Micro Structures & Sensors Lab
Kenny Group @ Stanford
The Micro Structures and Sensors Laboratory at Stanford University is directed by Professor Thomas Kenny of the Mechanical Engineering Department. Our group's research in the area of MicroElectroMechanical Systems (MEMS) leverages silicon microfabrication techniques to create micro-devices that include ultra-stable timing references and high performance sensors. Recent work encompasses the design, optimization, and effective realization of high performance MEMS devices, as well as the integration of various types of sensors.

Lab News

Vu Hong
  3:46pm Jan 26, 2015
Congratulations to Chae for his recent APL paper on DRGs with parametric pumping, as well as getting a late news oral presentation accepted to ISISS 2015!
Vu Hong
  12:30am Dec 1, 2014
Dave, Yunhan, and Yushi will be presenting papers at MEMS 2015 in January. In addition, collaborators from UC Irvine and UC Berkeley have been accepted to speak about devices made by the Kenny Group. Congrats to everyone!
Vu Hong
  10:26am Sep 19, 2014
Exciting summer! 3 papers from Kenny Group (Chae, Eldwin, Vu), as well as 2 papers from collaborators (Bo from NUS, Clifton from Pruitt Group), accepted into JMEMS. See the publications list for more details. Hoping for great success in MEMS '15 applications.