Electrokinetic Micro Coolers for VLSI Cooling



The rapid development of high-speed, high-power, high-density integrated circuits requires compact devices for cooling. Microchannel heat sinks are receiving increasing attention because of their potential for removing large rates of heat per unit surface area. Our objective of this project is to design and fabricate two-phase heat exchangers integrated with electrokinetic (EK) pumps which are capable of removing 200W/cm2 (about the chip power dissipation level of the year 2005-2006) within 1W pump power consumption and 50C chip temperature rise. Prof. Tom Kenny, Ken Goodson, and Juan Santiago cowork on this three-year project (Jun. 1999-Jun. 2002) here at Stanford, and we also collaborate with Intel Corporation and Sandia National Lab.

Single-phase Heat Exchanger
Two-phase Heat Transfer in Microchannels
Phase Change Phenomena in Microchannels


Acknowledgments

DARPA HERETIC Program
Stanford Graduate Fellowships
Stanford Nanofabrication Facility