Micro Structures & Sensors Lab
Kenny Group @ Stanford
The Micro Structures and Sensors Laboratory at Stanford University is directed by Professor Thomas Kenny of the Mechanical Engineering Department. Our group's research in the area of MicroElectroMechanical Systems (MEMS) leverages silicon microfabrication techniques to create micro-devices that include ultra-stable timing references and high performance sensors. Recent work encompasses the design, optimization, and effective realization of high performance MEMS devices, as well as the integration of various types of sensors.

Lab News

Yushi Yang
  8:57am Sep 25, 2015
Congratulations to Tim, Chae, and Vu on their successful defenses!!!
Vu Hong
  1:39am Aug 1, 2015
Congratulations to Ian for having his paper on modal coupling in disk resonators accepted at IEEE Sensors 2015 in Busan, South Korea!
Vu Hong
  9:31pm Feb 8, 2015
Chae, Vu, Eldwin, Janna, and Yushi recently had papers accepted to Transducers 2015, at which Prof. Kenny is the General Chair. Congratulations to everyone!