Micro Structures & Sensors Lab
Kenny Group @ Stanford

Publications

Journal Publications

  1. Nicholas E. Bousse, Stephen E. Kuenstner, James M.L. Miller, Hyun-Keun Kwon, Gabrielle D. Vukasin, John D. Teufel, Thomas W. Kenny, "Dispersive readout of a high-Q encapsulated micromechanical resonator," Applied Physics Letters, Vol. 121, pp. 73503, Jul 2022.
  2. James M. L. Miller, Gabrielle D. Vukasin, Ze Zhang, Hyun-Keun Kwon, Arun Majumdar, Thomas W. Kenny, and Steven W. Shaw, "Effects of Remote Boundary Conditions on Clamping Loss in Micromechanical Resonators," Journal of Microelectromechanical Systems, Vol. 31, No. 2, pp. 204-216, Apr 2022.
  3. Gabrielle D. Vukasin, Nicholas E. Bousse, Anne L. Alter, and Thomas W. Kenny, "Etch-Hole Free, Large Gap Wafer Scale Encapsulation Process For Microelectromechanical Resonators," Hilton Head 2022 ,Solid-State Sensors, Actuators, and Microsystems Workshop, 2022.
  4. James M. L. Miller, Ariosto Gomez-Franco, Dongsuk D. Shin, Hyun-Keun Kwon, and Thomas W. Kenny, "Amplitude stabilization of micromechanical oscillators using engineered nonlinearity," Physical Review Research, Vol. 3, pp. 33268, Sep 2021.
  5. James M. L. Miller, Haoshen Zhu, Subramanian Sundaram, Gabrielle D. Vukasin, Yunhan Chen, Ian B. Flader, Dongsuk D. Shin, and Thomas W. Kenny, "Limits to Thermal-Piezoresistive Cooling in Silicon Micromechanical Resonators," Journal of Microelectromechanical Systems, Vol. 29, No. 5, pp. 677-684, Oct 2020.
  6. Nicholas E. Bousse, James Marion Lehto Miller, Anne Louise Alter, Christopher Patrick Cameron, Hyun-Keun Kwon, Gabrielle Davis Vukasin, and Thomas W. Kenny, "Negative Nonlinear Dissipation in Microelectromechanical Beams," Journal of Microelectromechanical Systems, Vol. 29, No. 5, pp. 954-959, Oct 2020.
  7. Zohreh Mohammadi, Toni L. Heugel, James M. L. Miller, Dongsuk D. Shin, Hyun-Keun Kwon, Thomas W. Kenny, Ramasubramanian Chitra, Oded Zilberberg, and Luis Guillermo Villanueva, "On the effect of linear feedback and parametric pumping on a resonator's frequency stability," New Journal of Physics, Vol. 22, pp. 93049, Sep 2020.
  8. James M. L. Miller, Dongsuk D. Shin, Hyun-Keun Kwon, Steven W. Shaw, and Thomas W. Kenny, "Spectral narrowing of parametrically pumped thermomechanical noise," Applied Physics Letters, Vol. 117, pp. 33504, Jul 2020.
  9. Nicholas E. Bousse, James M. L. Miller, Hyun-Keun Kwon, Gabrielle D. Vukasin, and Thomas W. Kenny, "Quality factor tuning of micromechanical resonators via electrical dissipation," Applied Physics Letters, Vol. 116, No. 2, pp. 23506, Jan 2020.
  10. Anne L. Alter, Ian B. Flader, Yunhan Chen, Lizmarie Comenencia Ortiz, Dongsuk D. Shin, and Thomas W. Kenny, "Characterization of Accelerated Fatigue in Thick Epi-Polysilicon Vacuum Encapsulated MEMS Resonators," Journal of Microelectromechanical Systems, pp. 1-10, 2020.
  11. Anne L. Alter, Ian B. Flader, Yunhan Chen, Dongsuk D. Shin, and Thomas W. Kenny, "Nonlinear Dissipation in Epitaxial SCS and Polysilicon MEMS Driven at Large Amplitudes," Journal of Microelectromechanical Systems, pp. 1-3, 2020.
  12. Anne L. Alter, Dustin D. Gerrard, Hyun-Keun Kwon, Gabrielle D. Vukasin, and Thomas W. Kenny, "Quality Factor Extraction and Enhancement Across Temperature in Ring Resonators," Journal of Microelectromechanical Systems, pp. 1-3, 2020.
  13. Hyun-Keun Kwon, Gabrielle D. Vukasin, Nicholas E. Bousse, and Thomas W. Kenny, "JMEMS Letters Crystal Orientation Dependent Dual Frequency Ovenized MEMS Resonator With Temperature Stability and Shock Robustness," Journal of Microelectromechanical Systems, pp. 1-2, 2020.
  14. Gabrielle D. Vukasin, Veronica K. Sanchez, Janna Glaze, Nicholas E. Bousse, Nathan Bissel, Dongsuk D. Shin, Hyun-Keun Kwon, David Heinz, Ernest T.-T. Yen, and Thomas W. Kenny, "Anchor Design Affects Dominant Energy Loss Mechanism in a Lamé Mode MEM Resonator," Journal of Microelectromechanical Systems, pp. 1-7, 2020.
  15. Lizmarie Comenencia Ortiz, Hyun-Keun Kwon, Janna Rodriguez, Yunhan Chen, Gabrielle D. Vukasin, David B. Heinz, Dongsuk D. Shin, and Thomas W. Kenny, "Low-Power Dual Mode MEMS Resonators With PPB Stability Over Temperature," Journal of Microelectromechanical Systems, pp. 1-12, 2020.
  16. James M. L. Miller, Nicholas E. Bousse, David B. Heinz, Hyo Jin K. Kim, Hyun-Keun Kwon, Gabrielle D. Vukasin, and Thomas W. Kenny, "Thermomechanical-Noise-Limited Capacitive Transduction of Encapsulated MEM Resonators," Journal of Microelectromechanical Systems, Vol. 28, No. 6, pp. 965-976, Dec 2019.
  17. Xin Zhou, Chun Zhao, Dingbang Xiao, Jiangkun Sun, Guillermo Sobreviela, Dustin D. Gerrard, Yunhan Chen, Ian Flader, Thomas W. Kenny, Xuezhong Wu, and Ashwin Seshia, "Dynamic modulation of modal coupling inmicroelectromechanical gyroscopic ring resonators," Nature Communications, Vol. 10, No. 4980, pp. 1-9, Oct 2019.
  18. James M. L. Miller, Dongsuk D. Shin, Hyun-Keun Kwon, Steven W. Shaw, and Thomas W. Kenny, "Phase control of self-excited parametric resonators," Physical Review Applied, Vol. 12, No. 4, pp. 44053, Oct 2019.
  19. Ian B. Flader, Yunhan Chen, Yushi Yang, Eldwin J. Ng, Dongsuk D. Shin, David B. Heinz, Lizmarie Comenencia Ortiz, Anne L. Alter, Woosung Park, Kenneth E. Goodson, and Thomas W. Kenny, "Micro-Tethering for Fabrication of Encapsulated Inertial Sensors With High Sensitivity," Journal of Microelectromechanical Systems, Vol. 28, No. 3, pp. 372-381, Jun 2019.
  20. Hyo Jin K. Kim, Kirsten E. Kaplan, Peter Schindler, Shicheng Xu, Martin M. Winterkorn, David B. Heinz, Timothy S. English, J. Provine, Fritz B. Prinz, and Thomas W. Kenny, "Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition," ACS Appl. Mater. Interfaces, Vol. 11, No. 9, pp. 9594-9599, 2019.
  21. James M. Lehto Miller, Azadeh Ansari, David B. Heinz, Yunhan Chen, Ian B. Flader, Dongsuk D. Shin, L. Guillermo Villanueva, and Thomas W. Kenny, "Effective Quality Factor Tuning Mechanisms in Micromechanical Resonators," Applied Physics Reviews, Vol. 5, pp. 41307, Dec 2018.
  22. James M. Lehto Miller, Haoshen Zhu, David B. Heinz, Yunhan Chen, Ian B. Flader, Dongsuk D. Shin, Joshua E.-Y. Lee, and Thomas W. Kenny, "Thermal-Piezoresistive Tuning of the Effective Quality Factor of a Micromechanical Resonator," Physical Review Applied, Vol. 10, No. 4, pp. 1-10, Oct 2018.
  23. Lizmarie Comenencia Ortiz, David B. Heinz, Ian B. Flader, Anne L. Alter, Dongsuk D. Shin, Yunhan Chen, and Thomas W. Kenny, "Assessing failure in epitaxially encapsulated micro-scale sensors using micro and nano x-ray computed tomography," MRS Communications, pp. 1-8, Apr 2018.
  24. Michael T. Barako, Timothy S. English, Shilpi Roy-Panzer, Thomas W. Kenny, and Kenneth E. Goodson, "Dielectric barrier layers by low-temperature plasma-enhanced atomic layer deposition of silicon dioxide," Thin Solid Films, Vol. 649, pp. 24-29, Mar 2018.
  25. Yunhan Chen, Ian B. Flader, Dongsuk D. Shin, Chae Hyuck Ahn, Janna Rodriguez, and Thomas W. Kenny, "Robust Method of Fabricating Epitaxially Encapsulated MEMS Devices with Large Gaps," Journal of Microelectromechanical Systems, Vol. 26, No. 6, pp. 1235-1243, Dec 2017.
  26. Fabian Purkl, Alwin Daus, Timothy S English, J Provine, Ando Feyh, Gerald Urban, and Thomas W Kenny, "Measurement of Young’s modulus and residual stress of atomic layer deposited Al O and Pt thin films," Journal of Micromechanics and Microengineering, Vol. 27, No. 8, pp. 85008, Aug 2017.
  27. Woosung Park, Dongsuk D. Shin, Soo Jin Kim, Joseph S. Katz, Joonsuk Park, Chae Hyuck Ahn, Takashi Kodama, Mehdi Asheghi, Thomas W. Kenny, and Kenneth E. Goodson, "Phonon conduction in silicon nanobeams," Applied Physics Letters, Vol. 110, No. 21, pp. 213102, May 2017.
  28. Juan Atalaya, Thomas W. Kenny, M. L. Roukes, and M. I. Dykman, "Nonlinear damping and dephasing in nanomechanical systems," Physical Review B, Vol. 94, No. 19, Nov 2016.
  29. Gunjan Agarwal, Thomas Kazior, Thomas Kenny, and Dana Weinstein, "Modeling and Analysis for Thermal Management in Gallium Nitride HEMTs Using Microfluidic Cooling," Journal of Electronic Packaging, Vol. 139, No. 1, pp. 11001, Nov 2016.
  30. Oriel Shoshani, Daniel Heywood, Yushi Yang, Thomas W. Kenny, and Steven W. Shaw, "Phase Noise Reduction in an MEMS Oscillator Using a Nonlinearly Enhanced Synchronization Domain," Journal of Microelectromechanical Systems, Vol. 25, No. 5, pp. 870-876, Oct 2016.
  31. Yushi Yang, Eldwin J. Ng, Pavel M. Polunin, Yunhan Chen, Ian B. Flader, Steven W. Shaw, Mark I. Dykman, and Thomas W. Kenny, "Nonlinearity of Degenerately Doped Bulk-Mode Silicon MEMS Resonators," Journal of Microelectromechanical Systems, Vol. 25, No. 5, pp. 859-869, Oct 2016.
  32. Timothy S. English, J Provine, Ann F. Marshall, Ai Leen Koh, and Thomas W. Kenny, "Parallel preparation of plan-view transmission electron microscopy specimens by vapor-phase etching with integrated etch stops," Ultramicroscopy, Vol. 166, pp. 39-47, Jul 2016.
  33. David B. Heinz, Vu A. Hong, Chae Hyuck Ahn, Eldwin J. Ng, Yushi Yang, and Thomas W. Kenny, "Experimental Investigation Into Stiction Forces and Dynamic Mechanical Anti-Stiction Solutions in Ultra-Clean Encapsulated MEMS Devices," Journal of Microelectromechanical Systems, Vol. 25, No. 3, pp. 469-478, Jun 2016.
  34. Yushi Yang, Eldwin J. Ng, Yunhan Chen, Ian B. Flader, and Thomas W. Kenny, "A Unified Epi-Seal Process for Fabrication of High-Stability Microelectromechanical Devices," Journal of Microelectromechanical Systems, Vol. 25, No. 3, pp. 489-497, Jun 2016.
  35. Pavel M. Polunin, Yushi Yang, Mark I. Dykman, Thomas W. Kenny, and Steven W. Shaw, "Characterization of MEMS Resonator Nonlinearities Using the Ringdown Response," Journal of Microelectromechanical Systems, Vol. 25, No. 2, pp. 297-303, Apr 2016.
  36. Eldwin J. Ng, Kimberly L. Harrison, Yushi Yang, Chae Hyuck Ahn, Vu A. Hong, Roger T. Howe, and Thomas W. Kenny, "Stable Encapsulated Charge-Biased Resonators," Journal of Microelectromechanical Systems, Vol. 25, No. 1, pp. 30-37, Feb 2016.
  37. Bo Woon Soon, You Qian, Eldwin J. Ng, Vu A. Hong, Yushi Yang, Chae Hyuck Ahn, Thomas W. Kenny, and Chengkuo Lee, "Investigation of a Vacuum Encapsulated Si-to-Si Contact Microswitch Operated From −60 °C to 400 °C," Journal of Microelectromechanical Systems, Vol. 24, No. 6, pp. 1906-1915, Dec 2015.
  38. Chae Hyuck Ahn, Eldwin J. Ng, Vu A. Hong, Julia Huynh, Shasha Wang, and Thomas W. Kenny, "Characterization of Oxide-Coated Polysilicon Disk Resonator Gyroscope Within a Wafer-Scale Encapsulation Process," Journal of Microelectromechanical Systems, Vol. 24, No. 6, pp. 1687-1694, Dec 2015.
  39. Michael T. Barako, Shilpi Roy-Panzer, Timothy S. English, Takashi Kodama, Mehdi Asheghi, Thomas W. Kenny, and Kenneth E. Goodson, "Thermal Conduction in Vertically Aligned Copper Nanowire Arrays and Composites," ACS Applied Materials & Interfaces, Vol. 7, No. 34, pp. 19251-19259, Sep 2015.
  40. Clifton L. Roozeboom, Bridget E. Hill, Vu Anh Hong, Chae Hyuck Ahn, Eldwin J. Ng, Yushi Yang, Thomas W. Kenny, Matthew A. Hopcroft, and Beth L. Pruitt, "Multifunctional Integrated Sensors for Multiparameter Monitoring Applications," Journal of Microelectromechanical Systems, Vol. 24, No. 4, pp. 810-821, Aug 2015.
  41. V. Zega, S. Nitzan, M. Li, C. H. Ahn, E. Ng, V. Hong, Y. Yang, T. Kenny, A. Corigliano, and D. A. Horsley, "Predicting the closed-loop stability and oscillation amplitude of nonlinear parametrically amplified oscillators," Applied Physics Letters, Vol. 106, No. 23, pp. 233111, Jun 2015.
  42. Eldwin J. Ng, Vu A. Hong, Yushi Yang, Chae Hyuck Ahn, Camille L. M. Everhart, and Thomas W. Kenny, "Temperature Dependence of the Elastic Constants of Doped Silicon," Journal of Microelectromechanical Systems, Vol. 24, No. 3, pp. 730-741, Jun 2015.
  43. Shirin Ghaffari, Eldwin Jiaqiang Ng, Chae Hyuck Ahn, Yushi Yang, Shasha Wang, Vu A. Hong, and Thomas W. Kenny, "Accurate Modeling of Quality Factor Behavior of Complex Silicon MEMS Resonators," Journal of Microelectromechanical Systems, Vol. 24, No. 2, pp. 276-288, Apr 2015.
  44. Chae Hyuck Ahn, Eldwin J. Ng, Vu A. Hong, Yushi Yang, Brian J. Lee, Ian Flader, Thomas W. Kenny, "Mode-Matching of Wineglass Mode Disk Resonator Gyroscope in (100) Single Crystal Silicon," Journal of Microelectromechanical Systems, Vol. 24, No. 2, pp. 343-350, Apr 2015.
  45. Vu A. Hong, Shingo Yoneoka, Matthew W. Messana, Andrew B. Graham, James C. Salvia, Todd T. Branchflower, Eldwin J. Ng, and Thomas W. Kenny, "Fatigue Experiments on Single Crystal Silicon in an Oxygen-Free Environment," Journal of Microelectromechanical Systems, Vol. 24, No. 2, pp. 351-359, Apr 2015.
  46. Sarah H. Nitzan, Valentina Zega, Mo Li, Chae H. Ahn, Alberto Corigliano, Thomas W. Kenny, and David A. Horsley, "Self-induced parametric amplification arising from nonlinear elastic coupling in a micromechanical resonating disk gyroscope," Scientific Reports, Vol. 5, pp. 9036, Mar 2015.
  47. C. H. Ahn, S. Nitzan, E. J. Ng, V. A. Hong, Y. Yang, T. Kimbrell, D. A. Horsley, and T. W. Kenny, "Encapsulated high frequency (235 kHz), high-Q (100 k) disk resonator gyroscope with electrostatic parametric pump," Applied Physics Letters, Vol. 105, No. 24, pp. 243504, Dec 2014.
  48. Bo Woon Soon, Eldwin J. Ng, Vu A. Hong, Yushi Yang, Chae Hyuck Ahn, You Qian, Thomas W. Kenny, and Chengkuo Lee, "Fabrication and Characterization of a Vacuum Encapsulated Curved Beam Switch for Harsh Environment Application," Journal of Microelectromechanical Systems, Vol. 23, No. 5, pp. 1121-1130, Dec 2014.
  49. Mandy Axelle Philippine, Hosein Zareie, Ole Sigmund, Gabriel M. Rebeiz, and Thomas W. Kenny, "Experimental Validation of Topology Optimization for RF MEMS Capacitive Switch Design," Journal of Microelectromechanical Systems, Vol. 22, No. 6, pp. 1296-1309, Dec 2013.
  50. Shirin Ghaffari, Saurabh A. Chandorkar, Shasha Wang, Eldwin J. Ng, Chae H. Ahn, Vu Hong, Yushi Yang, and Thomas W. Kenny, "Quantum Limit of Quality Factor in Silicon Micro and Nano Mechanical Resonators," Scientific Reports, Vol. 3, Nov 2013.
  51. M. Li, E. J. Ng, V. A. Hong, C. H. Ahn, Y. Yang, T. W. Kenny, and D. A. Horsley, "Lorentz force magnetometer using a micromechanical oscillator," Applied Physics Letters, Vol. 103, No. 17, pp. 173504, Oct 2013.
  52. Shirin Ghaffari, Chae H. Ahn, Eldwin J. Ng, Shasha Wang, and Thomas W. Kenny, "Crystallographic effects in modeling fundamental behavior of MEMS silicon resonators," Microelectronics Journal, Vol. 44, No. 7, pp. 586-591, Jul 2013.
  53. Eldwin J. Ng, Hyung Kyu Lee, Chae Hyuck Ahn, Renata Melamud, and Thomas W. Kenny, "Stability of Silicon Microelectromechanical Systems Resonant Thermometers," IEEE Sensors Journal, Vol. 13, No. 3, pp. 987-993, Mar 2013.
  54. Mandy A. Philippine, Ole Sigmund, Gabriel M. Rebeiz, and Thomas W. Kenny, "Topology Optimization of Stressed Capacitive RF MEMS Switches," Journal of Microelectromechanical Systems, Vol. 22, No. 1, pp. 206-215, Feb 2013.
  55. Hyung Kyu Lee, Renata Melamud, Bongsang Kim, Saurabh Chandorkar, James C. Salvia, and Thomas W. Kenny, "The effect of the temperature-dependent nonlinearities on the temperature stability of micromechanical resonators," Journal of Applied Physics, Vol. 114, No. 15, pp. 153513, 2013.
  56. Yoonjin Won, Yuan Gao, Matthew A. Panzer, Senyo Dogbe, Lawrence Pan, Thomas W. Kenny, and Kenneth E. Goodson, "Mechanical characterization of aligned multi-walled carbon nanotube films using microfabricated resonators," Carbon, Vol. 50, No. 2, pp. 347-355, Feb 2012.
  57. Shingo Yoneoka, Jaeho Lee, Matthieu Liger, Gary Yama, Takashi Kodama, Marika Gunji, J. Provine, Roger T. Howe, Kenneth E. Goodson, and Thomas W. Kenny, "Electrical and Thermal Conduction in Atomic Layer Deposition Nanobridges Down to 7 nm Thickness," Nano Letters, Vol. 12, No. 2, pp. 683-686, Feb 2012.
  58. John C. Duda, Timothy S. English, Edward S. Piekos, Thomas E. Beechem, Thomas W. Kenny, and Patrick E. Hopkins, "Bidirectionally tuning Kapitza conductance through the inclusion of substitutional impurities," Journal of Applied Physics, Vol. 112, No. 7, pp. 73519, 2012.
  59. Yoonjin Won, Jaeho Lee, Mehdi Asheghi, Thomas W. Kenny, and Kenneth E. Goodson, "Phase and thickness dependent modulus of Ge2Sb2Te5 films down to 25 nm thickness," Applied Physics Letters, Vol. 100, No. 16, pp. 161905, 2012.
  60. Hyung Kyu Lee, Renata Melamud, Saurabh Chandorkar, James Salvia, Shingo Yoneoka, and Thomas W. Kenny, "Stable Operation of MEMS Oscillators Far Above the Critical Vibration Amplitude in the Nonlinear Regime," Journal of Microelectromechanical Systems, Vol. 20, No. 6, pp. 1228-1230, Dec 2011.
  61. Hyung Kyu Lee, Renata Melamud, Bongsang Kim, Matthew A. Hopcroft, James C. Salvia, and Thomas W. Kenny, "Electrostatic Tuning to Achieve Higher Stability Microelectromechanical Composite Resonators," Journal of Microelectromechanical Systems, Vol. 20, No. 6, pp. 1355-1365, Dec 2011.
  62. Hyung Kyu Lee, Renata Melamud, Saurabh Chandorkar, James Salvia, Shingo Yoneoka, and Thomas W. Kenny, "Stable Operation of MEMS Oscillators Far Above the Critical Vibration Amplitude in the Nonlinear Regime," Journal of Microelectromechanical Systems, Vol. 20, No. 6, pp. 1228-1230, Dec 2011.
  63. Gaurav Bahl, James C. Salvia, Renata Melamud, Bongsang Kim, Roger T. Howe, and Thomas W. Kenny, "AC Polarization for Charge-Drift Elimination in Resonant Electrostatic MEMS and Oscillators," Journal of Microelectromechanical Systems, Vol. 20, No. 2, pp. 355-364, Apr 2011.
  64. Kuan-Lin Chen, Shasha Wang, James C. Salvia, Renata Melamud, Roger T. Howe, and Thomas W. Kenny, "Wafer-Level Epitaxial Silicon Packaging for Out-of-Plane RF MEMS Resonators With Integrated Actuation Electrodes," IEEE Transactions on Components, Packaging and Manufacturing Technology, Vol. 1, No. 3, pp. 310-317, Mar 2011.
  65. G. C. Hill, D. R. Soto, A. M. Peattie, R. J. Full, and T. W. Kenny, "Orientation angle and the adhesion of single gecko setae," Journal of The Royal Society Interface, Vol. 8, No. 60, pp. 926-933, Feb 2011.
  66. Hyung Kyu Lee, Bongsang Kim, Renata Melamud, Matthew A. Hopcroft, James C. Salvia, and Thomas W. Kenny, "Influence of the temperature dependent nonlinearities on the performance of micromechanical resonators," Applied Physics Letters, Vol. 99, No. 19, pp. 194102, 2011.
  67. Shingo Yoneoka, James C. Salvia, Gaurav Bahl, Renata Melamud, Saurabh A. Chandorkar, and Thomas W. Kenny, "Active Electrostatic Compensation of Micromechanical Resonators Under Random Vibrations," Journal of Microelectromechanical Systems, Vol. 19, No. 5, pp. 1270-1272, Oct 2010.
  68. Matthew A. Hopcroft, William D. Nix, and Thomas W. Kenny, "What is the Young's Modulus of Silicon?," Journal of Microelectromechanical Systems, Vol. 19, No. 2, pp. 229-238, Apr 2010.
  69. Shingo Yoneoka, Christopher S. Roper, Robert N. Candler, Saurabh A. Chandorkar, Andrew B. Graham, J. Provine, Roya Maboudian, Roger T. Howe, and Thomas W. Kenny, "Characterization of Encapsulated Micromechanical Resonators Sealed and Coated With Polycrystalline SiC," Journal of Microelectromechanical Systems, Vol. 19, No. 2, pp. 357-366, Apr 2010.
  70. James C. Salvia, Renata Melamud, Saurabh A. Chandorkar, Scott F. Lord, and Thomas W. Kenny, "Real-Time Temperature Compensation of MEMS Oscillators Using an Integrated Micro-Oven and a Phase-Locked Loop," Journal of Microelectromechanical Systems, Vol. 19, No. 1, pp. 192-201, Feb 2010.
  71. Andrew B. Graham, Matthew W. Messana, Peter G. Hartwell, J. Provine, Shingo Yoneoka, Renata Melamud, Bongsang Kim, Roger T. Howe, and Thomas W. Kenny, "A Method for Wafer-Scale Encapsulation of Large Lateral Deflection MEMS Devices," Journal of Microelectromechanical Systems, Vol. 19, No. 1, pp. 28-37, Feb 2010.
  72. Gaurav Bahl, Renata Melamud, Bongsang Kim, Saurabh A. Chandorkar, James C. Salvia, Matthew A. Hopcroft, David Elata, Robert G. Hennessy, Rob N. Candler, Roger T. Howe, and Thomas W. Kenny, "Model and Observations of Dielectric Charge in Thermally Oxidized Silicon Resonators," Journal of Microelectromechanical Systems, Vol. 19, No. 1, pp. 162-174, Feb 2010.
  73. Daniel Soto, Ginel Hill, Aaron Parness, Noé Esparza, Mark Cutkosky, and Tom Kenny, "Effect of fibril shape on adhesive properties," Applied Physics Letters, Vol. 97, No. 5, pp. 53701, 2010.
  74. Vipin Ayanoor-Vitikkate, Kuan-lin Chen, Woo-Tae Park, and Thomas W. Kenny, "Development of wafer scale encapsulation process for large displacement piezoresistive MEMS devices," Sensors and Actuators A: Physical, Vol. 156, No. 2, pp. 275-283, Dec 2009.
  75. R. Melamud, S.A. Chandorkar, Bongsang Kim, Hyung Kyu Lee, J.C. Salvia, G. Bahl, M.A. Hopcroft, and T.W. Kenny, "Temperature-Insensitive Composite Micromechanical Resonators," Journal of Microelectromechanical Systems, Vol. 18, No. 6, pp. 1409-1419, Dec 2009.
  76. Kuan-Lin Chen, J. Salvia, R. Potter, R.T. Howe, and T.W. Kenny, "Performance Evaluation and Equivalent Model of Silicon Interconnects for Fully-Encapsulated RF MEMS Devices," IEEE Transactions on Advanced Packaging, Vol. 32, No. 2, pp. 402-409, May 2009.
  77. Bongsang Kim, Rob N. Candler, Renata Melamud, Matthew A. Hopcroft, Shingo Yoneoka, Hyung Kyu Lee, Manu Agarwal, Saurabh A. Chandorkar, Gary Yama, and Thomas W. Kenny, "Hermeticity and diffusion investigation in polysilicon film encapsulation for microelectromechanical systems," Journal of Applied Physics, Vol. 105, No. 1, pp. 13514, 2009.
  78. Bongsang Kim, Matthew A. Hopcroft, Rob N. Candler, Chandra Mohan Jha, Manu Agarwal, Renata Melamud, Saurabh A. Chandorkar, Gary Yama, and Thomas W. Kenny, "Temperature Dependence of Quality Factor in MEMS Resonators," Journal of Microelectromechanical Systems, Vol. 17, No. 3, pp. 755-766, Jun 2008.
  79. C.M. Jha, M.A. Hopcroft, S.A. Chandorkar, J.C. Salvia, M. Agarwal, R.N. Candler, R. Melamud, Bongsang Kim, and T.W. Kenny, "Thermal Isolation of Encapsulated MEMS Resonators," Journal of Microelectromechanical Systems, Vol. 17, No. 1, pp. 175-184, Feb 2008.
  80. C. M. Jha, J. Salvia, S. A. Chandorkar, R. Melamud, E. Kuhl, and T. W. Kenny, "Acceleration insensitive encapsulated silicon microresonator," Applied Physics Letters, Vol. 93, No. 23, pp. 234103, 2008.
  81. Manu Agarwal, Saurabh A. Chandorkar, Harsh Mehta, Robert N. Candler, Bongsang Kim, Matthew A. Hopcroft, Renata Melamud, Chandra M. Jha, Gaurav Bahl, Gary Yama, Thomas W. Kenny, and Boris Murmann, "A study of electrostatic force nonlinearities in resonant microstructures," Applied Physics Letters, Vol. 92, No. 10, pp. 104106, 2008.
  82. Woo-Tae Park, Kevin N. O’Connor, Kuan-Lin Chen, Joseph R. Mallon, Toshiki Maetani, Parmita Dalal, Rob N. Candler, Vipin Ayanoor-Vitikkate, Joseph B. Roberson, Sunil Puria, and Thomas W. Kenny, "Ultraminiature encapsulated accelerometers as a fully implantable sensor for implantable hearing aids," Biomedical Microdevices, Vol. 9, No. 6, pp. 939-949, Jun 2007.
  83. Bongsang Kim, Rob N. Candler, Matthew A. Hopcroft, Manu Agarwal, Woo-Tae Park, and Thomas W. Kenny, "Frequency stability of wafer-scale film encapsulated silicon based MEMS resonators," Sensors and Actuators A: Physical, Vol. 136, No. 1, pp. 125-131, May 2007.
  84. Manu Agarwal, Harsh Mehta, Robert N. Candler, Saurabh A. Chandorkar, Bongsang Kim, Matthew A. Hopcroft, Renata Melamud, Gaurav Bahl, Gary Yama, Thomas W. Kenny, and Boris Murmann, "Scaling of amplitude-frequency-dependence nonlinearities in electrostatically transduced microresonators," Journal of Applied Physics, Vol. 102, No. 7, pp. 74903, 2007.
  85. C. M. Jha, G. Bahl, R. Melamud, S. A. Chandorkar, M. A. Hopcroft, B. Kim, M. Agarwal, J. Salvia, H. Mehta, and T. W. Kenny, "High resolution microresonator-based digital temperature sensor," Applied Physics Letters, Vol. 91, No. 7, pp. 74101, 2007.
  86. Renata Melamud, Bongsang Kim, Saurabh A. Chandorkar, Matthew A. Hopcroft, Manu Agarwal, Chandra M. Jha, and Thomas W. Kenny, "Temperature-compensated high-stability silicon resonators," Applied Physics Letters, Vol. 90, No. 24, pp. 244107, 2007.
  87. M. A. Hopcroft, B. Kim, S. Chandorkar, R. Melamud, M. Agarwal, C. M. Jha, G. Bahl, J. Salvia, H. Mehta, H. K. Lee, R. N. Candler, and T. W. Kenny, "Using the temperature dependence of resonator quality factor as a thermometer," Applied Physics Letters, Vol. 91, No. 1, pp. 13505, 2007.
  88. Manu Agarwal, Kwan K. Park, Saurabh A. Chandorkar, Rob N. Candler, Bongsang Kim, Matthew A. Hopcroft, Renata Melamud, Thomas W. Kenny, and Boris Murmann, "Acceleration sensitivity in beam-type electrostatic microresonators," Applied Physics Letters, Vol. 90, No. 1, pp. 14103, 2007.
  89. Rob N. Candler, Matthew A. Hopcroft, Bongsang Kim, Woo-Tae Park, Renata Melamud, Manu Agarwal, Gary Yama, Aaron Partridge, Markus Lutz, and Thomas W. Kenny, "Long-Term and Accelerated Life Testing of a Novel Single-Wafer Vacuum Encapsulation for MEMS Resonators," Journal of Microelectromechanical Systems, Vol. 15, No. 6, pp. 1446-1456, Dec 2006.
  90. Amy Duwel, Rob N. Candler, Thomas W. Kenny, and Mathew Varghese, "Engineering MEMS Resonators With Low Thermoelastic Damping," Journal of Microelectromechanical Systems, Vol. 15, No. 6, pp. 1437-1445, Dec 2006.
  91. R.N. Candler, A. Duwel, M. Varghese, S.A. Chandorkar, M.A. Hopcroft, W.-T. Park, B. Kim, G. Yama, A. Partridge, M. Lutz, and T.W. Kenny, "Impact of Geometry on Thermoelastic Dissipation in Micromechanical Resonant Beams," Journal of Microelectromechanical Systems, Vol. 15, No. 4, pp. 927-934, Aug 2006.
  92. W.-T. Park, A. Partridge, R.N. Candler, V. Ayanoor-Vitikkate, G. Yama, M. Lutz, and T.W. Kenny, "Encapsulated Submillimeter Piezoresistive Accelerometers," Journal of Microelectromechanical Systems, Vol. 15, No. 3, pp. 507-514, Jun 2006.
  93. Carlos H. Hidrovo, Theresa A. Kramer, Evelyn N. Wang, Sébastien Vigneron, Julie E. Steinbrenner, Jae-Mo Koo, Fu-Min Wang, David W. Fogg, Roger D. Flynn, Eon Soo Lee, Ching-Hsiang Cheng, Thomas W. Kenny, John K. Eaton, and Kenneth E. Goodson, "Two-Phase Microfluidics for Semiconductor Circuits and Fuel Cells," Heat Transfer Engineering, Vol. 27, No. 4, pp. 53-63, May 2006.
  94. Evelyn N. Wang, Shankar Devasenathipathy, Hao Lin, Carlos H. Hidrovo, Juan G. Santiago, Kenneth E. Goodson, and Thomas W. Kenny, "A hybrid method for bubble geometry reconstruction in two-phase microchannels," Experiments in Fluids, Vol. 40, No. 6, pp. 847-858, Mar 2006.
  95. Manu Agarwal, Saurabh A. Chandorkar, Rob N. Candler, Bongsang Kim, Matthew A. Hopcroft, Renata Melamud, Chandra M. Jha, Thomas W. Kenny, and Boris Murmann, "Optimal drive condition for nonlinearity reduction in electrostatic microresonators," Applied Physics Letters, Vol. 89, No. 21, pp. 214105, 2006.
  96. A. Patridge, J. McDonald, and B. Kim, "Silicon MEMS Oscillators to Replace Quartz Crystals," Electronic Science (in Korean), Vol. 564, pp. 149-152, 2006.
  97. Lian Zhang, Evelyn N. Wang, Kenneth E. Goodson, and Thomas W. Kenny, "Phase change phenomena in silicon microchannels," International Journal of Heat and Mass Transfer, Vol. 48, No. 8, pp. 1572-1582, Apr 2005.
  98. E.N. Wang, L. Zhang, L. Jiang, J.-M. Koo, J.G. Maveety, E.A. Sanchez, K.E. Goodson, and T.W. Kenny, "Micromachined Jets for Liquid Impingement Cooling of VLSI Chips," Journal of Microelectromechanical Systems, Vol. 13, No. 5, pp. 833-842, Oct 2004.
  99. Emily D. Renuart, Alissa M. Fitzgerald, Thomas W. Kenny, and Reinhold H. Dauskardt, "Fatigue crack growth in micro-machined single-crystal silicon," Journal of Materials Research, Vol. 19, No. 9, pp. 2635-2640, Mar 2004.
  100. Evelyn N. Wang, Shankar Devasenathipathy, Juan G. Santiago, Kenneth E. Goodson, and Thomas W. Kenny, "Nucleation and Growth of Vapor Bubbles in a Heated Silicon Microchannel," Journal of Heat Transfer, Vol. 126, No. 4, pp. 497, 2004.
  101. William P. King, Thomas W. Kenny, and Kenneth E. Goodson, "Comparison of thermal and piezoresistive sensing approaches for atomic force microscopy topography measurements," Applied Physics Letters, Vol. 85, No. 11, pp. 2086, 2004.
  102. R.N. Candler, Woo-Tae Park, Huimou Li, G. Yama, A. Partridge, M. Lutz, and T.W. Kenny, "Single wafer encapsulation of mems devices," IEEE Transactions on Advanced Packaging, Vol. 26, No. 3, pp. 227-232, Aug 2003.
  103. J.P. Lynch, A. Sundararajan, K.H. Law, A.S. Kiremidjian, T. Kenny and E. Carryer, "Embedment of structural monitoring algorithms in a wireless sensing unit," Structural Engineering and Mechanics, Vol. 15, No. 3, pp. 285-297, Feb 2003.
  104. Jerome P. Lynch, Aaron Partridge, Kincho H. Law, Thomas W. Kenny, Anne S. Kiremidjian, and Ed Carryer, "Design of Piezoresistive MEMS-Based Accelerometer for Integration with Wireless Sensing Unit for Structural Monitoring," Journal of Aerospace Engineering, Vol. 16, No. 3, pp. 108, 2003.
  105. Yoshikazu Hishinuma, Theodore H. Geballe, Boris Y. Moyzhes, and Thomas W. Kenny, "Measurements of cooling by room-temperature thermionic emission across a nanometer gap," Journal of Applied Physics, Vol. 94, No. 7, pp. 4690, 2003.
  106. Y. Hishinuma, T. H. Geballe, B. Y. Moyzhes, and T. W. Kenny, "Refrigeration by combined tunneling and thermionic emission in vacuum: Use of nanometer scale design," Applied Physics Letters, Vol. 78, No. 17, pp. 2572, 2001.
  107. Nicholas Eric Bousse, James Marion Lehto Miller, Anne Louise Alter, Christopher Patrick Cameron, Hyun-Keun Kwon, Gabrielle Davis Vukasin, and Thomas W. Kenny, "Negative nonlinear dissipation in microelectromechanical beams," Journal of Microelectromechanical Systems, Vol. 29, No. 5, pp. 954-959, 0000.
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Conference Publications

  1. James M.L. Miller, Jianing Zhao, Chae Hyuck Ahn, Eldwin J. Ng, Vu Hong, Yushi Yang, Nicholas E. Bousse, Thomas W. Kenny, Gaurav Bahl, "Giant non-reciprocity through frequency modulation of a two degree-of-freedom micromechanical resonator," Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2022, pp. 108-109, Jun 2022.
  2. Nicholas E. Bousse, James M.L. Miller, Gabrielle D. Vukasin, Hyun-Keun Kwon, Steven W. Shaw, Thomas W. Kenny, "Tuning frequency stability in micromechanical resonators with parametric pumping," 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 987-990, Jan 2022.
  3. James M.L. Miller, Anne L. Alter, Nicholas E. Bousse, Yunhan Chen, Ian B. Flader, Dongsuk D. Shin, Thomas W. Kenny, Steven W. Shaw, "Influence of clamping loss and electrical damping on nonlinear dissipation in micromechanical resonators," 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 507-510, Jan 2022.
  4. James M. L. Miller, Ze Zhang, Nicholas E. Bousse, Dusan Coso, Seid Sadat, Hyun-Keun Kwon, Gabrielle D. Vukasin, Arun Majumdar, and Thomas W. Kenny, "Temperature hysteresis in piezoresistive microcantilevers," 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS), pp. 1203-1206, Apr 2020.
  5. Gabrielle D. Vukasin, Veronica K. Sanchez, Christopher P. Cameron, Hyun-Keun Kwon, Janna Rodriguez, Ian B. Flader, Yunhan Chen and Thomas W. Kenny, "EFFECT OF SUBSTRATE THICKNESS ON ANCHOR DAMPING IN MEMS DEVICES," Transducers 2019 - EUROSENSORS XXXIII, pp. 1843-1845, Jun 2019.
  6. Hyun-Keun Kwon, Lizmarie Comenencia Ortiz, Gabrielle D. Vukasin, Yunhan Chen, Dongsuk D. Shin and Thomas W. Kenny, "AN OVEN-CONTROLLED MEMS OSCILLATOR (OCMO) WITH SUB 10MW, ± 1.5 PPB STABILITY OVER TEMPERATURE," Transducers 2019 - EUROSENSORS XXXIII, pp. 2072-2075, Jun 2019.
  7. Saisneha Koppaka, Anne L. Alter, Gabrielle D. Vukasin, Dongsuk D. Shin, Ian B. Flader, Yunhan Chen, and Thomas W. Kenny, "NONLINEARITY OF DEGENERATELY DOPED FLEXURAL MODE SILICON MICROMECHANICAL RESONATORS," Transducers 2019 - EUROSENSORS XXXIII, pp. 1897-1900, Jun 2019.
  8. Anne L. Alter, Gabrielle D. Vukasin, Ian B. Flader, Hyo Jin Kim, Yunhan Chen, Daniel D. Shin, and Thomas W. Kenny, "EXPERIMENTALLY OBSERVED NONLINEAR DISSIPATION LINKED TO CONTRIBUTIONS FROM GAS DAMPING AND TED IN MEMS FLEXURAL MODE RESONATORS," Transducers 2019 - EUROSENSORS XXXIII, pp. 2095-2098, Jun 2019.
  9. James M. L. Miller, Nicholas E. Bousse, Dongsuk D. Shin, Hyun-Keun Kwon, and Thomas W. Kenny, "SIGNAL ENHANCEMENT IN MEM RESONANT SENSORS USING PARAMETRIC SUPPRESSION," Transducers 2019 - EUROSENSORS XXXIII, pp. 881-884, Jun 2019.
  10. I. P. Prikhodko, J. A. Gregory, D. Shin, R. Kwon, T. W. Kenny and M. W. Judy, "Psuedo-Extensional Mode MEMS Ring Gyroscope," The 6th IEEE International Symposium on Inertial Sensors & Systems, pp. 167-170, Apr 2019.
  11. G.D. Vukasin, J. Rodriguez, L. Comenencia Ortiz, G.M. Glaze, D.D. Gerrard, C.H. Ahn, Y. Yang, J. Lake, R.N. Candler, and Thomas .W. Kenny, "DIRECT MEASUREMENTS OF ANCHOR DAMPING IN PRESSURE-LIMITED RING RESONATORS," Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2018, pp. 370-371, Jun 2018.
  12. Eugene Cook, Michael Tomaino-Iannucci, Jonathan Bernstein, Marc Weinberg, Jennifer Choy, Karl Hobart, Lunet Luna, Marko Tadjer, Rachael Myers-Ward, Fritz Kub, Yushi Yang, Eldwin Ng, Ian Flader, Yunhan Chen, and Thomas Kenny, "A HIGH-MASS, EIGHT-FOLD SYMMETRIC SILICON CARBIDE MEMS GYROSCOPE," Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2018, pp. 364-365, Jun 2018.
  13. Hyun-Keun Kwon, David B. Heinz, Dongsuk D. Shin, Yunhan Chen, Lizmarie C. Ortiz, Gabrielle D. Vukasin, and Thomas W. Kenny, "PRECISE LOCAL TEMPERATURE MEASUREMENT OF FULLY ENCAPSULATED OVENIZED MEMS DEVICES," Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2018, pp. 358-361, Jun 2018.
  14. Yusheng Wang, Yu-Wei Lin, Janna Rodriguez, Gabrielle D. Vukasin, Dongsuk D. Shin, Hyun-Keun Kwon, David B. Heinz, Yunhan Chen, Dustin D. Gerrard, Thomas W. Kenny, and Andrei M. Shkel, "ON DECOUPLED QUANTIFICATION OF ENERGY DISSIPATION MECHANISMS IN TOROIDAL RING GYROSCOPES," Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2018, pp. 318-321, Jun 2018.
  15. James M. Lehto Miller, Azadeh Ansari, David B. Heinz, Yunhan Chen, Ian B. Flader, Dongsuk D. Shin, L. Guillermo Villanueva, and Thomas W. Kenny, "WHAT IS EFFECTIVE QUALITY FACTOR?," Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2018, pp. 240-241, Jun 2018.
  16. Lizmarie Comenencia Ortiz, Dustin D. Gerrard, Ian B. Flader, Gabrielle D. Vukasin, David B. Heinz, Janna Rodriguez, Saisneha Koppaka, Dongsuk D. Shin, Hyun-Keun Kwon, Saurabh Chandorkar, and Thomas W. Kenny, "ENHANCING MICRO-OVEN POWER AND STIFFNESS IN ENCAPSULATED DEVICES FOR TIMING REFERENCE APPLICATIONS," Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2018, pp. 214-217, Jun 2018.
  17. Anne L. Alter, Ian B. Flader, Yunhan Chen, Lizmarie Comenencia Ortiz, Dongsuk D. Shin, David B. Heinz, and Thomas W. Kenny, "FIRST FATIGUE MEASUREMENTS ON THICK EPI-POLYSILICON MEMS IN ULTRA-CLEAN ENVIRONMENT," Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2018, pp. 132-135, Jun 2018.
  18. Lizmarie Comenencia Ortiz, Hyun-Keun Kwon, Janna Rodriguez, David B. Heinz, Yunhan Chen, Gabrielle D. Vukasin, Dongsuk D. Shin and Thomas W. Kenny, "A NEW LOW POWER MEMS DUAL MODE CLOCK WITH PPB STABILITY OVER TEMPERATURE," Solid-State Sensors, Actuators and Microsystems Workshop 2018, pp. 90-91, Jun 2018.
  19. Kirsten E. Kaplan, Martin M. Winterkorn, Camille L.M. Everhart, Dongsuk D. Shin, Gary J. O'Brien, Fritz B. Prinz, and Thomas W. Kenny, "Active temperature compensation of thermal accelerometer for improved stability," 2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), pp. 1-2, Mar 2018.
  20. Dongsuk D. Shin, David B. Heinz, Hyun-Keun Kwon, Yunhan Chen, and Thomas W. Kenny, "Lateral diffusion doping of silicon for temperature compensation of MEMS resonators," 2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), pp. 1-4, Mar 2018.
  21. Dongsuk D. Shin, Yunhan Chen, Ian B. Flader, and Thomas W. Kenny, "Temperature compensation of resonant accelerometer via nonlinear operation," 2018 IEEE 31st International Conference on Micro Electro Mechanical Systems (MEMS), pp. 1012-1015, Jan 2018.
  22. Verena Maiwald, Ian B. Flader, Michelle Müller, Yunhan Chen, Silvan Plüss, Dongsuk D. Shin, Cosmin Roman, David B. Heinz, Thomas W. Kenny, and Christofer Hierold, "Experimental fractal-like instability bands in a resonant silicon-silicon contact pull-in vibration detector," 2018 IEEE 31st International Conference on Micro Electro Mechanical Systems (MEMS), pp. 984-987, Jan 2018.
  23. Lizmarie Comenencia Ortiz, Ian B. Flader, Gabrielle D. Vukasin, Dustin D. Gerrard, Saurabh A. Chandorkar, Janna Rodriguez, Dongsuk D. Shin, Ryan Kwon, David B. Heinz, Yunhan Chen, Woosung Park, Kenneth E. Goodson, and Thomas W. Kenny, "Thermal effects of ovenized clocks on episeal encapsulated inertial measurement units," 2018 IEEE 31st International Conference on Micro Electro Mechanical Systems (MEMS), pp. 980-983, Jan 2018.
  24. Camille L.M. Everhart, Kirsten E. Kaplan, Martin M. Winterkorn, Heungdong Kwon, J Provine, Mehdi Asheghi, Kenneth E. Goodson, Fritz B. Prinz, and Thomas W. Kenny, "High stability thermal accelerometer based on ultrathin platinum ALD nanostructures," 2018 IEEE 31st International Conference on Micro Electro Mechanical Systems (MEMS), pp. 976-979, Jan 2018.
  25. Janna Rodriguez, Dustin D. Gerrard, Grant M. Glaze, Saurabh Chandorkar, Yunhan Chen, Ian B. Flader, Dongsuk D. Shin, and Thomas W. Kenny, "Unanticipated results in the first direct measurements of anchor damping in MEMS resonators," 2018 IEEE 31st International Conference on Micro Electro Mechanical Systems (MEMS), pp. 543-546, Jan 2018.
  26. Ian B. Flader, Yunhan Chen, Chae Hyuck Ahn, Dongsuk D. Shin, Anne L. Alter, Janna Rodriguez, and Thomas W. Kenny, "Epitaxial encapsulation of fully differential electrodes and large transduction gaps for MEMS resonant structures," 2018 IEEE 31st International Conference on Micro Electro Mechanical Systems (MEMS), pp. 483-486, Jan 2018.
  27. J. Rodriguez, D.D. Gerrard, G.M. Glaze, S. Chandorkar, L. Comenecia, Y. Chen, I. B. Flader, T.W. Kenny, "Direct measurements of anchor damping in MEMS resonators," 2017 IEEE SENSORS, Vol. 1, pp. 1-3, Oct 2017.
  28. V. Maiwald, Y. Chen, M. Muller, I. B. Flader, C. Roman, D. B. Heinz, D. D. Shin, T. W. Kenny, and C. Hierold, "Transfer function tuning of a broadband shoaling mechanical amplifier near the electrostatic instability," 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp. 802-805, Jun 2017.
  29. J. Rodriguez, D. D. Gerrard, S. Chandorkar, Y. Chen, G. M. Glaze, I. B. Flader, C. H. Ahn, E. J. Ng, and T. W. Kenny, "Wide-range temperature dependence studies for devices limited by thermoelastic dissipation and anchor damping," 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp. 1100-1103, Jun 2017.
  30. Dustin D. Gerrard, Yunhan Chen, Saurabh A. Chandorkar, Guo Yu, Janna Rodriguez, Ian B. Flader, Dongsuk D. Shin, Carl D. Meinhart, Ole Sigmund, and Thomas W. Kenny, "Topology optimization for reduction of thermo-elastic dissipation in MEMS resonators," 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp. 794-797, Jun 2017.
  31. Ian B. Flader, Yunhan Chen, Dustin D. Gerrard, and Thomas W. Kenny, "Wafer-scale encapsulation of fully differential electrodes for mutli-axis inertial sensing," 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp. 591-594, Jun 2017.
  32. Dongsuk D. Shin, Yunhan Chen, Ian B. Flader, and Thomas W. Kenny, "Epitaxially encapsulated resonant accelerometer with an on-chip micro-oven," 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp. 595-598, Jun 2017.
  33. David B. Heinz, Ian B. Flader, Yunhan Chen, Gabrielle D. Vukasin, Lizmarie Comenencia Ortiz, and Thomas W. Kenny, "Direct comparison of stiction properties of oxide coated polysilicon and smooth single crystal silicon," 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp. 1203-1206, Jun 2017.
  34. Soner Sonmezoglu, Ian B. Flader, Yunhan Chen, Dongsuk D. Shin, Thomas W. Kenny, and David A. Horsley, "Dual-resonator MEMS magnetic sensor with differential amplitude modulation," 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp. 814-817, Jun 2017.
  35. James M.L. Miller, David B. Heinz, Ian B. Flader, Yunhan Chen, Dongsuk D. Shin, and Thomas W. Kenny, "Effective quality factor and temperature dependence of self-oscillations in a thermal-piezoresistively pumped resonator," 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp. 1907-1910, Jun 2017.
  36. Dongsuk D. Shin, Chae Hyuck Ahn, Yunhan Chen, Vu A. Hong, Eldwin J. Ng, Yushi Yang, and Thomas W. Kenny, "Electrostatic tuning of temperature coefficient of frequency of anisotropic disk-shaped resonators," 2017 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), pp. 164-167, Mar 2017.
  37. Yunhan Chen, Ian B. Flader, Dongsuk D. Shin, Chae Hyuck Ahn, Lizmarie Comenencia Ortiz, and Thomas W. Kenny, "Fabrication of wide and deep cavities for silicon MEMS devices without wafer bonding," 2017 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), pp. 113-116, Mar 2017.
  38. Alexandra Efimovskaya, Yushi Yang, Eldwin Ng, Yunhan Chen, Ian Flader, Thomas W. Kenny, and Andrei M. Shkel, "Compact roll-pitch-yaw gyroscope implemented in wafer-level Epitaxial Silicon Encapsulation process," 2017 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), pp. 1-2, Mar 2017.
  39. Soner Sonmezoglu, Ian B. Flader, Yunhan Chen, Dongsuk D. Shin, Thomas W. Kenny, and David A. Horsley, "Dual-resonator MEMS Lorentz force magnetometer based on differential frequency modulation," 2017 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), pp. 160-163, Mar 2017.
  40. Yunhan Chen, Dongsuk D. Shin, Ian B. Flader, and Thomas W. Kenny, "Tri-mode operation of highly doped silicon resonators for temperature compensated timing references," 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 1158-1161, Jan 2017.
  41. Alexandra Efimovskaya, Yu-Wei Lin, Yushi Yang, Eldwin Ng, Yunhan Chen, Ian Flader, Chae H. Ahn, Vu Hong, Thomas W. Kenny, and Andrei M. Shkel, "On cross-talk between gyroscopes integrated on a folded MEMS IMU Cube," 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 1142-1145, Jan 2017.
  42. Dustin D. Gerrard, Janna Rodriguez, Lizmarie Comenencia Ortiz, Saurabh A. Chandorkar, Ian B. Flader, Yunhan Chen, Dongsuk D. Shin, and Thomas W. Kenny, "Manipulation of heat flux paths in thermo-elastically damped resonators for Q optimization," 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 1130-1133, Jan 2017.
  43. David B. Heinz, Vu A. Hong, Yushi Yang, Chae-Hyuck Ahn, and Thomas W. Kenny, "High-G (>20,000g) inertial shock survivability of epitaxially encapsulated silicon MEMS devices," 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 1122-1125, Jan 2017.
  44. Parsa Taheri-Tehrani, Martial Defoort, Yunhan Chen, Ian Flader, Dongsuk D. Shin, Thomas W. Kenny, and David A. Horsley, "Epitaxially-encapsulated quad mass resonator with shaped comb fingers for frequency tuning," 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 1111-1114, Jan 2017.
  45. Dongsuk D. Shin, Chae Hyuck Ahn, Yunhan Chen, David L. Christensen, Ian B. Flader, and Thomas W. Kenny, "Environmentally robust differential resonant accelerometer in a wafer-scale encapsulation process," 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 17-20, Jan 2017.
  46. Ian B. Flader, Yunhan Chen, Dongsuk D. Shin, David B. Heinz, Lizmarie Comenencia Ortiz, Anne L. Alter, Woosung Park, Kenneth E. Goodson, Thomas W. Kenny, "Micro-tethering for in-process stiction mitigation of highly compliant structures," 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), Jan 2017.
  47. C. H. Ahn, D. L. Christensen, D. B. Heinz, V. A. Hong, E. J. Ng, J. Rodriguez, Y. Yang, G. O'Brien, and T. W. Kenny, "Encapsulated inertial systems," 2016 IEEE International Electron Devices Meeting (IEDM), pp. 263-263, Dec 2016.
  48. Ian B. Flader, Chae H. Ahn, Dustin D. Gerrard, Eldwin J. Ng, Yushi Yang, Vu A. Hong, Marco Pavone, and Thomas W. Kenny, "Autonomous calibration of MEMS disk resonating gyroscope for improved sensor performance," 2016 American Control Conference (ACC), pp. 5803-5810, Jul 2016.
  49. Ian B. Flader, Chae H. Ahn, Dustin D. Gerrard, Eldwin J. Ng, Yushi Yang, Vu A. Hong, Marco Pavone, and Thomas W. Kenny, "Autonomous calibration of MEMS disk resonating gyroscope for improved sensor performance," 2016 American Control Conference (ACC), pp. 5803-5810, Jul 2016.
  50. David B. Heinz, Vu A. Hong, Chae-Hyuck. Ahn, Yushi Yang and Thomas W. Kenny, "Stiction at High Temperature (>250C) in Encapsulated MEMS Devices for Harsh Environment Applications," Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2016, pp. 189-192, Jun 2016.
  51. Igor P. Prikhodko, Jeffrey A. Gregory, William A. Clark, John A. Geen, Michael W. Judy, Chae H. Ahn, and Thomas W. Kenny, "Mode-matched MEMS Coriolis vibratory gyroscopes: Myth or reality?," 2016 IEEE/ION Position, Location and Navigation Symposium (PLANS), pp. 1-4, Apr 2016.
  52. Ian B. Flader, Chae Hyuck Ahn, Eldwin J. Ng, Yushi Yang, Vu A. Hong, and Thomas W. Kenny, "Stochastic method for disk resonating gyroscope mode matching and quadrature nulling," 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 998-1001, Jan 2016.
  53. Chae Hyuck Ahn, Dongsuk D. Shin, Vu A. Hong, Yushi Yang, Eldwin J. Ng, Yunhan Chen, Ian B. Flader, and Thomas W. Kenny, "Encapsulated disk resonator gyroscope with differential internal electrodes," 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 962-965, Jan 2016.
  54. Yunhan Chen, Eldwin J. Ng, Dongsuk D. Shin, Chae H. Ahn, Yushi Yang, Ian B. Flader, Vu A. Hong, and Thomas W. Kenny, "Ovenized dual-mode clock (ODMC) based on highly doped single crystal silicon resonators," 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 91-94, Jan 2016.
  55. Parsa Taheri-Tehrani, Mitchell Kline, Igor Izyumin, Burak Eminoglu, Yu-Ching Yeh, Yushi Yang, Yunhan Chen, Ian Flader, Eldwin J. Ng, Thomas W. Kenny, Bernhard E. Boser, and David A. Horsley, "Epitaxially-encapsulated quad mass gyroscope with nonlinearity compensation," 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 966-969, Jan 2016.
  56. Vu A. Hong, David B. Heinz, David L. Christensen, Dongsuk D. Shin, Yunhan Chen, Chae Hyuck Ahn, Yushi Yang, Eldwin J. Ng, Ian B. Flader, and Thomas W. Kenny, "Overcoming stiction forces with resonant over-travel stops," 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 47-50, Jan 2016.
  57. S. Wisher, P. Shao, A. Norouzpour-Shirazi, Y. Yang, E. Ng, I. Flader, Y. Chen, D. Heinz, T. Kenny, and F. Ayazi, "A high-frequency epitaxially encapsulated single-drive quad-mass tri-axial resonant tuning fork gyroscope," 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 930-933, Jan 2016.
  58. Dustin D. Gerrard, Chae H. Ahn, Ian B. Flader, Yunhan Chen, Eldwin J. Ng, Yushi Yang, and Thomas W. Kenny, "Q-factor optimization in disk resonator gyroscopes via geometric parameterization," 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 994-997, Jan 2016.
  59. Ian B. Flader, Chae H. Ahn, Yushi Yang, Eldwin J. Ng, Vu A. Hong, Jeesu Baek, and Thomas W. Kenny, "Tunable quality factor through 1:1 modal coupling in a disk resonator," 2015 IEEE SENSORS, pp. 1-4, Nov 2015.
  60. C.H. Ahn, V.A. Hong, W. Park, Y. Yang, Y. Chen, E.J. Ng, J. Huynh, A.D. Challoner, K.E. Goodson, and T.W. Kenny, "On-chip ovenization of encapsulated Disk Resonator Gyroscope (drg)," 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp. 39-42, Jun 2015.
  61. V.A. Hong, J. Stehle, C.H. Ahn, D.B. Heinz, G. Yama, B. Kim, G.J. O'Brien, and T.W. Kenny, "Capacitive sensor fusion: Co-fabricated X/Y and Z-axis accelerometers, pressure sensor, thermometer," 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp. 295-298, Jun 2015.
  62. Yushi Yang, Eldwin J. Ng, Yunhan Chen, Ian B. Flader, Chae Hyuck Ahn, Vu A. Hong, and Thomas W. Kenny, "A unified epi-seal process for resonators and inertial sensors," 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp. 1326-1329, Jun 2015.
  63. Dustin D. Gerrard, Eldwin J. Ng, Chae H. Ahn, Vu A. Hong, Yushi Yang, and Thomas W. Kenny, "Modeling the effect of anchor geometry on the quality factor of bulk mode resonators," 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp. 1997-2000, Jun 2015.
  64. J. Rodriguez, Y. Yang, C.H. Ahn, Y. Chen, E.J. Ng, V.A. Hong, S. Ghaffari, and T.W. Kenny, "Damping mechanisms in light and heavy-doped dual-ring and double-ended tuning fork resonators (DETF)," 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp. 2005-2008, Jun 2015.
  65. Bo Woon Soon, You Qian, Eldwin J. Ng, Thomas W. Kenny, and Chengkuo Lee, "Silicon-to-silicon microswitch with wide operation temperature range," 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp. 2105-2108, Jun 2015.
  66. P. Polunin, Y. Yang, J. Atalaya, E. Ng, S. Strachan, O. Shoshani, M. Dykman, S. Shaw, and T. Kenny, "Characterizing MEMS nonlinearities directly: The ring-down measurements," 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp. 2176-2179, Jun 2015.
  67. C.H. Ahn, E. Ng, V.A. Hong, J. Huynh, T.W. Kenny, and S. Wang, "Oxide-coated polysilicon disk resonator gyroscope (DRG) within the wafer-scale encapsulation process," 2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings, pp. 1-2, Mar 2015.
  68. Parsa Taheri-Tehrani, Oleg Izyumin, Igor Izyumin, Chae H. Ahn, Eldwin J. Ng, Vu A. Hong, Yushi Yang, Thomas W. Kenny, Bernhard E. Boser, and David A. Horsley, "Disk resonator gyroscope with whole-angle mode operation," 2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings, pp. 1-4, Mar 2015.
  69. E. Ng, Y. Yang, V.A. Hong, C.H. Ahn, D.B. Heinz, I. Flader, Y. Chen, C.L.M. Everhart, B. Kim, R. Melamud, R.N. Candler, M.A. Hopcroft, J.C. Salvia, S. Yoneoka, A.B. Graham, M. Agarwal, M.W. Messana, K.L. Chen, H.K. Lee, S. Wang, G. Bahl, V. Qu, C.F. Chiang, T.W. Kenny, A. Partridge, M. Lutz, G. Yama, and G.J. O'Brien, "The long path from MEMS resonators to timing products," 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 1-2, Jan 2015.
  70. D. Senkal, E.J. Ng, V. Hong, Y. Yang, C.H. Ahn, T.W. Kenny, and A.M. Shkel, "Parametric drive of a toroidal MEMS rate integrating gyroscope demonstrating < 20 PPM scale factor stability," 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 29-32, Jan 2015.
  71. Igor I. Izyumin, Mitchell H. Kline, Yu-Ching Yeh, Burak Eminoglu, Chae Hyuck Ahn, Vu A. Hong, Yushi Yang, Eldwin J. Ng, Thomas W. Kenny, and Bernhard E. Boser, "A 7ppm, 6°/hr frequency-output MEMS gyroscope," 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 33-36, Jan 2015.
  72. D.B. Heinz, V.A. Hong, T.S. Kimbrell, J. Stehle, C.H. Ahn, E.J. Ng, Y. Yang, G. Yama, G.J. O'Brien, and T.W. Kenny, "Stiction forces and reduction by dynamic contact in ultra-clean encapsulated MEMS devices," 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 393-396, Jan 2015.
  73. Yushi Yang, Eldwin Ng, Pavel Polunin, Yunhan Chen, Scott Strachan, Vu Hong, Chae Hyuck Ahn, Ori Shoshani, Steven Shaw, Mark Dykman, and Thomas Kenny, "Experimental investigation on mode coupling of bulk mode silicon MEMS resonators," 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 1008-1011, Jan 2015.
  74. Yunhan Chen, Eldwin J. Ng, Yushi Yang, Chae Hyuck Ahn, Ian Flader, and Thomas W. Kenny, "In-situ ovenization of Lamé-mode silicon resonators for temperature compensation," 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 809-812, Jan 2015.
  75. J. Lake, Y.-H. Hwang, E. Ng, C.-H. Ahn, V. Hong, Y. Yang, Y. Dai, and R. Candler, "Experimental Validation of 3D Intuitive Modeling Approach for Anchor Loss in MEMS Resonators," Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2014, pp. 277-280, Jun 2014.
  76. C.L. Roozeboom, B.E. Hill, V.A. Hong, C.H. Ahn, E.J. Ng, Y. Yang, M.A. Hopcroft, and B.L. Pruitt, "Multifunctional Integrated Sensor Monitoring," Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2014, pp. 447-448, Jun 2014.
  77. Yushi Yang, Eldwin J. Ng, Vu A. Hong, Chae Hyuck Ahn, Yunhan Chen, Elia Ahadi, Mark Dykman, and Thomas W. Kenny, "Measurement of the nonlinear elasticity of doped bulk-mode MEMS resonators," Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2014, pp. 285-288, Jun 2014.
  78. M. Li, S. Sonmezoglu, E.J. Ng, V.A. Hong, C.H. Ahn, Y. Yang, T.W. Kenny, and D.A. Horsley, "Lorentz force magnetometer with quadratrue frequency modulation," Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2014, pp. 52-55, Jun 2014.
  79. T.S. English, F. Purkl, A. Daus, J Provine, Y. Won, G. Yama, A. Feyh, G. O’Brien, K.E. Goodson, O. Ambacher, and T.W. Kenny, "Atomic layer deposited platinum as a sensor material: uniformity, 1/f noise, and Young's modulus," Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2014, pp. 44-47, Jun 2014.
  80. J. Stehle, V.A. Hong, A. Feyh, G.J. O’Brien, G. Yama, O. Ambacher, B. Kim, and T.W. Kenny, "Silicon migration of through-holes in single- and poly-crystalline silicon membranes," Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2014, pp. 32-35, Jun 2014.
  81. Eldwin J. Ng, Yushi Yang, Yunhan Chen, and Thomas W. Kenny, "An etch hole-free process for temperature-compensated, high Q, encapsulated resonators," Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2014, pp. 99-100, Jun 2014.
  82. S. Nitzan, T-H. Su, C. Ahn, E. Ng, V. Hong, Y. Yang, T. Kenny, and D. A. Horsley, "Impact of gyroscope operation above the critical bifurcation threshold on scale factor and bias instability," 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 749-752, Jan 2014.
  83. David B. Heinz, Vu A. Hong, Eldwin J. Ng, Chae Hyuck Ahn, Yushi Yang, and Thomas W. Kenny, "Characterization of stiction forces in ultra-clean encapsulated MEMS devices," 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 588-591, Jan 2014.
  84. C. L. Roozeboom, V. A. Hong, C. H. Ahn, E. J. Ng, Y. Yang, B. E. Hill, M. A. Hopcroft, and B. L. Pruitt, "Multifunctional integrated sensor in A 2×2 mm epitaxial sealed chip operating in a wireless sensor node," 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 773-776, Jan 2014.
  85. Mo Li, Eldwin J. Ng, Vu A. Hong, Chae H. Ahn, Yushi Yang, Thomas W. Kenny, and David A. Horsley, "Single-structure 3-axis lorentz force magnetometer with sub-30 nT/√HZ resolution," 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 80-83, Jan 2014.
  86. D. Senkal, S. Askari, M. J. Ahamed, E. J. Ng, V. Hong, Y. Yang, C. H. Ahn, T. W. Kenny, and A. M. Shkel, "100K Q-factor toroidal ring gyroscope implemented in wafer-level epitaxial silicon encapsulation process," 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 24-27, Jan 2014.
  87. E. J. Ng, Y. Yang,V. A. Hong, C. H. Ahn, D. L. Christensen, B. A. Gibson, K. R. Qalandar, K. L. Turner, T. W. Kenny, "Stable Pull-In Electrodes for Narrow Gap Actuation," IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2014, pp. 1281-1284, Jan 2014.
  88. E. J. Ng, K. L. Harrison, C. L. Everhart, V. A. Hong, Y. Yang, C. H. Ahn, D. B. Heinz, R. T. Howe and T. W. Kenny, "Stable Charge-Biased Capacitive Resonators with Encapsulated Switches," IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2014, pp. 1277-1280, Jan 2014.
  89. J. Lake, E. Ng, C.-H. Ahn, V. Hong, Y. Yang, J. Wong, and R. Candler, "Particle swarm optimization for design of MEMS resonators with low thermoelastic dissipation," 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), pp. 1456-1459, Jun 2013.
  90. Fabian Purkl, Timothy S. English, Gary Yama, John Provine, Ashwin K. Samarao, Ando Feyh, Bongsang Kim, Gary O'Brien, Oliver Ambacher, Roger T. Howe, and Thomas W. Kenny, "Serpentine geometry for enhanced performance of nanometer-thin platinum bolometers," 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), pp. 1507-1510, Jun 2013.
  91. Y. Yang, E. J. Ng, C. H. Ahn, V. A. Hong, E. Ahadi, and T. W. Kenny, "Mechanical coupling of dual breathe-mode ring resonator," 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), pp. 502-505, Jun 2013.
  92. M. A. Philippine, H. Zareie, O. Sigmund, G. M. Rebeiz, and T. W. Kenny, "Topology optimized RF MEMS switches," 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), pp. 2477-2480, Jun 2013.
  93. V. A. Hong, B. J. Lee, D. L. Christensen, D. B. Heinz, E. J. Ng, C. H. Ahn, Y. Yang, and T. W. Kenny, "X-Y and Z-axis capacitive accelerometers packaged in an ultra-clean hermetic environment," 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), pp. 618-621, Jun 2013.
  94. E. J. Ng, C.-F. Chiang, Y. Yang, V. A. Hong, C. H. Ahn, and T. W. Kenny, "Ultra-high aspect ratio trenches in single crystal silicon with epitaxial gap tuning," 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), pp. 182-185, Jun 2013.
  95. E. J. Ng, C. H. Ahn, Y. Yang, V. A. Hong, C.-F. Chiang, E. Ahadi, M. W. Ward, and T. W. Kenny, "Localized, degenerately doped epitaxial silicon for temperature compensation of resonant MEMS systems," 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), pp. 2419-2422, Jun 2013.
  96. C. H. Ahn, E. J. Ng, V. A. Hong, Y. Yang, B. J. Lee, M. W. Ward, and T. W. Kenny, "Geometric compensation of (100) single crystal silicon disk resonating gyroscope for mode-matching," 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), pp. 1723-1726, Jun 2013.
  97. D. L. Christensen, C. H. Ahn, V. A. Hong, E. J. Ng, Y. Yang, B. J. Lee, and T. W. Kenny, "Hermetically encapsulated differential resonant accelerometer," 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), pp. 606-609, Jun 2013.
  98. S. Nitzan, C. H. Ahn, T.-H. Su, M. Li, E. J. Ng, S. Wang, Z. M. Yang, G. O'Brien, B. E. Boser, T. W. Kenny, and D. A. Horsley, "Epitaxially-encapsulated polysilicon disk resonator gyroscope," 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 625-628, Jan 2013.
  99. Chia-Fang Chiang, Andrew B. Graham, Brian J. Lee, Chae Hyuck Ahn, Eldwin J. Ng, Gary J. O'Brien, and Thomas W. Kenny, "Resonant pressure sensor with on-chip temperature and strain sensors for error correction," 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 45-48, Jan 2013.
  100. Fabian Purkl, Tim English, Gary Yama, J Provine, Ashwin K. Samarao, Ando Feyh, Gary O'Brien, Oliver Ambacher, Roger T. Howe, and Thomas W. Kenny, "Sub-10 nanometer uncooled platinum bolometers via plasma enhanced atomic layer deposition," 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 185-188, Jan 2013.
  101. Timothy S. English, Thomas W. Kenny, Justin L. Smoyer, Christopher H. Baker, Nam Q. Le, John C. Duda, Pamela M. Norris, and Patrick E. Hopkins, "Anharmonic Phonon Dispersion Relations, Group Velocities, and Branch-Dependent Specific Heat Capacities Measured Directly From Molecular Dynamics Simulations at Finite Temperatures," Volume 1: Heat Transfer in Energy Systems; Theory and Fundamental Research; Aerospace Heat Transfer; Gas Turbine Heat Transfer; Transport Phenomena in Materials Processing and Manufacturing; Heat and, pp. 617-624, Jul 2012.
  102. M.A. Philippine, O. Sigmund, G.M. Rebeiz, and T.W. Kenny, "Topology optimization, or how to generate cutting-edge designs," Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2012, Jun 2012.
  103. V. A. Hong, S. Yoneoka, M. W. Messana, A. B. Graham, J. C. Salvia, T. T. Branchflower, E. J. Ng, and T. W. Kenny, "High-stress fatigue experiments on single crystal silicon in an oxygen-free environment," Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2012, pp. 453-456, Jun 2012.
  104. E.J. Ng, S. Wang, D. Buchman, C.-F. Chiang, T.W. Kenny, H. Muenzel, M. Fuertsch, J. Marek, U.M. Gomez, G. Yama, and G. O’Brien, "Ultra-stable epitaxial polysilicon resonators," Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2012, pp. 271-274, Jun 2012.
  105. Chia-Fang Chiang, Andrew B. Graham, Eldwin J. Ng, Chae Hyuck Ahn, Gary J. O'Brien, and Thomas W. Kenny, "A novel, high-resolution resonant thermometer used for temperature compensation of a cofabricated pressure sensor," Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2012, pp. 54-57, Jun 2012.
  106. Shirin Ghaffari and Thomas W. Kenny, "Thermoelastic Dissipation in Composite Silicon MEMS Resonators with Thin Film Silicon Dioxide Coating," MRS Proceedings, Vol. 1426, pp. 193-198, May 2012.
  107. Chia-Fang Chiang, Andrew B. Graham, Gary J. O'Brien, and Thomas W. Kenny, "A single process for building capacitive pressure sensors and timing references with precise control of released area using lateral etch stop," 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 519-522, Jan 2012.
  108. Eldwin J. Ng, Hyung Kyu Lee, Chae Hyuck Ahn, Renata Melamud, and Thomas W. Kenny, "Stability measurements of silicon MEMS resonant thermometers," 2011 IEEE SENSORS Proceedings, pp. 1257-1260, Oct 2011.
  109. H.K. Lee, R. Melamud, S.A. Chandorkar, Y.Q. Qu, J.C. Salvia, B. Kim, M.A. Hopcroft, and T.W. Kenny, "Influence of the A-F effect on the temperature stability of silicon micromechanical resonators," 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, pp. 506-509, Jun 2011.
  110. H.K. Lee, P.A. Ward, A.E. Duwel, J.C. Salvia, Y.Q. Qu, R. Melamud, S.A. Chandorkar, M.A. Hopcroft, B. Kim, and T.W. Kenny, "Verification of the phase-noise model for MEMS oscillators operating in the nonlinear regime," 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, pp. 510-513, Jun 2011.
  111. Chia-Fang Chiang, Andrew B. Graham, Matthew W. Messana, J Provine, Daniela T. Buchman, Gary J. O'Brien, and Thomas W. Kenny, "Capacitive absolute pressure sensor with independent electrode and membrane sizes for improved fractional capacitance change," 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, pp. 894-897, Jun 2011.
  112. S. Wang, S. A. Chandorkar, A. B. Graham, M. W. Messana, J. Salvia, and T.W. Kenny, "Encapsulated mechanically coupled fully-differential breathe-mode ring filters with ultra-narrow bandwidth," 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, pp. 942-945, Jun 2011.
  113. S. Yoneoka, M. Liger, G. Yama, R. Schuster, F. Purkl, J Provine, F. B. Prinz, R. T. Howe, and T. W. Kenny, "ALD-metal uncooled bolometer," 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, pp. 676-679, Jan 2011.
  114. Kristen P. Bloschock, Adam R. Schofield, and Thomas W. Kenny, "Tip-based nanofabrication: an approach to true nanotechnology," Proceedings of the SPIE, Vol. 8031, pp. 803102-803102, 2011.
  115. G. Bahl, J. Salvia, H. K. Lee, R. Melamud, B. Kim, R.T. Howe, and T. W. Kenny, "Heterodyned electrostatic transduction oscillators evade low frequency noise aliasing," Proceedings of the 2010 Solid State Sensors and Actuators Workshop, Hilton Head, Jun 2010.
  116. H.K. Lee, J. C. Salvia, S. Yoneoka, G. Bahl, Y.Q. Qu, R. Melamud, S. Chandorkar, M.A. Hopcroft, B. Kim, and T.W. Kenny, "Stable oscillation of MEMS resonators beyond the critical bifuracation point," Proceedings of the 2010 Solid State Sensors and Actuators Workshop, Hilton Head, pp. 70-73, Jun 2010.
  117. M. W. Messana, A. B. Graham, S. Yoneoka, R. T. Howe, and T. W. Kenny, "Packaging of large lateral deflection MEMS using a combination of fusion bonding and epitaxial reactor sealing," Proceedings of the 2010 Solid State Sensors and Actuators Workshop, Hilton Head, pp. 336-339, Jun 2010.
  118. M.A. Philippine, C.-F. Chiang, J. Salvia, C.M. Jha, S. Yoneoka, and T.W. Kenny, "Material distribution design for a piezoelectric energy harvester displaying geometric nonlinearity," Proceedings of the 2010 Solid State Sensors and Actuators Workshop, Hilton Head, pp. 451-454, Jun 2010.
  119. Yu Qiao Qu, Renata Melamud, Saurabh Chandorkar, Hyung Kyu Lee, and Thomas.W. Kenny, "Stress relaxation study of sputtered Platinum thin films at near room temperature using an ultrasensitive strain gauge," 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), pp. 548-551, Jan 2010.
  120. Shingo Yoneoka, Yu Qiao Qu, Shasha Wang, Matthew W Messana, Andrew B Graham, James Salvia, Bongsang Kim, Renata Melamud, Gaurav Bahl, and Thomas W Kenny, "High-cyclic fatigue experiments of single crystal silicon in an oxygen-free environment," 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), pp. 224-227, Jan 2010.
  121. Gaurav Bahl, James Salvia, Igor Bargatin, Shingo Yoneoka, Renata Melamud, Bongsang Kim, Saurabh Chandorkar, Matthew A. Hopcroft, Rajendar Bahl, Roger T. Howe, and Thomas W. Kenny, "Charge-drift elimination in resonant electrostatic MEMS," 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), pp. 108-111, Jan 2010.
  122. Hyung Kyu Lee, James Salvia, Gaurav Bahl, Renata Melamud, Shingo Yoneoka, Yu Qiao Qu, Saurabh Chandorkar, Matthew A Hopcroft, Bongsang Kim, and Thomas W Kenny, "Influence of the temperature dependent A-f effect on the design and performance of oscillators," 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), pp. 699-702, Jan 2010.
  123. Shasha Wang, Saurabh Chandorkar, James Salvia, Renata Melamud, Yu-Qiao Qu, Hyung Kyu Lee, and Thomas W. Kenny, "Nonlinearity of hermetically encapsulated high-Q double balanced breathe-mode ring resonator," 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), pp. 715-718, Jan 2010.
  124. Hyung Kyu Lee, Shingo Yoneoka, Gaurav Bahl, James Salvia, Yu Qiao Qu, Renata Melamud, Saurabh Chandorkar, Bongsang Kim, Matthew A Hopcroft, and Thomas W Kenny, "A novel characterization method for temperature compensation of composite resonators," 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), pp. 743-746, Jan 2010.
  125. Adam R. Schofield, Kristen P. Bloschock, and Thomas W. Kenny, "Tip-based nanofabrication: an approach to true nanotechnology," Proceedings of the SPIE, Vol. 7637, pp. 76371-76371, 2010.
  126. J. Salvia , P. Lajevardi, M. Hekmat, and B. Murmann, "A 56M-Ohm CMOS TIA for MEMS applications," Proc. IEEE 2009 CICC, San Jose, CA, USA, pp. 199-202, Sep 2009.
  127. Kevin A. Lohner, Yaniv D. Scherson, Brian W. Lariviere, Brian J. Cantwell, and T.W. Kenny, "A Monopropellant Gas Generator Based on N2O Decomposition for "Green" Propulsion and Power Applications," 45th AIAA/ASME/SAE/ASEE Joint Propulsion Conference & Exhibit, Denver, Colorado, Aug 2009.
  128. C. S. Roper, R. Candler, S. Yoneoka, T. Kenny, R. T. Howe, and R. Maboudian, "Simultaneous wafer-scale vacuum encapsulation and microstructure cladding with LPCVD polycrystalline 3C-SiC," TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference, pp. 1031-1034, Jun 2009.
  129. Y.Q. Qu, R. Melamud, and T.W. Kenny, "Using encapsulated MEMS resonators to measure evolution in thin film stress," TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference, pp. 1138-1141, Jun 2009.
  130. Kuan-Lin Chen, Shasha Wang, James Salvia, Roger T. Howe, and Thomas W. Kenny, "Encapsulated out-of-plane differential square-plate resonator with integrated actuation electrodes," TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference, pp. 1421-1424, Jun 2009.
  131. Kuan-Lin Chen, S. Wang, T.W. Kenny, "Encapsulated out-of-plane differential square-plate resonator with integrated actuation electrodes," IMAPS International Conference and Exhibition on Device Packaging, 2009, Arizona, USA, Mar 2009.
  132. J. Salvia, R. Melamud, S. Chandorkar, H.K. Lee, Y.Q. Qu, S.F. Lord, B. Murmann, and T.W. Kenny, "Phase Lock Loop based Temperature Compensation for MEMS Oscillators," 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems, pp. 661-664, Jan 2009.
  133. A.B. Graham, M. Messana, P. Hartwell, J. Provine, S. Yoneoka, B. Kim, R. Melamud, R.T. Howe, and T.W. Kenny, "Wafer Scale Encapsulation of Large Lateral Deflection MEMS Structures," 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems, pp. 745-748, Jan 2009.
  134. S. Yoneoka, G. Bahl, J. Salvia, K. L. Chen, A. B. Graham, H. K. Lee, G. Yama, R. N. Candler, and T. W. Kenny, "Acceleration Compensation of MEMS Resonators using Electrostatic Tuning," 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems, pp. 805-808, Jan 2009.
  135. Kuan-Lin Chen, Hengky Chandrahalim, Andrew B. Graham, Sunil A. Bhave, Roger T. Howe, and Thomas W. Kenny, "Epitaxial Silicon Microshell Vacuum-Encapsulated CMOS-Compatible 200 MHz Bulk-Mode Resonator," 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems, pp. 23-26, Jan 2009.
  136. Kuan-Lin Chen, Renata Melamud, Shasha Wang, and Thomas W. Kenny, "An Integrated Solution for Wafer-Level Packaging and Electrostatic Actuation of Out-of-Plane Devices," 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems, pp. 1071-1074, Jan 2009.
  137. Kevin A. Lohner, Yaniv D. Scherson, Brian W. Lariviere, Brian J. Cantwell, and T.W. Kenny, "Nitrous Oxide Monopropellant Gas Generator Development," JANNAF / 3rd Spacecraft Propulsion Joint Subcommittee Meeting, Orlando, FL, Dec 2008.
  138. J. Salvia, M. Messana, M. Ohline, M.A. Hopcroft, R. Melamud, S. Chandorkar, H.K. Lee, G. Bahl, B. Murmann, and T.W. Kenny, "Exploring the limits and practicality of Q-based temperature compensation for silicon resonators," 2008 IEEE International Electron Devices Meeting, pp. 1-4, Dec 2008.
  139. S. A. Chandorkar, M. Agarwal, R. Melamud, R. N. Candler, K. E. Goodson, and T. W. Kenny, "Limits of quality factor in bulk-mode micromechanical resonators," 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems, pp. 74-77, Jan 2008.
  140. Bongsang Kim, Rob N. Candler, Renata Melamud, Shingo Yoneoka, Hyung Kyu Lee, Gary Yama, and Thomas W. Kenny, "Identification and management of diffusion pathways in polysilicon encapsulation for MEMS devices," 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems, pp. 104-107, Jan 2008.
  141. H. K. Lee, M. A. Hopcroft, R. Melamud, B. Kim, J. Salvia, S. Chandorkar, and T. W. Kenny, "Electrostatic-Tuning of Hermetically Encapsulated Composite Resonator," Solid-State Sensors, Actuators, and Microsystems Workshop, pp. 48-51, 2008.
  142. B. Kim, M. Hopcroft, C.M Jha, R. Melamud, S. Chandorkar, M. Agarwal, K. L. Chen, W. T. Park, R. Candler, G. Yama, A. Partridge, M. Lutz, and T. W. Kenny, "Using MEMS to Build the Device and the Package," TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference, pp. 331-334, Jun 2007.
  143. M.A. Hopcroft, H.K. Lee, B. Kim, R. Melamud, S. Chandorkar, M. Agarwal, C.M. Jha, J. Salvia, G. Bahl, H. Mehta, and T.W. Kenny, "A High-Stability MEMS Frequency Reference," TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference, pp. 1307-1309, Jun 2007.
  144. C. M. Jha, G. Bahl, R. Melamud, S. A. Chandorkar, M. A. Hopcroft, B. Kim, M. Agarwal, J. Salvia, H. Mehta, and T. W. Kenny, "Cmos-Compatible Dual-Resonator MEMS Temperature Sensor with Milli-Degree Accuracy," TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference, pp. 229-232, Jun 2007.
  145. Bongsang Kim, R. Melamud, M.A. Hopcroft, S.A. Chandorkar, G. Bahl, M. Messana, R.N. Candler, G. Yama, and T. Kenny, "Si-SiO2 Composite MEMS Resonators in CMOS Compatible Wafer-scale Thin-Film Encapsulation," 2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum, pp. 1214-1219, May 2007.
  146. S. A. Chandorkar, H. Mehta, M. Agarwal, M.A. Hopcroft, C. M. Jha, R.N. Candler, G. Yama, G. Bahl, B. Kim, R. Melamud, K. E. Goodson, and T. W. Kenny, "Non-isothermal micromechanical resonators," 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 211-214, Jan 2007.
  147. Renata Melamud, Bongsang Kim, Matthew A. Hopcroft, S. Chandorkar, M. Agarwal, C.M. Jha, and T.W. Kenny, "Composite flexural-mode resonator with controllable turnover temperature," 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 199-202, Jan 2007.
  148. M. Agarwal, H. Mehta, R.N. Candler, S.A. Chandorkar, Bongsang Kim, M.A. Hopcroft, R. Melamud, G. Bahl, G. Yama, T.W. Kenny, and B. Murmann, "Impact of miniaturization on the current handling of electrostatic MEMS resonators," 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 783-786, Jan 2007.
  149. Bongsang Kim, Matthew A. Hopcroft, Renata Melamud, Chandra M. Jha, Manu Agarwal, Saurabh A. Chandorkar, and Thomas W. Kenny, "CMOS Compatible Wafer-Scale Encapsulation MEMS Resonators," ASME 2007 InterPACK Conference, Volume 1, pp. 499-504, 2007.
  150. Manu Agarwal, Kwan Park, Rob Candler, Bongsang Kim, Matthew Hopcroft, Saurabh Chandorkar, Chandra Jha, Renata Melamud, Thomas Kenny, and Boris Murmann, "Nonlinear Characterization of Electrostatic MEMS Resonators," 2006 IEEE International Frequency Control Symposium and Exposition, pp. 209-212, Jun 2006.
  151. THOMAS W. KENNY, KENNETH E. GOODSON, JUAN G. SANTIAGO, EVELYN WANG, JAE-MO KOO, LINAN JIANG, ERIC POP, SANJIV SINHA, LIAN ZHANG, DAVID FOGG, SHUHUAI YAO, ROGER FLYNN, CHING-HSIANG CHANG, and CARLOS H. HIDROVO, "ADVANCED COOLING TECHNOLOGIES FOR MICROPROCESSORS," Frontiers in Electronics - Proceedings of the WOFE-04, pp. 301-313, 2006.
  152. V. Ayanoor Vitikkate, K.-L. Chen, W.T. Park, T.W. Kenny, "Development of a process for wafer scale encapsulation of devices with very wide trenches," ASME IMECE, 2006.
  153. V. Ayanoor Vitikkate, K.-L. Chen, W.T. Park, G. Yama, T.W. Kenny, "Wafer Scale Encapsulation of Wide Gaps using oxidation of Sacrificial Beam," IEEE IEMT, 2006.
  154. R. Melamud, B. Kim, M. A. Hopcroft, S. Chandorkar, M. Agarwal, C. M. Jha, K. K. Park, and T. W. Kenny, "Composite Flexural Mode Resonator with Reduced Temperature Coefficient of Frequency," Solid-State Sensors, Actuators, and Microsystems Workshop, 2006.
  155. B. Kim, C.M. Jha, T. White, R.N. Candler, M. Hopcroft, M. Agarwal, K.K. Park, R. Melamud, S. Chandorkar, and T.W. Kenny, "Temperature Dependence of Quality Factor in MEMS Resonators," 19th IEEE International Conference on Micro Electro Mechanical Systems, pp. 590-593, 2006.
  156. M.A. Hopcroft, M. Agarwal, K.K. Park, B. Kim, C.M. Jha, R.N. Candler, G. Yama, B. Murmann, and T.W. Kenny, "Temperature Compensation of a MEMS Resonator Using Quality Factor as a Thermometer," 19th IEEE International Conference on Micro Electro Mechanical Systems, pp. 222-225, 2006.
  157. M. Agarwal, K.K. Park, M. Hopcroft, S. Chandorkar, R.N. Candler, B. Kim, R. Melamud, G. Yama, B. Murmann, and T.W. Kenny, "Effects of Mechanical Vibrations and Bias Voltage Noise on Phase Noise of MEMS Resonator Based Oscillators," 19th IEEE International Conference on Micro Electro Mechanical Systems, pp. 154-157, 2006.
  158. Chandra M. Jha, Matthew A. Hopcroft, Manu Agarwal, Saurabh A. Chandorkar, Rob N. Candler, Vijay Subramaniun, Renata Melamud, Suhrid Bhat, Bongsang Kim, Kwan K. Park, and Thomas W. Kenny, "In-Chip Device-Layer Thermal Isolation of MEMS Resonator for Lower Power Budget," Microelectromechanical Systems, Vol. 2006, No. 1, pp. 97-103, 2006.
  159. M. Agarwal, K. Park, R. Candler, M. Hopcroft, C. Jha, R. Melamud, B. Kim, B. Murmann, and T.W. Kenny, "Non-linearity cancellation in MEMS resonators for improved power-handling," IEEE InternationalElectron Devices Meeting, 2005. IEDM Technical Digest., pp. 286-289, 2005.
  160. A. Patridge, M. Lutz, B. Kim, M. Hopcroft, R. N. Candler, T. W. Kenny, K Petersen, M Esashi, "MEMS Resonators: Getting the Packaging Right," Semicon Japan, 2005.
  161. B. Kim, R. N. Candler, M. Hopcroft, M. Agarwal, W.-T. Park, T. W. Kenny, "Frequency Stability of Wafer-Scale Encapsulated MEMS Resonators," The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05., Vol. 2, pp. 1965-1968, 2005.
  162. R. Melamud, M. Hoperoft, C. Jha, Bongsang Kim, S. Chandorkar, R. Candler, and T.W. Kenny, "Effects of stress on the temperature coefficient of frequency in double clamped resonators," The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05., Vol. 1, No. 2, pp. 392-395, 2005.
  163. R.N. Candler, M. Hopcroft, C.W. Low, S. Chandorkar, B. Kim, M. Varghese, A. Dowel, and T.W. Kenny, "Impact of slot location on thermoelastic dissipation in micromechanical resonators," The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05., Vol. 1, pp. 597-600, 2005.
  164. R.N. Candler, Woo-Tae Park, M. Hopcroft, Bongsang Kim, and T.W. Kenny, "Hydrogen diffusion and pressure control of encapsulated MEMS resonators," The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05., Vol. 1, pp. 920-923, 2005.
  165. W.T. Park, K.N. O'Connor, J.R. Mallon, T. Maetani, R.N. Candler, V. Ayanoor-Vitikkate, J. Roberson, S. Puria, and T.W. Kenny, "Sub-Millimeter Encapsulated Accelerometers : A Fully Implantable Sensor for Cochlear Implants," The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05., pp. 109-112, 2005.
  166. M. Hopcroft, R. Melamud, R. N. Candler, W.-T. Park, B. Kim, G. Yama, A. Patridge, M. Lutz, and T. W. Kenny, "Active Temperature Compensation for Micromachined Resonator," IEEE Solid-State Sensor and Actuator Workshop 2004, Jun 2004.
  167. Bongsang Kim, Rob N. Candler, Matthew Hopcroft, Manu Agarwal, Woo-Tae Park, Jeffrey T. Li, and Thomas Kenny, "Investigation of MEMS Resonator Characteristics for Long-Term and Wide Temperature Variation Operation," Microelectromechanical Systems, Vol. 2004, pp. 413-416, 2004.
  168. M. Hopcroft, R. Melamud, R.N. Candler, W-T. Park, B. Kim, G. Yama, A. Partridge, M. Lutz, and T.W. Kenny, "Active Temperature Compensation for Micromachined Resonators," Proceedings of the 2004 Solid State Sensors and Actuators Workshop, pp. 364-367, 2004.
  169. E.N. Wang, S. Devasenathipathy, C.H. Hidrovo, D.W. Fogg, J.M. Koo, J.G. Santiago. K.E. Goodson and T.W. Kenny, "A Quantitative Understanding of Transient Bubble Growth in Microchannelsusing PIV," Proceedings of the 2004 Solid State Sensors and Actuators Workshop, pp. 101-102, 2004.
  170. R.N. Candler, M. Hopcroft, WT. Park, S.A. Chandorkar, G. Yama, K.E. Goodson, M. Varghese, A.E. Duwel, A. Partridge, M. Lutz and T.W. Kenny, "Reduction in Thermoelastic Dissipation in Micromechanical Resonators by Disruption of Heat Transport," Proceedings of the 2004 Solid State Sensors and Actuators Workshop, pp. 45-48, 2004.
  171. Thomas W. Kenny, "Fundamental noise in MEMS force sensors," Proceedings of SPIE Conference on Noise and Information in Nanoelectronics, Sensors, and Standards II, Vol. 5472, pp. 143-151, 2004.
  172. G. Upadhya, P. Zhou, K. Goodson, M. Munch, and T. Kenny, "Closed-loop cooling technologies for microprocessors," IEEE International Electron Devices Meeting 2003, pp. 324-324, 2003.
  173. Woo-Tae Park, Rob N. Candler, Huimou J. Li, Junghwa Cho, Holden Li, Thomas W. Kenny, Aaron Partridge, Gary Yama, and Markus Lutz, "Wafer Scale Encapsulation of MEMS Devices," 2003 International Electronic Packaging Technical Conference and Exhibition, Volume 1, pp. 209-212, 2003.
  174. W.-T. Park, R.N. Candler, S. Kronmueller, M. Lutz, A. Partridge, G. Yama, and T.W. Kenny, "Wafer-scale film encapsulation of micromachined accelerometers," TRANSDUCERS , pp. 1903-1906, 2003.
  175. B.W. Chui, Y. Hishinuma, R. Budakian, H.J. Mamin, T.W. Kenny, and D. Rugar, "Mass-loaded cantilevers with suppressed higher-order modes for magnetic resonance force microscopy," TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664), pp. 1120-1123, 2003.
  176. M.S. Bartsch, W. Federle, R.J. Full, and T.W. Kenny, "Small insect measurements using a custom MEMS force sensor," TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664), pp. 1039-1042, 2003.
  177. R.N. Candler, H. Li, M. Lutz, W.-T. Park, A. Partridge, G. Yama, and T.W. Kenny, "Investigation of energy loss mechanisms in micromechanical resonators," TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664), Vol. 79, No. 8, pp. 332-335, 2003.
  178. D.J. Laser, A.M. Myers, Shuhuai Yao, K.F. Bell, K.E. Goodson, J.G. Santiago, and T.W. Kenny, "Silicon electroosmotic micropumps for integrated circuit thermal management," TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664), pp. 151-154, 2003.