Micro Structures & Sensors Lab
Kenny Group @ Stanford
The Micro Structures and Sensors Laboratory at Stanford University is directed by Professor Thomas Kenny of the Mechanical Engineering Department. Our group's research in the area of MicroElectroMechanical Systems (MEMS) leverages silicon microfabrication techniques to create micro-devices that include ultra-stable timing references and high performance sensors. Recent work encompasses the design, optimization, and effective realization of high performance MEMS devices, as well as the integration of various types of sensors.

Lab News

Vu Hong
  12:50pm Jun 17, 2014
Congrats to Tim for recently presenting his work at ALD 2014 in Kyoto, Japan on "Recipes for Increasing Uniformity and Reducing  arbon Impurities of Plasma-Enhanced Atomic Layer Deposition Platinum Film"
Vu Hong
  3:35pm Jun 13, 2014
Congratulations to Tim (ALD platinum film characterization), Yushi (Determination of non-linear elastic coefficients), and Eldwin (Etch hole-free epi-seal process) for presenting papers at the Hilton Head 2014 Workshop this past week. In addition, collaborators from the Microsystems Lab (Stanford), Bosch, UC Davis, and UCLA, also presented papers at the workshop. Congrats once again!
Vu Hong
  11:45pm May 21, 2014
The latest epi-seal run is now complete (HDXI) with contributions from over 15 collaborators. Parts have all been shipped out and best of luck to everyone with their experiments. Congratulations to Chae on a job well done!