Micro Structures & Sensors Lab
Kenny Group @ Stanford
The Micro Structures and Sensors Laboratory at Stanford University is directed by Professor Thomas Kenny of the Mechanical Engineering Department. Our group's research in the area of MicroElectroMechanical Systems (MEMS) leverages silicon microfabrication techniques to create micro-devices that include ultra-stable timing references and high performance sensors. Recent work encompasses the design, optimization, and effective realization of high performance MEMS devices, as well as the integration of various types of sensors.

Lab News

Ryan (Hyun-Keun) Kwon
  8:57am Jun 25, 2019
Congratulations to Professor Thomas W. Kenny on receiving The 2019 IEEE Daniel E. Noble Emerging Technologies Award!!!
Ryan (Hyun-Keun) Kwon
  1:54pm Jun 3, 2019
Congratulations to Kirsten Kaplan on her superb defense!
Kirsten Kaplan
  12:59pm May 29, 2019
Congratulations to Karen on her successful defense!