Projects Stanford Micro Structures & Sensors Lab

 
 


Research Projects

Center on Interfacial Engineering for MEMS Systems

Microscale Resonator Stability

Wafer Scale Encapsulation of MEMS Devices

Energy Loss Mechanisms in Micromechanical Resonators

Micromachined Piezoresistive Accelerometer

Electrokinetic Micro Coolers for VLSI Cooling

Bio AFM - Molecular Adhesion Measurements

Biomimetics

Gecko Adhesion Measurements

Sub-scale Monopropellant Propulsion Research

Low Power Temperature Regulator Using Variable Thermal Resistors

Frequency Stability Control of MEMS Oscillators

Low-Power Temperature-Stable Encapsulated MEMS Silicon Resonators

Thermal Isolation of MEMS Resonators

High Precision MEMS Digital Temperature Sensor  


Past Projects

Tunneling Sensors Research

Cantilever Arrays and Through-Wafer Interconnects

Mars Penetrator Pressure Sensor

Contact Force Measurements

Cantilevers for AFM Thermo-mechanical Data Storage

Single Crystal Cantilevers for MRFM

Micro-Calorimeter Sensor

Geophone research

LIGA research


[ Home | Projects | People | Publications | Links]

Comments: webmaster<@>micromachine.stanford.edu