Design Division, Department of Mechanical
Engineering, Stanford University
dlaser@micromachine.stanford.edu
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| Silicon Electroosmotic Micropumps:
Design and Theory of Operation Prototypes, Performance, and Applications |
Collaborators:
Prof. Tom Kenny, Stanford Micro Structures and Sensors Laboratory Prof. Juan Santiago, Stanford Microfluidics Laboratory Prof. Ken Goodson, Stanford Microscale Heat Transfer Laboratory |
| Prototype Silicon Electroosmotic Micropumps |
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| Photograph of a prototype silicon electroosmotic micropump. The dimensions of this pump are 1 cm x 2 cm x 1 mm. | Pressure-flow rate performance of a prototype silicon electroosmotic micropump with 1000 deep-etched slots. Working fluid is borate buffer; operating voltage is 400 V. |
| Applications |
| Integrated Circuit Thermal Management | Micro Chemical and Biological Analysis | |
In collaboration with Intel Corp., we are exploring using silicon electroosmotic micropumps to address thermal design issues for next-generation integrated circuits. In one possible implementation, arrays of micropumps, temperature sensors, and fluid flow networks are used to redistribute heat from hot spots that arise during microchip operation. |
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| Silicon electroosmotic micropumps may be used in portable devices for performing biological assays. Although surface tension and traditional EOF channels are suitable for transporting very small quantities of fluids, these mechanisms are insufficient for reagent volumes on the order of 10-100 ml. The illustration shows how a silicon EO pump can be used to inject a reagent into a reaction chamber as part of an assay. |
| Patents issued and pending. |
| Question? Comments? dlaser@micromachine.stanford.edu |