Micro Structures & Sensors Lab
Kenny Group @ Stanford
The Micro Structures and Sensors Laboratory at Stanford University is directed by Professor Thomas Kenny of the Mechanical Engineering Department. Our group's research in the area of MicroElectroMechanical Systems (MEMS) leverages silicon microfabrication techniques to create micro-devices that include ultra-stable timing references and high performance sensors. Recent work encompasses the design, optimization, and effective realization of high performance MEMS devices, as well as the integration of various types of sensors.

Lab News

Yunhan Chen
  12:36am Jun 22, 2017
Congratulations to Daniel and James on being the finalists of Best Paper Award at Transducers 2017 Conference. Congratulations to Daniel, Ian and Dustin on their successful oral presentations, as well as Dave, Janna and James for presenting their posters.
Dongsuk (Daniel) Shin
  8:53pm Mar 16, 2017
Congratulations to Yunhan on his successful defense!
Yunhan Chen
  7:22pm Jan 26, 2017
Congratulations to Daniel on getting the Best Paper Award at MEMS 2017 in Las Vegas !!!