Micro Structures & Sensors Lab
Kenny Group @ Stanford
The Micro Structures and Sensors Laboratory at Stanford University is directed by Professor Thomas Kenny of the Mechanical Engineering Department. Our group's research in the area of MicroElectroMechanical Systems (MEMS) leverages silicon microfabrication techniques to create micro-devices that include ultra-stable timing references and high performance sensors. Recent work encompasses the design, optimization, and effective realization of high performance MEMS devices, as well as the integration of various types of sensors.

Lab News

Kirsten Kaplan
  10:27am Dec 14, 2017
Congratulations to Dave on his successful defense!
Ryan (Hyun Keun) Kwon
  2:57pm Oct 20, 2017
Congratulations to Dustin on his successful defense!!
Yunhan Chen
  12:36am Jun 22, 2017
Congratulations to Daniel and James on being the finalists of Best Paper Award at Transducers 2017 Conference. Congratulations to Daniel, Ian and Dustin on their successful oral presentations, as well as Dave, Janna and James for presenting their posters.