Refereed Journal Publications
1. M. Agarwal, S.A. Chandorkar, R.N. Candler, B. Kim, M.A. Hopcroft, R. Melamud, C.M. Jha, T.W. Kenny and B. Murmann "Optimal drive condition for nonlinearity reduction in electrostatic MEMS resonators", Submitted to Applied Physics Letters (2006)2. R.N. Candler, M.A. Hopcroft, B. Kim, W.-T. Park, R. Melamud, M. Agarwal, G. Yama, A. Partridge, M. Lutz, and T.W. Kenny, "Long-Term and Accelerated Life Testing of a Novel Single-Wafer Vacuum Encapsulation for MEMS Resonators", To Be Published IEEE JMEMS 15, XXX (2006).
3. E.N. Wang, S. Devasenathipathy, H. Lin, C.H. Hidrovo, J.G. Santiago, K.E. Goodson, and T.W. Kenny, "A Hybrid Method for Bubble Geometry Reconstruction in Two-Phase Microchannels", Experiments in Fluids 40, 847 (2006).
4.C.H. Hidrovo, T.A. Kramer, E.N. Wang, S.Vigneron, J.E. Steinbrenner, J.M. Koo, F.M. Wang, D.W. Fogg, R.D. Flynn, E.S. Lee, C.H. Cheng, T.W. Kenny, J.K. Eaton, and K.E. Goodson, "Two-Phase Microfluidics for Semiconductor Circuits and Fuel Cells," Heat Transfer Engineering, 27, 53 (2006).
5. T.W. Kenny, K.E. Goodson, J.G Santiago, E.N.Wang, J-M Koo, L. Jiang, E. Pop, S. Sinha, L. Zhang, D. Fogg, S. Yao, R. Flynn, CH Chang, C.H. Hidrovo, "Advanced Cooling Technologies for Microprocessors", International Journal of High Speed Electronics and Systems, 15, 301 (2006).
6. K.Y. Yasumura, T.D. Stowe, A.N. Tewary, T.W. Kenny, and D. Rugar, "Quality Factor Enhancement of in-situ-Self-Annealing Silicon Microcantilevers", Submitted to IEEE JMEMS (2005).
7. A. Duwel, R.N. Candler, T.W. Kenny, M. Varghese, "Engineering MEMS Resonators with Low Thermoelastic Damping", Accepted IEEE JMEMS 10/06.
8. R.N. Candler, A. Duwel, M. Varghese, S. Chandorkar, M. Hopcroft, W.T. Park, B. Kim, G. Yama, A. Partridge, M. Lutz, and T.W. Kenny, "Impact of Geometry on Thermoelastic Dissipation in Micromechanical Resonant Beams", IEEE JMEMS 15, 927 (2006).
9. W.T. Park, A. Partridge, R.N. Candler, V. Ayanoor-Vitikkate, G. Yama, M. Lutz, and T.W. Kenny, "Encapsulated Sub-Millimeter Piezoresistive Accelerometers", JMEMS 15, 507 (2006).
10. E.N. Wang, S. Devasenathipathy, J.G. Santiago, K.E. Goodson, and T.W. Kenny, "Nucleation and Growth of Vapor Bubbles in a Heated Silicon Microchannel," ASME Journal of Heat Transfer, Vol. 128, p. 497. (2004)
11. B.W. King, T.W. Kenny, and K.E Goodson, "Comparison of Thermal and Piezoresistive Sensing Approaches for Atomic Force Microscopy Topography Measurements", Appl. Phys. Lett. 85, 2086 (2004).
12. E.N. Wang, L. Zhang, L. Jiang, J.M. Koo, J.G. Maveety, E.A. Sanchez, K.E. Goodson, and T.W. Kenny, "Micromachined Jets for Liquid Impingement Cooling of VLSI Chips", JMEMS 13, 833 (2004).
13. L. Zhang, E.N. Wang, K.E. Goodson, and T.W. Kenny, "Phase Change Phenomena in Silicon Microchannels", International Journal of Heat and Mass Transfer 48, 1572 (2005).
14. E.N. Renuart, A.M. Fitzgerald, T.W. Kenny, R. H. Dauskardt, "Fatigue Crack Growth in Micromachined Silngle Crystal Silicon", Journal of Materials Research 19, 2635 (2004).
15. J.P. Lynch, A. Sundararajan, K.H. Law, A.S. Kiremidjian, T. Kenny and S. Carryer, "Embedment of structural monitoring algorithms in a wireless sensing unit", Structural Engineering and Mechanics, 15, 285-97 (2003).
16. R.N. Candler, W.T. Park, H.M. Li, G. Yama, A. Partridge, M. Lutz, and T.W. Kenny, "Single Wafer Encapsulation of MEMS Devices", IEEE Transactions on Advanced packaging 26, 227 (2003).
17. J.P. Lynch, A. Partridge, K.H. Law, T.W. Kenny, A.S. Kiremidjian,E. Carryer, "Design of Piezoresistive MEMS-based Accelerometer for Integration with Wireless Sensing Unit for Structural Monitoring", Journal of AeroSpace Engineering, 16, 108 (2003).
18. Y. Hishinuma, T. Geballe, B. Moyzhes, and T.W. Kenny, "Measurements of Cooling by Room-Temperature Thermionic Emission across a Nanometer Gap" Journal of Applied Physics 94,4690 (2003).
Conference Publications
1. C. M. Jha, G. Bahl, R. Melamud, S. A. Chandorkar, M. A. Hopcroft, B. Kim, M. Agarwal, J. Salvia, H. Mehta and T. W. Kenny, "CMOS-Compatible Dual-Resonator MEMS Temperature Sensor with Milli-Degree Accuracy", Transducers 2007 Lyon France.
2. Chandra M. Jha, Matthew A. Hopcroft, Manu Agarwal, Saurabh A. Chandorkar, Rob N. Candler, Vijay Subramanian, Renata Melamud, Suhrid Bhat, Bongsang Kim, Kwan K. Park and Thomas W. Kenny, "In-chip Device-layer Thermal Isolation of MEMS Resonator for Lower Power Budget," Proceedings of IMECE2006 2006 ASME International Mechanical Engineering Congress and Exposition November 5-10, 2006, Chicago, Illinois, USA
3. M. Agarwal, K.K. Park, R.N. Candler, B. Kim, M.A. Hopcroft, S.A. Chandorkar, C.M. Jha, R. Melamud, T.W. Kenny, and B. Murmann, "Nonlinear Characterization of Electrostatic MEMS Resonators", 2006 Frequency Control Symposium (2006)
4. M. Agarwal, K.K. Park, B. Kim, M.A. Hopcroft, S.A. Chandorkar, R.N. Candler, C.M. Jha, R. Melamud, T.W. Kenny and B. Murmann, "Amplitude Noise Induced Phase Noise in Electrostatic MEMS Resonators", Proceedings of the 2006 Hilton Head Workshop in Solid State Sensors, Actuators, and Microsystems, p62 (2006).
5. R Melamud, B. Kim, M.A. Hopcroft, S. Chandorkar, M. Agarwal, C. Jha, S. Bhat, K.K. Park, and T.W. Kenny, "Composite Flexural Mode Resonators with Reduced Temperature Coefficient of Frequency", Proceedings of the 2006 Hilton Head Workshop in Solid State Sensors, Actuators, and Microsystems, p90 (2006).
6. B. Kim, C.M. Jha, T. White, R.N. Candler, M. Hopcroft, M. Agarwal, K.K. Park, R. Melamud, and T.W. Kenny, "Temperature Dependence of Quality Factor in MEMS Resonators", Proceedings 2006 International Conference on MEMS, Istanbul, Turkey (2006).
7. M. Agarwal, K.K. Park, M. Hopcroft, S. Chandorkar, R.N. Candler, B. Kim, R. Melamud, G. Yama, B. Murmann, and T.W. Kenny, "Effects of Mechanical Vibrations and Bias Voltage Noise on Phase Noise of MEMS Resonator-based Oscillators", Proceedings 2006 International Conference on MEMS, Istanbul, Turkey (2006).
8. M.A. Hopcroft, M. Agarwal, K.K. Park, B. Kim, C.M. Jha, R.N. Candler, G. Yama, B. Murmann, and T.W. Kenny, "Temperature Compensation of a MEMS Resonator using Quality Factor as a Thermometer", Proceedings 2006 International Conference on MEMS, Istanbul, Turkey (2006).
9. M. Agarwal, K. Park, R. Candler, M. Hopcroft, C. Jha, R. Melamud, B. Kim, B. Muhrman, and T. Kenny, "Nonlinearity Cancellation in MEMS Resonators for Improved Power Handling", 2005 International Electron Devices Meeting (2005).
10. R. Melamud, M. Hopcroft, C. Jha, B. Kim, S. Chandorkar, R. Candler, T.W. Kenny, "Effects of Stress on the Temperature Coefficient of Frequency in Double-Clamped Resonators", Proceedings Transducers '05, 392-395 (2005).
11. W.T. Park, K.N. O'Connor, J.R. Mallon, T. Maetani, R.N. Candler, V. Ayanoor-Vitikkate, J. Roberson, S. Puria, and T.W. Kenny, "Sub-Millimeter Encapsulated Accelerometers : A Fully Implantable Sensor for Cochlear Implants", Proceedings Transducers '05 109-112 (2005).
12. R.N. Candler, W.T. Park, M. Hopcroft,, B. Kim, and T.W. Kenny, "Hydrogen Diffusion and Pressure Control of Encapsulated MEMS Resonators", Proceedings, Transducers '05, 597-600 (2005).
13. R.N. Candler, M. Hopcroft, C.W. Low, S. Chandorkar, B. Kim, M. Varghese, A. Duwel, and T.W. Kenny, "Impact of Slot Location in Thermoelastic Dissipation in Micromechanical Resonators", Proceedings, Transducers '05, 920-923 (2005).
14. B. Kim, R.N. Candler, M. Hopcroft, M. Agarwal, W.T. Park, and T.W. Kenny, "Frequency Stability of Wafer-Scale Encapsulated MEMS Resonators", Proceedings, Transducers '05, 1965-1968 (2005).
15. W.T. Park, R.N. Candler, V.A. Vittikkate, M. Lutz, A. Partridge, G. Yama, T.W. Kenny, "Fully-Encapsulated Sub-MM Accelerometer", Proceedings18th IEEE International Conference on MEMS, 347, Miami, Fl (2005), 347-350 (2005).
16. B. Kim, R. N. Candler, M. Hopcroft, M. Agarwal, W.T Park, J.T. Li, and T. Kenny, "Investigation of MEMS Resonator Characteristics for Long-Term Operation and Wide Temperature Variation Condition", ASME Winter Annual Meeting, Anaheim CA, 2004.
17. M. Hopcroft, R. Melamud, R.N. Candler, W-T. Park, B. Kim, G. Yama, A. Partridge, M. Lutz, and T.W. Kenny, "Active Temperature Compensation for Micromachined Resonators", Proceedings 2004 Solid State Sensors and Actuators Workshop, 364-367 (2004).
18. E.N. Wang, S. Devasenathipathy, C.H. Hidrovo, D.W. Fogg, J.M. Koo, J.G. Santiago. K.E. Goodson and T.W. Kenny, "A Quantitative Understanding of Transient Bubble Growth in Microchannelsusing PIV", Proceedings 2004 Solid State Sensors and Actuators Workshop, 101-102 (2004).
19. R.N. Candler, M. Hopcroft, WT. Park, S.A. Chandorkar, G. Yama, K.E. Goodson, M. Varghese, A.E. Duwel, A. Partridge, M. Lutz and T.W. Kenny, "Reduction in Thermoelastic Dissipation in Micromechanical Resonators by Disruption of Heat Transport", Proceedings 2004 Solid State Sensors and Actuators Workshop, 45-48 (2004).
20. T.W. Kenny, Y. Liang, B.L. Pruitt, J.A. Harley, M. Bartsch, and R. Rudnitsky, "Fundamental Noise in MEMS Force Sensors", Proceedings 2004 SPIE Conference on Fluctuations and Noise in Sensors and Measurements, Maspalomas Gran Canaria, 143-151 (2004).
21. G. Upadhya, P. Zhou, K. Goodson, M. Munch, and T.W. Kenny, "Closed-Loop Cooling Technologies for Microprocessors", Proceedings 2003 International Electronic Devices Meeting, Washington, 775-778 (2003).
22. W.T. Park, R.N. Candler, J. Cho, H. Li, H. Li, M. Lutz, A. Partridge, G. Yama, and T.W. Kenny, "Wafer-Scale Encapsulation of MEMS Devices", Proceedings InterPACK '03, Kanapaali, HI IPACK 2003-35032 (2003).
23. W.T. Park, R.N. Candler, S. Kronmueller, M. Lutz, A. Partridge, G. Yama, and T.W. Kenny, "Wafer-Scale Film Encapsulation of Micromachined Accelerometers", Proceedings Transducers '03, Boston, 1903-1906 (2003).
24. B.W. Chui, Y. Hishinuma, R. Budakian, H.J. Mamin, T.W. Kenny, and D. Rugar, "Mass-Loaded Cantilevers with Suppressed Higher-Order Modes for Magnetic Resonance Force Microscopy", Proceedings Transducers '03, Boston, 1120-1123 (2003).
25. M.S. Bartsch, W. Federle, R.J. Full, and T.W. Kenny, "Small Insect Force Measurements using a Custom MEMS Force Sensor", Proceedings Transducers '03, Boston, 1035-1038 (2003).
26. R.N. Candler, H. Li, M. Lutz, W.T. Park, A. Partridge, G. Yama, and T.W. Kenny, "Investigation of Energy Loss Mechanisms in Micromechanical Resonators", Proceedings Transducers '03, Boston, 332-335 (2003).
27. D.J. Laser, A.M. Meyeers, S. Yao, K.F. Bell, K.E. Goodson, J.G. Santiago, and T.W. Kenny, "Silicon ElectroOsmotic MicroPumps for Integrated Circuit Thermal Management", Proceedings Transducers '03, Boston, 151-154 (2003).
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