Thomas Kenny
Project: MEMS-based research of all kinds
Email: kenny :at: mems.stanford.edu
Administrator
Linda Huber
Project:
Email: lhuber :at: mems.stanford.edu
Grad Students
David Heinz
Project: Stiction (Surface Adhesion) in Epitaxially Encapsulated MEMS Devices
Email: dheinz :at: mems.stanford.edu
Ian Flader
Project: Novel processes for epitaxial encapsulation, Disk Resonating Gyroscope Design and Characterization, Optimization Techniques.
Email: iflader :at: mems.stanford.edu
Camille Everhart
Project: Thermal Isolation and Characterization of Degenerately Doped Silicon Devices
Email: everhart :at: mems.stanford.edu
Janna Rodriguez
Project: Her research focuses on understanding the different dissipation mechanisms that affect quality factor through the use of models and wide-range temperature measurements.
Email: jannar :at: mems.stanford.edu
Grant Glaze
Project: Design and characterization of MEMS resonators with a focus on the temperature dependence of the quality factor.
Email: grantg :at: mems.stanford.edu
Bosch Affiliates
Gary Yama
Project:
Email: gyama :at: mems.stanford.edu