Research Projects
Center on Interfacial Engineering for MEMS Systems
Microscale Resonator Stability
Wafer Scale Encapsulation of MEMS Devices
Energy Loss Mechanisms in Micromechanical Resonators
Micromachined Piezoresistive Accelerometer
Electrokinetic Micro Coolers for VLSI Cooling
Bio AFM - Molecular Adhesion Measurements
Sub-scale Monopropellant Propulsion Research
Low Power Temperature Regulator Using Variable Thermal Resistors
Frequency Stability Control of MEMS Oscillators
Low-Power Temperature-Stable Encapsulated MEMS Silicon Resonators
Thermal Isolation of MEMS Resonators
High Precision MEMS Digital Temperature Sensor
Past Projects
Cantilever Arrays and Through-Wafer Interconnects
Mars Penetrator Pressure Sensor
Cantilevers for AFM Thermo-mechanical Data Storage