Micro Structures & Sensors Lab
Kenny Group @ Stanford
The Micro Structures and Sensors Laboratory at Stanford University is directed by Professor Thomas Kenny of the Mechanical Engineering Department. Our group's research in the area of MicroElectroMechanical Systems (MEMS) leverages silicon microfabrication techniques to create micro-devices that include ultra-stable timing references and high performance sensors. Recent work encompasses the design, optimization, and effective realization of high performance MEMS devices, as well as the integration of various types of sensors.

Lab News

Kirsten Kaplan
  7:10pm Mar 4, 2019
Congrats to Daniel Shin on his successful defense!
Kirsten Kaplan
  2:04pm Aug 27, 2018
Congrats to Camille on her successful defense!
Ryan (Hyun-Keun) Kwon
  9:31am Jul 11, 2018
Congratulations to Lizmarie on her successful defense!