Publications

Journal Publications:

1. C. M. Jha, G. Bahl, R. Melamud, S. A. Chandorkar, M. A. Hopcroft, B. Kim, M. Agarwal, J. Salvia, H. Mehta, and T. W. Kenny, "High Resolution Microresonator-based Digital Temperature Sensor," selected for Virtual Journal of Nanoscale Science & Technology, August 2007.

2. C. M. Jha, G. Bahl, R. Melamud, S. A. Chandorkar, M. A. Hopcroft, B. Kim, M. Agarwal, J. Salvia, H. Mehta, and T. W. Kenny, "High Resolution Microresonator-based Digital Temperature Sensor," American Institute of Physics, Applied Physics Letters, 91, 074101-3, August 2007

3. Jha, C. M.;  Hopcroft M.A.; Chandorkar S.A.; Salvia J.C.; Agarwal M.; Candler R.N.; Melamud R.; Bongsang Kim; Kenny T.W.; "Thermal Isolation of Encapsulated MEMS Resonators," IEEE Journal of Microelectromechanical Systems, vol. 17, no. 1, pp. 175-184 Feb 2008.

4. C. M. Jha, J. Salvia, S. A. Chandorkar, R. Melamud, E. Kuhl, and T. W. Kenny, "Acceleration insensitive encapsulated silicon microresonator," American Institute of Physics, Applied Physics Letters, 93, 234103, December 2008.

5. M. Agarwal, S. A. Chandorkar, R. N. Candler, B. Kim, M. A. Hopcroft, R. Melamud, C. M. Jha, T. W. Kenny, B. Murmann, “Optimal Drive Condition for Nonlinearity Reduction in Electrostatic MEMS resonators,” American Institute of Physics Applied Physics Letters, vol. 89, no. 21, pp. 4105-07, 2006.

6. Renata Melamud, Bongsang Kim, Saurabh A. Chandorkar, Matthew A. Hopcroft, Manu Agarwal, Chandra M. Jha and Thomas W. Kenny, "Temperature-Compensated High-Stability Silicon Resonators," American Institute of Physics, Applied Physics Letters, vol. 90, no. 24, June 2007.

7. M. A. Hopcroft, B. Kim, S. Chandorkar, R. Melamud, M. Agarwal, C. M. Jha, G. Bahl, J. Salvia, H. Mehta, H. K. Lee, R. N. Candler, and T. W. Kenny, "Using the temperature dependence of resonator quality factor as a thermometer," American Institute of Physics, Applied Physics Letters, 91, 013505, July 2007

8. Manu Agarwal, Saurabh A. Chandorkar, Harsh Mehta, Robert N. Candler, Bongsang Kim, Matthew A. Hopcroft, Renata Melamud, Chandra M. Jha, Gaurav Bahl, Gary Yama, Thomas W. Kenny, and Boris Murmann, “A study of electrostatic force nonlinearities in resonant microstructures,” American Institute of Physics Applied Physics Letters, vol. 92, no. 10, March 2008.

9. Bongsang Kim; Hopcroft, M.A.; Candler, R.N.; Jha, C. M.; Agarwal, M.; Melamud, R.; Chandorkar, S.A.; Yama, G.; Kenny, T.W., “Temperature dependence of quality factor in MEMS resonators,” IEEE Journal of Microelectromechanical Systems, vol. 17, no. 3, pp. 755-766 June 2008.

10. B. Kim, R. N. Candler, C. M. Jha, R. Melamud, S. Yoneoka, H. K. Lee, M. A. Hopcroft, G. Yama, and T. W. Kenny, "Hermeticity and Diffusion Investigation in Polycystalline Silicon Encapsulation for MEMS Devices," Journal of Applied Physics, vol. 105, pp. 013514, Jan 2009.

 

Conference Publications:

1. C. M. Jha, G. Bahl, R. Melamud, S. A. Chandorkar, M. A. Hopcroft, B. Kim, M. Agarwal, J. Salvia, H. Mehta and T. W. Kenny, "CMOS-Compatible Dual-Resonator MEMS Temperature Sensor with Milli-Degree Accuracy," Transducers 2007 Lyon France.

2. Chandra M. Jha, Matthew A. Hopcroft, Manu Agarwal, Saurabh A. Chandorkar, Rob N. Candler, Vijay Subramanian, Renata Melamud, Suhrid Bhat, Bongsang Kim, Kwan K. Park and Thomas W. Kenny, "In-chip Device-layer Thermal Isolation of MEMS Resonator for Lower Power Budget," Proceedings of IMECE2006 2006 ASME International Mechanical Engineering Congress and Exposition November 5-10, 2006, Chicago, Illinois, USA

3. B. Kim, C. M. Jha, R. N. Candler, M. Hopcroft, S. Chandorkar, T. White, M. Agarwal, K. K. Park, R. Melamud and T. W. Kenny, “Temperature Dependence of Quality Factors in MEMS Resonators,” presented at 19th IEEE MEMS Conf., Istanbul, Turkey, 2006.

4. B. Kim, M. Hopcroft, C. M. Jha, R. Melamud, S. Chandorkar, M. Agarwal, K. L. Chen, W. T. Park, R. Candler, G. Yama, A. Partridge, M. Lutz, and T. W. Kenny, "Using MEMS to build the device and the package," presented at Transducers & Eurosensors 2007, Lyon France.

5. R. Melamud, M. Hopcroft, C. M. Jha, B. Kim, S. Chandorkar, R. Candler, T. W. Kenny, "Effects of Stress on the Temperature Coeeficient of Frequency in Double Clamped Resonators," Tranducers '05, vol. 1, pp. 392-395, 2005.

6. B. Kim, M. A. Hopcroft, R. Melamud, C. M. Jha, M. Agarwal, S. A. Chandorkar and T. W. Kenny, "CMOS Compatible Wafer-Scale Encapsulation with MEMS resonators" presented at ASME InterPACK 2007 Vancouver, Canada, Jul 2007.

7. M. Hopcroft, M. Agarwal, K. K. Park, B. Kim, C. M. Jha, R. N. Candler, G. Yama, B. Murmann and T. W. Kenny, "Temperature Compensation of a MEMS Resonator Using Quality Factor as a Thermometer," presented at 19th IEEE MEMS Conf., Istanbul, Turkey, 2006.

8. M. Agarwal, K. K. Park, R. N. Candler, M. Hopcroft, C. M. Jha, R. Melamud, B. Kim, B. Murmann and T. W. Kenny, "Non-Linearity Cancellation in MEMS Resonators for Improved Power-Handling," presented at IEEE Int. Electron Devices Meeting, Washington D.C., 2005.

9. S. A. Chandorkar, H. Mehta, M. Agarwal, M. A. Hopcroft, C. M. Jha, R. N. Candler, G. Yama, G. Bahl, B. Kim, R. Melamud, K. E. Goodson and T. W. Kenny, “Non-isothermal micromechanical resonators,” presented at 20th IEEE MEMS Conf., Kobe (Japan), Jan. 2007.

10. R. Melamud, B. Kim, M. A. Hopcroft, S. Chandorkar, M. Agarwal, C. M. Jha, and T. W. Kenny, “Composite Flexural Mode Resonator with Controllable turnover temeprature,” presented at 20th IEEE MEMS Conf., Kobe (Japan), Jan. 2007.

11. R. Melamud, B. Kim, M. A. Hopcroft, S. Chandorkar, M. Agarwal, C. M. Jha, K. K. Park and T. W. Kenny, “Composite Flexural Mode Resonator with Reduced Temperature Coefficient of Frequency,” presented at Hilton Head Workshop, Hilton Head, SC, 2006.

12. T. W. Kenny, M. Lutz, A. Partridge, G. Yama, R. Candler, W. T. Park, M. Hopcroft, B. Kim, M. Agarwal, S. Chandorkar, R. Melamud, C. M. Jha, “Advances in MEMS Integration: MEMS First or MEMS Last?” presented at the 12th International Micromachine/Nanotech Symposium in Tokyo (Japan), Nov. 2006.

13. T. W. Kenny, A. Partridge, R. Candler, W. T. Park, M. Hopcroft, B. Kim, M. Agarwal, S. Chandorkar, R. Melamud, C. M. Jha, “Manufacturable MEMS: Building the MEMS, the Package and the Circuit in the Same Technology,” presented at Intl. Forum on Micro-nano Hetero Sys. Int., Sendai (Japan), Nov. 2006.

14. M. Agarwal, K. K. Park, R. N. Candler, B. Kim, M. A. Hopcroft, S. A. Chandorkar, C. M. Jha, R. Melamud, T. W. Kenny and B. Murmann, “Nonlinear Characterization of Electrostatic MEMS resonators,” presented at IEEE Frequency Control Symposium, Miami, FL, 2006.

15. M. Agarwal, K. K. Park, B. Kim, M. A. Hopcroft, S. Chandorkar, R. N. Candler, C. M. Jha, R. Melamud, B. Murrman and T. W. Kenny, “Amplitude Noise induced Phase Noise in Electrostatic MEMS Resonators,” presented at Hilton Head Workshop, Hilton Head, SC, 2006.

16. G. Bahl, R. Melamud, B. Kim, S. Chandorkar, J. Salvia, M. A. Hopcroft, R. G. Hennessy, S. Yoneoka, C. M. Jha, G. Yama, D. Elata, R. N. Candler, R. T. Howe, and T. W. Kenny, "Observations of fixed and mobile charge in composite MEMS resonators," presented at Hilton Head, USA, June 2008

 



 
 
 
 

Supported by the DARPA HERMIT Program


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