Manu Agarwal     

Graduate Student Researcher

Micro Structures & Sensors Lab

Department of Electrical Engineering

Stanford University

  

Contact Information:

Mechanical Engineering

440 Escondido Mall

Bldg. 530, Room # 224

Stanford CA 94305-3030

Tel: (650) 723-0277

Fax: (650) 723-7657

Email: manu dot agarwal at stanford dot edu

      

Advisors:

Thomas W. Kenny

 Boris Murmann

 

Research Topic:

Advanced Considerations in Electrostatic Transduction & Nonlinearities in Resonant Microstructures

 

Journal Publications

1)      B. Kim, R. N. Candler, M. Hopcroft, M. Agarwal, W.-T Park and T. W. Kenny, “Frequency Stability of Encapsulated MEMS Resonator,” Sensors and Actuators, In Press, 2007.

2)      M. Agarwal, K. K. Park, S. A. Chandorkar, R. N. Candler, B. Kim, M. A. Hopcroft, R. Melamud, T. W. Kenny, B. Murmann, “Acceleration sensitivity in beam-type electrostatic micoresonators,”  American Institute of Physics, Applied Physics Letters, vol. 90, no. 1, pp. 4103-05, 2007. [pdf]

3)      M. Agarwal, D. Dutton, J. A. Theil, Q. Bai, E. Par and S. Hoen, “Characterization of a Dipole Surface Drive Actuator with Large Travel and Force,” IEEE Journal of Microelectromechanical Systems, vol. 15, no. 6, pp. 1726-1734, 2006. [pdf]

4)      M. Agarwal, S. A. Chandorkar, R. N. Candler, B. Kim, M. A. Hopcroft, R. Melamud, C. M. Jha, T. W. Kenny, B. Murmann, “Optimal Drive Condition for Nonlinearity Reduction in Electrostatic MEMS resonators,” American Institute of Physics Applied Physics Letters, vol. 89, no. 21, pp. 4105-07, 2006. [pdf]

5)      R. N. Candler, M. Hopcroft, B. Kim, W.-T. Park, R. Melamud, M. Agarwal, G. Yama, A. Partridge, M. Lutz and T. W. Kenny, "Long-Term and Accelerated Life Testing of a Novel Single-Wafer Vacuum Encapsulation of MEMS Resonators," IEEE Journal of Microelectromechanical Systems, vol. 15, no. 6, pp. 1446-1456, 2006.

6)      A. Mahajan, M. Agarwal and A. K. Chaturvedi, "A novel method for down-conversion of multiple bandpass signals," IEEE Transactions on Wireless Communication, vol.5, no.2, pp. 427- 434, February 2006. [pdf]

 

Conference Publications

1)      M. Agarwal, H. Mehta, R. N. Candler, S. A. Chandorkar, M. A. Hopcroft, R. Melamud, G. Bahl, T. W. Kenny, B. Murmann, “Impact of Miniaturization on the Current Handling of Electrostatic MEMS Resonators,” presented at 20th IEEE MEMS Conf., Kobe (Japan), Jan. 2007. [pdf]

2)      S. A. Chandorkar, H. Mehta, M. Agarwal, M. A. Hopcroft, C. M. Jha, R. N. Candler, G. Yama, G. Bahl, B. Kim, R. Melamud, K. E. Goodson and T. W. Kenny, “Non-isothermal micromechanical resonators,” presented at 20th IEEE MEMS Conf., Kobe (Japan), Jan. 2007.

3)      R. Melamud, B. Kim, M. A. Hopcroft, S. Chandorkar, M. Agarwal, C. M. Jha, and T. W. Kenny, “Composite Flexural Mode Resonator with Controllable turnover temeprature,” presented at 20th IEEE MEMS Conf., Kobe (Japan), Jan. 2007.

4)      T. Kenny, M. Lutz, A. Partridge, G. Yama, R. Candler, W. T. Park, M. Hopcroft, B. Kim, M. Agarwal, S. Chandorkar, R. Melamud, C. M. Jha, “Advances in MEMS Integration: MEMS First or MEMS Last?” presented at the 12th International Micromachine/Nanotech Symposium in Tokyo (Japan), Nov. 2006.

5)      T. Kenny, A. Partridge, R. Candler, W. T. Park, M. Hopcroft, B. Kim, M. Agarwal, S. Chandorkar, R. Melamud, C. M. Jha, “Manufacturable MEMS: Building the MEMS, the Package and the Circuit in the Same Technology,” presented at Intl. Forum on Micro-nano Hetero Sys. Int., Sendai (Japan), Nov. 2006.

6)      M. Agarwal, K. K. Park, R. N. Candler, B. Kim, M. A. Hopcroft, S. A. Chandorkar, C. M. Jha, R. Melamud, T. W. Kenny and B. Murmann, “Nonlinear Characterization of Electrostatic MEMS resonators,” presented at IEEE Frequency Control Symposium, Miami, FL, 2006. [pdf]

7)      M. Agarwal, K. K. Park, B. Kim, M. A. Hopcroft, S. Chandorkar, R. N. Candler, C. M. Jha, R. Melamud, B. Murrman and T. W. Kenny, “Amplitude Noise induced Phase Noise in Electrostatic MEMS Resonators,” presented at Hilton Head Workshop, Hilton Head, SC, 2006. [pdf]

8)      R. Melamud, B. Kim, M. A. Hopcroft, S. Chandorkar, M. Agarwal, C. M. Jha, K. K. Park and T. W. Kenny, “Composite Flexural Mode Resonator with Reduced Temperature Coefficient of Frequency,” presented at Hilton Head Workshop, Hilton Head, SC, 2006.

9)      M. Agarwal, K. K. Park, M. Hopcroft, S. Chandorkar, R. N. Candler, B. Kim, R. Melamud, G. Yama, B. Murmann and T. W. Kenny, "Effects of Mechanical Vibrations and Bias Voltage Noise on Phase Noise of MEMS Resonator Based Oscillators," presented at 19th IEEE MEMS Conf., Istanbul, Turkey, 2006. [pdf]

10)  M. Hopcroft, M. Agarwal, K. K. Park, B. Kim, C. M. Jha, R. N. Candler, G. Yama, B. Murmann and T. W. Kenny, "Temperature Compensation of a MEMS Resonator Using Quality Factor as a Thermometer," presented at 19th IEEE MEMS Conf., Istanbul, Turkey, 2006. [pdf]

11)  B. Kim, C. M. Jha, R. N. Candler, M. Hopcroft, S. Chandorkar, T. White, M. Agarwal, K. K. Park, R. Melamud and T. W. Kenny, “Temperature Dependence of Quality Factors in MEMS Resonators,” presented at 19th IEEE MEMS Conf., Istanbul, Turkey, 2006.

12)  M. Agarwal, K. K. Park, R. N. Candler, M. Hopcroft, C. M. Jha, R. Melamud, B. Kim, B. Murmann and T. W. Kenny, "Non-Linearity Cancellation in MEMS Resonators for Improved Power-Handling," presented at IEEE Int. Electron Devices Meeting, Washington D.C., 2005.

13)  B. Kim, R. N. Candler, M. Hopcroft, M. Agarwal, W.-T. Park and T. W. Kenny, "Frequency Stability of Wafer-Scale Encapsulated MEMS Resonators," Tranducers '05, vol. 2, pp. 1965-1968, 2005.

14)   B. Kim, R. N. Candler, M. Hopcroft, M. Agarwal, W.-T Park, J. Li and T. W. Kenny, “Investigation of MEMS Resonators Characteristics for Long-Term Operation and Wide Temperature Variation Condition,” 2004 ASME International Mechanical Engineering Congress and RD&D Expo, 2004.

15)   B. Kim, R. N. Candler, M. Agarwal, W.-T.Park and T. W. Kenny, “Long-term Measurement of Quality Factor for MEMS Resonators – Pressure and Leak within Encapsulation,” presented Open Poster, IEEE Solid-State Sensor and Actuator Workshop 2004, Hilton Head, South Carolina, June 6-12, 2004.

 

Invited Talks

1)       M. Agarwal and T. W. Kenny, “Nonlinearity limited power handling in MEMS resonator based oscillators,” Presented at the Nanotimer Workshop on MEMS resonators, Lausanne (Switzerland), February 2006.

2)       M. Agarwal, B. Murmann and T. W. Kenny, “MEMS Resonator based Oscillators,” Presented at Research and Technology Center, Robert Bosch Corporation, Palo Alto (California), March 2006.

 

The Other Side (Non-Technical)

1)    “Vote of Thanks”. This was a podium speech delivered at my High School Farewell party in April, 1999. I was chosen to give present the vote of thanks on the behalf of the outgoing class. This speech was liked and later published in the school journal “The Aloysian – 1998 - 1999”. The linked page is a scan of this journal page.

 

 

Resume

 

Last Updated: 1/18/2007