Micro Structures & Sensors Lab
Kenny Group @ Stanford

Anne Alter


PhD Candidate

anne :at: mems.stanford.edu
440 Escondido Mall, Bldg 530 Rm 224, Stanford, CA 94305, USA
Advisor: Thomas W. Kenny

Research

Fatigue in Epi-Polysilicon, Nonlinear Dissipation, TED Manipulation

Education

Stanford University
(2017 - 2020) Ph.D. Mechanical Engineering

Stanford University
(2015 - 2017) M.S. Mechanical Engineering

Iowa State University
(2009 - 2013) B.S. Mechanical Engineering

Experience

Phillips-Medisize Corporation
(2013 - 2015) Mechanical / CAE Engineer

Phillips-Medisize Corporation
(2012 - 2013) Mechanical Engineer Intern

Fellowships / Awards

Stanford Graduate Engineering Fellowship
(2015) Stanford University

Summa Cum Laude
(2013) Iowa State University

Publications

Conference
James M.L. Miller, Anne L. Alter, Nicholas E. Bousse, Yunhan Chen, Ian B. Flader, Dongsuk D. Shin, Thomas W. Kenny, Steven W. Shaw, "Influence of clamping loss and electrical damping on nonlinear dissipation in micromechanical resonators," 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 507-510, Jan 2022.
Journal
Gabrielle D. Vukasin, Nicholas E. Bousse, Anne L. Alter, and Thomas W. Kenny, "Etch-Hole Free, Large Gap Wafer Scale Encapsulation Process For Microelectromechanical Resonators," Hilton Head 2022 ,Solid-State Sensors, Actuators, and Microsystems Workshop, 2022.
Journal
Anne L. Alter, Ian B. Flader, Yunhan Chen, Lizmarie Comenencia Ortiz, Dongsuk D. Shin, and Thomas W. Kenny, "Characterization of Accelerated Fatigue in Thick Epi-Polysilicon Vacuum Encapsulated MEMS Resonators," Journal of Microelectromechanical Systems, pp. 1-10, 2020.
Journal
Anne L. Alter, Ian B. Flader, Yunhan Chen, Dongsuk D. Shin, and Thomas W. Kenny, "Nonlinear Dissipation in Epitaxial SCS and Polysilicon MEMS Driven at Large Amplitudes," Journal of Microelectromechanical Systems, pp. 1-3, 2020.
Journal
Anne L. Alter, Dustin D. Gerrard, Hyun-Keun Kwon, Gabrielle D. Vukasin, and Thomas W. Kenny, "Quality Factor Extraction and Enhancement Across Temperature in Ring Resonators," Journal of Microelectromechanical Systems, pp. 1-3, 2020.
Conference
Saisneha Koppaka, Anne L. Alter, Gabrielle D. Vukasin, Dongsuk D. Shin, Ian B. Flader, Yunhan Chen, and Thomas W. Kenny, "NONLINEARITY OF DEGENERATELY DOPED FLEXURAL MODE SILICON MICROMECHANICAL RESONATORS," Transducers 2019 - EUROSENSORS XXXIII, pp. 1897-1900, Jun 2019.
Conference
Anne L. Alter, Gabrielle D. Vukasin, Ian B. Flader, Hyo Jin Kim, Yunhan Chen, Daniel D. Shin, and Thomas W. Kenny, "EXPERIMENTALLY OBSERVED NONLINEAR DISSIPATION LINKED TO CONTRIBUTIONS FROM GAS DAMPING AND TED IN MEMS FLEXURAL MODE RESONATORS," Transducers 2019 - EUROSENSORS XXXIII, pp. 2095-2098, Jun 2019.
Journal
Ian B. Flader, Yunhan Chen, Yushi Yang, Eldwin J. Ng, Dongsuk D. Shin, David B. Heinz, Lizmarie Comenencia Ortiz, Anne L. Alter, Woosung Park, Kenneth E. Goodson, and Thomas W. Kenny, "Micro-Tethering for Fabrication of Encapsulated Inertial Sensors With High Sensitivity," Journal of Microelectromechanical Systems, Vol. 28, No. 3, pp. 372-381, Jun 2019.
Conference
Anne L. Alter, Ian B. Flader, Yunhan Chen, Lizmarie Comenencia Ortiz, Dongsuk D. Shin, David B. Heinz, and Thomas W. Kenny, "FIRST FATIGUE MEASUREMENTS ON THICK EPI-POLYSILICON MEMS IN ULTRA-CLEAN ENVIRONMENT," Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2018, pp. 132-135, Jun 2018.
Journal
Lizmarie Comenencia Ortiz, David B. Heinz, Ian B. Flader, Anne L. Alter, Dongsuk D. Shin, Yunhan Chen, and Thomas W. Kenny, "Assessing failure in epitaxially encapsulated micro-scale sensors using micro and nano x-ray computed tomography," MRS Communications, pp. 1-8, Apr 2018.
Conference
Ian B. Flader, Yunhan Chen, Chae Hyuck Ahn, Dongsuk D. Shin, Anne L. Alter, Janna Rodriguez, and Thomas W. Kenny, "Epitaxial encapsulation of fully differential electrodes and large transduction gaps for MEMS resonant structures," 2018 IEEE 31st International Conference on Micro Electro Mechanical Systems (MEMS), pp. 483-486, Jan 2018.
Conference
Ian B. Flader, Yunhan Chen, Dongsuk D. Shin, David B. Heinz, Lizmarie Comenencia Ortiz, Anne L. Alter, Woosung Park, Kenneth E. Goodson, Thomas W. Kenny, "Micro-tethering for in-process stiction mitigation of highly compliant structures," 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), Jan 2017.