First Author
ÒTemperature Compensated High-Stability Silicon
ResonatorsÓ
R. Melamud, B. Kim, S.A. Chandorkar, M.A. Hopcroft, M.
Agarwal, C.M. Jha and T.W. Kenny.
Applied
Physics Letters 90 (24), 2007.
ÒSU-8 MEMS Fabry-Perot Pressure SensorÓ
G.C. Hill*, R. Melamud*, F.E. Declercq, A.A. Davenport,
I.H. Chan, P.G. Hartwell, B.L. Pruitt
Sensors and Actuators
A.138 (1), pp. 52-62, 2007. * Shared first authorship.
Contributing Author
"Scaling of A-f
nonlinearities in electrostatically transduced microresonators"
M.Agarwal, H.Mehta, R.N. Candler, S.A. Chandorkar, B.
Kim, M.A. Hopcroft, R.Melamud, G. Bahl, G. Yama2, T. W. Kenny and B.
Murmann, Journal of Applied Physics v.102 (7),
2007.
"Using the Temperature
Dependence of Resonator Quality Factor as a Thermometer"
M.A. Hopcroft, B. Kim, S. Chandorkar,
R. Melamud, M. Agarwal, C.M. Jha, G. Bahl, J.Salvia,
H.Mehta, H.K.Lee, R.N.Candler, T.W.Kenny. Applied Physics Letters 91 (1), 2007.
"High precision
microresonator-based digital temperature sensor"
C. M. Jha, G. Bahl, R.
Melamud, S. A. Chandorkar, M. A. Hopcroft, B. Kim, M. Agarwal, J. Salvia,
H. Mehta, and T. W. Kenny. Applied
Physics Letters 91 (7), 2007.
"Thermal Isolation of
Encapsulated MEMS Resonators"
C.M. Jha, M.A. Hopcroft, S.A.
Chandorkar, J.Salvia, M.Agarwal,R.N. Candler, R.Melamud, B.Kim, and Thomas
W. Kenny, Submitted to JMEMS (2007).
"Acceleration
sensitivity in beam-type electrostatic microresonators"
M. Agarwal, K.K. Park, S.A.
Chandorkar, R.N. Candler, B. Kim, M.A. Hopcroft, R. Melamud, T.W. Kenny,
and B. Murmann, Appl. Phys.
Lett (2007).
"Optimal drive
condition for nonlinearity reduction in electrostatic MEMS resonators"
M. Agarwal, S.A. Chandorkar,
R.N. Candler, B. Kim, M.A.
Hopcroft, R. Melamud, C.M. Jha, T.W. Kenny and B. Murmann, Appl.
Phys. Lett., 89, (2006)
"Long-Term and Accelerated Life Testing of a
Novel Single-Wafer Vacuum
Encapsulation for MEMS Resonators"
R.N. Candler, M.A. Hopcroft,
B. Kim, W.-T. Park, R. Melamud, M. Agarwal, G. Yama, A. Partridge, M. Lutz,
and T.W. Kenny, JMEMS 15, 2006.
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First Author
"Composite
Flexural-Mode Resonator with Controllable Turnover Temperature"
R. Melamud, B. Kim, M.A.
Hopcroft, S.Chandorkar,
M.Agarwal, C.M. Jha, and T.W. Kenny, Poster Presentation, Proceedings
2007 International Conference on MEMS, Kobe, Japan (2007).
"Composite Flexural Mode Resonators with Reduced
Temperature Coefficient of Frequency"
R Melamud, B. Kim, M.A.
Hopcroft, S. Chandorkar, M. Agarwal, C. Jha, S. Bhat, K.K. Park, and T.W.
Kenny, Oral Presentation, Proceedings of the 2006 Hilton Head Workshop in
Solid State Sensors, Actuators, and Microsystems, p90 (2006).
"Effects of Stress on the Temperature Coefficient
of Frequency in Double-Clamped Resonators"
R. Melamud, M. Hopcroft, C.
Jha, B. Kim, S. Chandorkar, R. Candler, T.W. Kenny, Oral Presentation,
Proceedings Transducers '05, 392-395 (2005).
Contributing Author
"Non-Isothermal
Micromechanical Resonators"
S. A. Chandorkar, H. Mehta, M.
Agarwa1, M.A. Hopcroft, C. M. Jha, R.N. Candler, G.Yama, G. Bahl, B. Kim,
R. Melamud, K. E. Goodson and T. W. Kenny, Proceedings 2007 International
Conference on MEMS, Kobe,
Japan (2007).
"Impact of
Miniaturization on the Current Handling of MEMS Resonators"
M.Agarwal , H. Mehta, R.N.
Candler, S.A. Chandorkar,
B. Kim , M.A. Hopcroft, R. Melamud, G. Bahl, G. Yama, T.W. Kenny and B. Murmann,, Proceedings 2007 International
Conference on MEMS, Kobe, Japan (2007).
"Advances in MEMS
Integration: MEMS First or MEMS Last?"
T.Kenny, M. Lutz, A.
Partridge, G. Yama, R.N. Candler, W.T. Park, M. Hopcroft, B. Kim, M.
Agarwal, S. Chandorkar, R. Melamud, C. Jha, Proceedings 12th International
Micromachine/Nanotech Symposium, Tokyo, Japan Nov, 2006.
"Nonlinear
Characterization of Electrostatic MEMS Resonators"
M. Agarwal, K.K. Park, R.N.
Candler, B. Kim, M.A. Hopcroft, S.A. Chandorkar, C.M. Jha, R. Melamud, T.W.
Kenny, and B. Murmann, 2006
Frequency Control Symposium (2006)
ÒLeveraging Standard IC
Packaging For MEMS OscillatorsÓ
P. Gupta, E. Radza, W. Chen,
R. Sheridan, R. Sheridan, R. Melamud, M. Lutz, A. Partridge, K. Petersen,
Open poster at Hilton Head Workshop in Solid State Sensors, Actuators, and
Microsystems, 2006.
"Amplitude Noise
Induced Phase Noise in Electrostatic MEMS Resonators"
M. Agarwal, K.K. Park, B. Kim,
M.A. Hopcroft, S.A. Chandorkar, R.N. Candler, C.M. Jha, R. Melamud, T.W.
Kenny and B. Murmann, Proceedings of the 2006 Hilton Head Workshop in Solid
State Sensors, Actuators, and Microsystems, p62 (2006).
"Temperature
Dependence of Quality Factor in MEMS Resonators"
B. Kim, C.M. Jha, T. White,
R.N. Candler, M. Hopcroft, M. Agarwal, K.K. Park, R. Melamud, and T.W.
Kenny, Proceedings 2006 International Conference on MEMS, Istanbul, Turkey
(2006).
"Effects of Mechanical Vibrations and Bias
Voltage Noise on Phase Noise of MEMS Resonator-based Oscillators"
M. Agarwal, K.K. Park, M.
Hopcroft, S. Chandorkar, R.N. Candler, B. Kim, R. Melamud, G. Yama, B.
Murmann, and T.W. Kenny, Proceedings 2006 International Conference on MEMS,
Istanbul, Turkey (2006).
"Nonlinearity
Cancellation in MEMS Resonators for Improved Power Handling"
M. Agarwal, K. Park, R.
Candler, M. Hopcroft, C. Jha, R. Melamud, B. Kim, B. Muhrman, and T. Kenny,
2005 International Electron Devices Meeting (2005).
"Active Temperature
Compensation for Micromachined Resonators"
M.
Hopcroft, R. Melamud, R.N. Candler, W-T. Park, B. Kim, G. Yama, A.
Partridge, M. Lutz, and T.W. Kenny, Proceedings 2004 Solid State Sensors
and Actuators Workshop, 364-367 (2004).
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