Fabian Purkl
Research Engineer
fpurkl :at: mems.stanford.eduRobert Bosch GmbH (CR/ARY2), Robert-Bosch-Campus 1, 71272 Renningen, Germany
Advisor:
Research
Uncooled infrared sensors based on Atomic Layer Deposition
Education
University of Freiburg, Germany
(2010 - present) Ph.D. Candidate in Engineering
University of Freiburg, Germay
(2004 - 2009) Dipl.-Ing. (cerified engineer) in MEMS Technology
University of Melbourne, Australia
(2007) Studies in electrical engineering and economics
(2010 - present) Ph.D. Candidate in Engineering
University of Freiburg, Germay
(2004 - 2009) Dipl.-Ing. (cerified engineer) in MEMS Technology
University of Melbourne, Australia
(2007) Studies in electrical engineering and economics
Experience
Corporate Sector Research and Advance Engineering, Robert Bosch GmbH, Germany
(2014-present) Research Engineer
Research and Technology Center, Robert Bosch LLC
(2010-2013) Research Engineer
Department of Microsystems Engineering, University of Freiburg
(2009-2010) Graduate Research Assistant
Advisor: Prof. Oliver Paul
Department of Microsystems Engineering, University of Freiburg
(2005-2006) Research Assistant
Advisor: Prof. Jürgen Wilde
(2014-present) Research Engineer
Research and Technology Center, Robert Bosch LLC
(2010-2013) Research Engineer
Department of Microsystems Engineering, University of Freiburg
(2009-2010) Graduate Research Assistant
Advisor: Prof. Oliver Paul
Department of Microsystems Engineering, University of Freiburg
(2005-2006) Research Assistant
Advisor: Prof. Jürgen Wilde
Fellowships / Awards
Baden-Württemberg-STIPENDIUM
(2007) scholarship of the state of Baden-Württemberg, Germany
(2007) scholarship of the state of Baden-Württemberg, Germany
Publications
Fabian Purkl, Alwin Daus, Timothy S English, J Provine, Ando Feyh, Gerald Urban, and Thomas W Kenny, "Measurement of Young’s modulus and residual stress of atomic layer deposited Al
O
and Pt thin films," Journal of Micromechanics and Microengineering, Vol. 27, No. 8, pp. 85008, Aug 2017.
10.1088/1361-6439/aa73e6
T.S. English, F. Purkl, A. Daus, J Provine, Y. Won, G. Yama, A. Feyh, G. O’Brien, K.E. Goodson, O. Ambacher, and T.W. Kenny, "Atomic layer deposited platinum as a sensor material: uniformity, 1/f noise, and Young's modulus," Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2014, pp. 44-47, Jun 2014.
Fabian Purkl, Timothy S. English, Gary Yama, John Provine, Ashwin K. Samarao, Ando Feyh, Bongsang Kim, Gary O'Brien, Oliver Ambacher, Roger T. Howe, and Thomas W. Kenny, "Serpentine geometry for enhanced performance of nanometer-thin platinum bolometers," 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), pp. 1507-1510, Jun 2013.
Fabian Purkl, Tim English, Gary Yama, J Provine, Ashwin K. Samarao, Ando Feyh, Gary O'Brien, Oliver Ambacher, Roger T. Howe, and Thomas W. Kenny, "Sub-10 nanometer uncooled platinum bolometers via plasma enhanced atomic layer deposition," 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 185-188, Jan 2013.
S. Yoneoka, M. Liger, G. Yama, R. Schuster, F. Purkl, J Provine, F. B. Prinz, R. T. Howe, and T. W. Kenny, "ALD-metal uncooled bolometer," 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, pp. 676-679, Jan 2011.
T. Kaufmann, P. Ruther, F. Purkl, and O. Paul, 'Magnetic field sensor', Patent US20120306485 A1, 2011.
T. Kaufmann, F. Purkl, P. Ruther, and O. Paul, "Novel coupling concept for five-contact vertical hall devices," in '16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011', pp. 2855-2858, 2011.
T. Kaufmann, D. Kopp, F. Purkl, M. Baumann, P. Ruther, and O. Paul, 'Piezoresistive Response of Vertical Hall Devices', IEEE Sensors Journal, pp 99, 2011.
T. Kaufmann, D. Kopp, F. Purkl, M. Baumann, P. Ruther, and O. Paul, "Piezoresistive response of five-contact vertical Hall devices," in 'IEEE Sensors 2010', pp. 562 -565, 2010.