, C.H. Ahn, D.B. Heinz, I. Flader, Y. Chen, C.L.M. Everhart, B. Kim, R. Melamud, R.N. Candler, M.A. Hopcroft, J.C. Salvia, S. Yoneoka, A.B. Graham, M. Agarwal, M.W. Messana, K.L. Chen, H.K. Lee, S. Wang, G. Bahl, V. Qu, C.F. Chiang, T.W. Kenny, A. Partridge, M. Lutz, G. Yama, and G.J. O'Brien, "The long path from MEMS resonators to timing products," 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 1-2, Jan 2015.
D. Senkal, E.J. Ng, V. Hong, Y. Yang, C.H. Ahn, T.W. Kenny, and A.M. Shkel, "Parametric drive of a toroidal MEMS rate integrating gyroscope demonstrating < 20 PPM scale factor stability," 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 29-32, Jan 2015.
Igor I. Izyumin, Mitchell H. Kline, Yu-Ching Yeh, Burak Eminoglu, Chae Hyuck Ahn, Vu A. Hong, Yushi Yang, Eldwin J. Ng, Thomas W. Kenny, and Bernhard E. Boser, "A 7ppm, 6°/hr frequency-output MEMS gyroscope," 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 33-36, Jan 2015.
D.B. Heinz, V.A. Hong, T.S. Kimbrell, J. Stehle, C.H. Ahn, E.J. Ng, Y. Yang, G. Yama, G.J. O'Brien, and T.W. Kenny, "Stiction forces and reduction by dynamic contact in ultra-clean encapsulated MEMS devices," 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 393-396, Jan 2015.
Yushi Yang, Eldwin Ng, Pavel Polunin, Yunhan Chen, Scott Strachan, Vu Hong, Chae Hyuck Ahn, Ori Shoshani, Steven Shaw, Mark Dykman, and Thomas Kenny, "Experimental investigation on mode coupling of bulk mode silicon MEMS resonators," 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 1008-1011, Jan 2015.
Yunhan Chen, Eldwin J. Ng, Yushi Yang, Chae Hyuck Ahn, Ian Flader, and Thomas W. Kenny, "In-situ ovenization of Lamé-mode silicon resonators for temperature compensation," 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 809-812, Jan 2015.
C. H. Ahn, S. Nitzan, E. J. Ng, V. A. Hong, Y. Yang, T. Kimbrell, D. A. Horsley, and T. W. Kenny, "Encapsulated high frequency (235 kHz), high-Q (100 k) disk resonator gyroscope with electrostatic parametric pump," Applied Physics Letters, Vol. 105, No. 24, pp. 243504, Dec 2014.
Bo Woon Soon, Eldwin J. Ng, Vu A. Hong, Yushi Yang, Chae Hyuck Ahn, You Qian, Thomas W. Kenny, and Chengkuo Lee, "Fabrication and Characterization of a Vacuum Encapsulated Curved Beam Switch for Harsh Environment Application," Journal of Microelectromechanical Systems, Vol. 23, No. 5, pp. 1121-1130, Dec 2014.
C.L. Roozeboom, B.E. Hill, V.A. Hong, C.H. Ahn, E.J. Ng, Y. Yang, M.A. Hopcroft, and B.L. Pruitt, "Multifunctional Integrated Sensor Monitoring," Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2014, pp. 447-448, Jun 2014.
Yushi Yang, Eldwin J. Ng, Vu A. Hong, Chae Hyuck Ahn, Yunhan Chen, Elia Ahadi, Mark Dykman, and Thomas W. Kenny, "Measurement of the nonlinear elasticity of doped bulk-mode MEMS resonators," Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2014, pp. 285-288, Jun 2014.
M. Li, S. Sonmezoglu, E.J. Ng, V.A. Hong, C.H. Ahn, Y. Yang, T.W. Kenny, and D.A. Horsley, "Lorentz force magnetometer with quadratrue frequency modulation," Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2014, pp. 52-55, Jun 2014.
S. Nitzan, T-H. Su, C. Ahn, E. Ng, V. Hong, Y. Yang, T. Kenny, and D. A. Horsley, "Impact of gyroscope operation above the critical bifurcation threshold on scale factor and bias instability," 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 749-752, Jan 2014.
David B. Heinz, Vu A. Hong, Eldwin J. Ng, Chae Hyuck Ahn, Yushi Yang, and Thomas W. Kenny, "Characterization of stiction forces in ultra-clean encapsulated MEMS devices," 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 588-591, Jan 2014.
C. L. Roozeboom, V. A. Hong, C. H. Ahn, E. J. Ng, Y. Yang, B. E. Hill, M. A. Hopcroft, and B. L. Pruitt, "Multifunctional integrated sensor in A 2×2 mm epitaxial sealed chip operating in a wireless sensor node," 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 773-776, Jan 2014.
Mo Li, Eldwin J. Ng, Vu A. Hong, Chae H. Ahn, Yushi Yang, Thomas W. Kenny, and David A. Horsley, "Single-structure 3-axis lorentz force magnetometer with sub-30 nT/√HZ resolution," 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 80-83, Jan 2014.
D. Senkal, S. Askari, M. J. Ahamed, E. J. Ng, V. Hong, Y. Yang, C. H. Ahn, T. W. Kenny, and A. M. Shkel, "100K Q-factor toroidal ring gyroscope implemented in wafer-level epitaxial silicon encapsulation process," 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 24-27, Jan 2014.
E. J. Ng, Y. Yang,V. A. Hong, C. H. Ahn, D. L. Christensen, B. A. Gibson, K. R. Qalandar, K. L. Turner, T. W. Kenny, "Stable Pull-In Electrodes for Narrow Gap Actuation," IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2014, pp. 1281-1284, Jan 2014.
E. J. Ng, K. L. Harrison, C. L. Everhart, V. A. Hong, Y. Yang, C. H. Ahn, D. B. Heinz, R. T. Howe and T. W. Kenny, "Stable Charge-Biased Capacitive Resonators with Encapsulated Switches," IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2014, pp. 1277-1280, Jan 2014.
Shirin Ghaffari, Saurabh A. Chandorkar, Shasha Wang, Eldwin J. Ng, Chae H. Ahn, Vu Hong, Yushi Yang, and Thomas W. Kenny, "Quantum Limit of Quality Factor in Silicon Micro and Nano Mechanical Resonators," Scientific Reports, Vol. 3, Nov 2013.
M. Li, E. J. Ng, V. A. Hong, C. H. Ahn, Y. Yang, T. W. Kenny, and D. A. Horsley, "Lorentz force magnetometer using a micromechanical oscillator," Applied Physics Letters, Vol. 103, No. 17, pp. 173504, Oct 2013.
Shirin Ghaffari, Chae H. Ahn, Eldwin J. Ng, Shasha Wang, and Thomas W. Kenny, "Crystallographic effects in modeling fundamental behavior of MEMS silicon resonators," Microelectronics Journal, Vol. 44, No. 7, pp. 586-591, Jul 2013.
Y. Yang, E. J. Ng, C. H. Ahn, V. A. Hong, E. Ahadi, and T. W. Kenny, "Mechanical coupling of dual breathe-mode ring resonator," 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), pp. 502-505, Jun 2013.
V. A. Hong, B. J. Lee, D. L. Christensen, D. B. Heinz, E. J. Ng, C. H. Ahn, Y. Yang, and T. W. Kenny, "X-Y and Z-axis capacitive accelerometers packaged in an ultra-clean hermetic environment," 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), pp. 618-621, Jun 2013.
E. J. Ng, C.-F. Chiang, Y. Yang, V. A. Hong, C. H. Ahn, and T. W. Kenny, "Ultra-high aspect ratio trenches in single crystal silicon with epitaxial gap tuning," 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), pp. 182-185, Jun 2013.
E. J. Ng, C. H. Ahn, Y. Yang, V. A. Hong, C.-F. Chiang, E. Ahadi, M. W. Ward, and T. W. Kenny, "Localized, degenerately doped epitaxial silicon for temperature compensation of resonant MEMS systems," 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), pp. 2419-2422, Jun 2013.
C. H. Ahn, E. J. Ng, V. A. Hong, Y. Yang, B. J. Lee, M. W. Ward, and T. W. Kenny, "Geometric compensation of (100) single crystal silicon disk resonating gyroscope for mode-matching," 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), pp. 1723-1726, Jun 2013.
D. L. Christensen, C. H. Ahn, V. A. Hong, E. J. Ng, Y. Yang, B. J. Lee, and T. W. Kenny, "Hermetically encapsulated differential resonant accelerometer," 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), pp. 606-609, Jun 2013.
Eldwin J. Ng, Hyung Kyu Lee, Chae Hyuck Ahn, Renata Melamud, and Thomas W. Kenny, "Stability of Silicon Microelectromechanical Systems Resonant Thermometers," IEEE Sensors Journal, Vol. 13, No. 3, pp. 987-993, Mar 2013.
S. Nitzan, C. H. Ahn, T.-H. Su, M. Li, E. J. Ng, S. Wang, Z. M. Yang, G. O'Brien, B. E. Boser, T. W. Kenny, and D. A. Horsley, "Epitaxially-encapsulated polysilicon disk resonator gyroscope," 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 625-628, Jan 2013.
Chia-Fang Chiang, Andrew B. Graham, Brian J. Lee, Chae Hyuck Ahn, Eldwin J. Ng, Gary J. O'Brien, and Thomas W. Kenny, "Resonant pressure sensor with on-chip temperature and strain sensors for error correction," 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 45-48, Jan 2013.
Chia-Fang Chiang, Andrew B. Graham, Eldwin J. Ng, Chae Hyuck Ahn, Gary J. O'Brien, and Thomas W. Kenny, "A novel, high-resolution resonant thermometer used for temperature compensation of a cofabricated pressure sensor," Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2012, pp. 54-57, Jun 2012.
Eldwin J. Ng, Hyung Kyu Lee, Chae Hyuck Ahn, Renata Melamud, and Thomas W. Kenny, "Stability measurements of silicon MEMS resonant thermometers," 2011 IEEE SENSORS Proceedings, pp. 1257-1260, Oct 2011.