Micro Structures & Sensors Lab
Kenny Group @ Stanford

Fabian Purkl


Ph.D. Candidate

fpurkl :at: mems.stanford.edu
Robert Bosch LLC, 4005 Miranda Avenue, Palo Alto, CA 94304, USA
Advisor: Oliver Ambacher

Research

Uncooled infrared sensors based on Atomic Layer Deposition

Education

University of Freiburg, Germany
(2010 - present) Ph.D. Candidate in Engineering

University of Freiburg, Germay
(2004 - 2009) Dipl.-Ing. (cerified engineer) in MEMS Technology

University of Melbourne, Australia
(2007) Studies in electrical engineering and economics

Experience

Research and Technology Center, Robert Bosch LLC
(2010-present) Research Engineer

Department of Microsystems Engineering, University of Freiburg
(2009-2010) Graduate Research Assistant
Advisor: Prof. Oliver Paul

Department of Microsystems Engineering, University of Freiburg
(2005-2006) Research Assistant
Advisor: Prof. Jürgen Wilde

Fellowships / Awards

Baden-Württemberg-STIPENDIUM
(2007) scholarship of the state of Baden-Württemberg, Germany

Publications

Conference
T.S. English, F. Purkl, A. Daus, J Provine, Y. Won, G. Yama, A. Feyh, G. O’Brien, K.E. Goodson, O. Ambacher, and T.W. Kenny, "Atomic layer deposited platinum as a sensor material: uniformity, 1/f noise, and Young's modulus," Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2014, pp. 44-47, Jun 2014.
Conference
Fabian Purkl, Timothy S. English, Gary Yama, John Provine, Ashwin K. Samarao, Ando Feyh, Bongsang Kim, Gary O'Brien, Oliver Ambacher, Roger T. Howe, and Thomas W. Kenny, "Serpentine geometry for enhanced performance of nanometer-thin platinum bolometers," 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), pp. 1507-1510, Jun 2013.
Conference
Fabian Purkl, Tim English, Gary Yama, J Provine, Ashwin K. Samarao, Ando Feyh, Gary O'Brien, Oliver Ambacher, Roger T. Howe, and Thomas W. Kenny, "Sub-10 nanometer uncooled platinum bolometers via plasma enhanced atomic layer deposition," 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 185-188, Jan 2013.
Conference
S. Yoneoka, M. Liger, G. Yama, R. Schuster, F. Purkl, J Provine, F. B. Prinz, R. T. Howe, and T. W. Kenny, "ALD-metal uncooled bolometer," 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, pp. 676-679, Jan 2011.
Journal
T. Kaufmann, P. Ruther, F. Purkl, and O. Paul, 'Magnetic field sensor', Patent US20120306485 A1, 2011.
Conference
T. Kaufmann, F. Purkl, P. Ruther, and O. Paul, "Novel coupling concept for five-contact vertical hall devices," in '16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011', pp. 2855-2858, 2011.
Journal
T. Kaufmann, D. Kopp, F. Purkl, M. Baumann, P. Ruther, and O. Paul, 'Piezoresistive Response of Vertical Hall Devices', IEEE Sensors Journal, pp 99, 2011.
Conference
T. Kaufmann, D. Kopp, F. Purkl, M. Baumann, P. Ruther, and O. Paul, "Piezoresistive response of five-contact vertical Hall devices," in 'IEEE Sensors 2010', pp. 562 -565, 2010.