## Shingo Yoneoka
Ph.D. Candidate
Advisor: Prof. Thomas W. Kenny |

- ALD-enhanced bolometer
- Fatigue study of silicon using epi-seal encapsulated microelectromechanical resonators
- Active acceleration compensation of MEMS resonators
- SiC-seal encapsulation of microelectromechanical resonators

__S. Yoneoka__, J. C. Salvia, G. Bahl, R. Melamud, S. A. Chandorkar, and T. W. Kenny, "Active Electrostatic Compensation of Micromechanical Resonators Under Random Vibrations,"*JMEMS Letter,*Vol. 19, No. 5, pp. 1270-1272, 2010. DOI: 10.1109/JMEMS.2010.2067444__S. Yoneoka__, C. S. Roper, R. N. Candler, S. A. Chandorkar, A. B. Graham, J Provine, R. Maboudian, R. T. Howe, and T. W. Kenny, "Characterization of encapsulated micromechanical resonators sealed and coated with polycrystalline SiC,"*Journal of Microelectromechanical Systems,*Vol. 19, No. 2, pp. 357-366, 2010. DOI: 10.1109/JMEMS.2010.2040460- A. B. Graham, M. W. Messana, P. G. Hartwell, J Provine,
__S. Yoneoka__, R. Melamud, B. Kim, R. T. Howe, and T. W. Kenny, "A method for wafer-scale encapsulation of large lateral deflection MEMS devices,"*Journal of Microelectromechanical Systems,*Vol. 19, No. 1, pp. 28-37, 2010. DOI: 10.1109/JMEMS.2009.2035717 - B. Kim, R. N. Candler, R. Melamud, M. A. Hopcroft,
__S. Yoneoka__, H. K. Lee, M. Agarwal, S. A. Chandorkar, G. Yama, and T. W. Kenny, "Hermeticity and diffusion investigation in polysilicon film encapsulation for microelectromechanical systems,"*Journal of applied physics,*vol. 105, 2009. DOI: 10.1063/1.3054366 - Y. Tagaya,
__S. Yoneoka__, M. Baba, K. Fukuzawa, and Y. Mitsuya, "Effects of applied voltage and fence configurations on DNA separtion based on electrophoresisUsing nanostructured fence matrix,"*Transactions of the Japan Society of Mechanical Engineers Series A,*Vol. 73, No. 726, pp. 555-561, 2007 (in Japanese).

__S. Yoneoka__, M. Liger, G. Yama, R. Schuster, F. Purkl, J Provine, F. B. Prinz, R. T. Howe, and T. W. Kenny, "ALD-metal uncooled bolometer,"*Proc. 24th IEEE MEMS 2011*, Cancun, Mexico, 2011, Accepted.- H. K. Lee, J. C. Salvia,
__S. Yoneoka__, G. Bahl, Y. Q. Qu, R. Melamud, S. Chandorkar, M.A. Hopcroft, B. Kim, and T. W. Kenny, "Stable oscillation of MEMS resonators beyond the critical bifuracation point,"*Proc. Hilton Head Workshop*, Jun. 6-10, 2010, pp. 70-73. - M. W. Messana, A. B. Graham,
__S. Yoneoka__, R. T. Howe, and T. W. Kenny, "Packaging of large lateral deflection MEMS using a combination of fusion bonding and epitaxial reactor sealing,"*Proc. Hilton Head Workshop*, Jun. 6-10, 2010, pp. 336-339. - M. A. Philippine, C.-F. Chiang, J. Salvia, C. M. Jha,
__S. Yoneoka__, and T. W. Kenny, "Material distribution design for a piezoelectric energy harvester displaying geometric nonlinearity,"*Proc. Hilton Head Workshop*, Jun. 6-10, 2010, pp. 451-454. __S. Yoneoka__, Y. Q. Qu, S. Wang, M. W. Messana, A. B. Graham, J. Salvia, B. Kim, R. Melamud, G. Bahl, and T. W. Kenny, "High-cyclic fatigue experiments of single crystal silicon in an oxgen-free environment,"*Proc. 23rd IEEE MEMS 2010*, Hong Kong, 2010, pp. 224-227.- G. Bahl, J. Salvia, I. Bargatin,
__S. Yoneoka__, R. Melamud, B. Kim, S. Chandorkar, M. A. Hopcroft, R. Bahl, R. T. Howe, and R. Maboudian, "Charge-drift elimination in resonant electrostatic MEMS,"*Proc. 23rd IEEE MEMS 2010*, Hong Kong, 2010, pp. 108-111. - H. K. Lee,
__S. Yoneoka__, G. Bahl, J. Salvia, Y. Q. Qu, R. Melamud, S. Chandorkar, B. Kim, M. A. Hopcroft, and T. W. Kenny, "A novel characterization method for temperature compensation of composite resonators,"*Proc. 23rd IEEE MEMS 2010*, Hong Kong, 2010, pp. 743-746. - H. K. Lee, J. Salvia, G. Bahl, R. Melamud,
__S. Yoneoka__, Y. Q. Qu, S. Chandorkar, M. A. Hopcroft, B. Kim, and T. W. Kenny, "Influence of the temperature dependent A-f effect on the design and performace of MEMS oscillators,"*Proc. 23rd IEEE MEMS 2010*, Hong Kong, 2010, pp. 699-702. - C. S. Roper, R. Candler,
__S. Yoneoka__, T. Kenny, R. T. Howe, and R. Maboudian, "Simultaneous wafer-scale vacuum encapsulation and microstructure cladding with LPCVD polycrystalline 3C-SiC,"*Transducers 2009*, pp. 1031-1034, 2009. __S. Yoneoka__, G. Bahl, J. Salvia, K. L. Chen, A. B. Graham, H. K. Lee, G. Yama, R. N. Candler, T. W. Kenny, "Acceleration compensation of MEMS resonators using electrostatic tuning",*Proc. 22nd IEEE MEMS 2009*, Sorrento, Italy, 2009, pp. 805-808.- A. B. Graham, M. Messana, P. Hartwll, J. Provine,
__S. Yoneoka__, B. Kim, R. Melamud, T. W. Kenny, "Wafer scale encapsulation of large lateral deflection MEMS structures",*Proc. 22nd IEEE MEMS 2009,*Sorrento, Italy, 2009, pp. 745-748. - G. Bahl, R. Melamud, B. Kim, S. Chandorkar, J. Salvia, M. A. Hopcrofy,
R. G. Hennessy,
__S. Yoneoka__, C. M. Jha, G. Yama, D. Elata, R. N. Candler, R. T. Howe, T. W. Kenny, "Observations of fixed and mobile charge in composite MEMS resonators",*Proc. Hilton Head Workshop*, Jun. 1-5, 2008, pp. 48-51. - B. Kim, R. N. Candler, R. Melamud,
__S. Yoneoka__, H. K. Lee, G. Yama, T. W. Kenny, "Identification and management of diffusion pathways in polysilicon encapsulation for MEMS devices",*Proc. 21st IEEE MEMS 2008*, Tucson, AZ, USA, Jan. 13-17, 2008, pp. 104-107.

Address: Bldg. 530, Room 224, 440 Escondido Mall, Stanford, CA 94305

Email: yoneoka AT stanford DOT edu

Last modified: Wed Jan 5 15:05:22 PST 2011