Micro Structures & Sensors Lab
Kenny Group @ Stanford
The Micro Structures and Sensors Laboratory at Stanford University is directed by Professor Thomas Kenny of the Mechanical Engineering Department. Our group's research in the area of MicroElectroMechanical Systems (MEMS) leverages silicon microfabrication techniques to create micro-devices that include ultra-stable timing references and high performance sensors. Recent work encompasses the design, optimization, and effective realization of high performance MEMS devices, as well as the integration of various types of sensors.

Lab News

Dongsuk (Daniel) Shin
  8:53pm Mar 16, 2017
Congratulations to Yunhan on his successful defense!
Yunhan Chen
  7:22pm Jan 26, 2017
Congratulations to Daniel on getting the Best Paper Award at MEMS 2017 in Las Vegas !!!
Dustin Gerrard
  9:28am Jan 11, 2017
Daniel Shin will be giving a talk at MEMS 2017 in Las Vegas. Yunhan, Dave, Ian, and Dustin will be presenting posters. Congrats.