Micro Structures & Sensors Lab
Kenny Group @ Stanford

Publications

Journal Publications

  1. Eldwin J. Ng, Hyung Kyu Lee, Chae Hyuck Ahn, Renata Melamud, and Thomas W. Kenny, "Stability of Silicon Microelectromechanical Systems Resonant Thermometers," IEEE Sensors Journal, Vol. 13, No. 3, pp. 987-993, 2013.
    10.1109/JSEN.2012.2227708
     
  2. Mandy A. Philippine, Ole Sigmund, Gabriel M. Rebeiz, and Thomas W. Kenny, "Topology Optimization of Stressed Capacitive RF MEMS Switches," Journal of Microelectromechanical Systems, Vol. 22, No. 1, pp. 206-215, 2013.
    10.1109/JMEMS.2012.2224640
     
  3. Yoonjin Won, Yuan Gao, Matthew A. Panzer, Senyo Dogbe, Lawrence Pan, Thomas W. Kenny, and Kenneth E. Goodson, "Mechanical characterization of aligned multi-walled carbon nanotube films using microfabricated resonators," Carbon, Vol. 50, No. 2, pp. 347-355, 2012.
    10.1016/j.carbon.2011.08.009
     
  4. Shingo Yoneoka, Jaeho Lee, Matthieu Liger, Gary Yama, Takashi Kodama, Marika Gunji, J. Provine, Roger T. Howe, Kenneth E. Goodson, and Thomas W. Kenny, "Electrical and Thermal Conduction in Atomic Layer Deposition Nanobridges Down to 7 nm Thickness," Nano Letters, Vol. 12, No. 2, pp. 683-686, 2012.
    10.1021/nl203548w
     
  5. Yoonjin Won, Jaeho Lee, Mehdi Asheghi, Thomas W. Kenny, and Kenneth E. Goodson, "Phase and thickness dependent modulus of Ge2Sb2Te5 films down to 25 nm thickness," Applied Physics Letters, Vol. 100, No. 16, pp. 161905, 2012.
    10.1063/1.3699227
     
  6. Hyung Kyu Lee, Renata Melamud, Bongsang Kim, Matthew A. Hopcroft, James C. Salvia, and Thomas W. Kenny, "Electrostatic Tuning to Achieve Higher Stability Microelectromechanical Composite Resonators," Journal of Microelectromechanical Systems, Vol. 20, No. 6, pp. 1355-1365, 2011.
    10.1109/JMEMS.2011.2168083
     
  7. Hyung Kyu Lee, Renata Melamud, Saurabh Chandorkar, James Salvia, Shingo Yoneoka, and Thomas W. Kenny, "Stable Operation of MEMS Oscillators Far Above the Critical Vibration Amplitude in the Nonlinear Regime," Journal of Microelectromechanical Systems, Vol. 20, No. 6, pp. 1228-1230, 2011.
    10.1109/JMEMS.2011.2170821
     
  8. Gaurav Bahl, James C. Salvia, Renata Melamud, Bongsang Kim, Roger T. Howe, and Thomas W. Kenny, "AC Polarization for Charge-Drift Elimination in Resonant Electrostatic MEMS and Oscillators," Journal of Microelectromechanical Systems, Vol. 20, No. 2, pp. 355-364, 2011.
    10.1109/JMEMS.2010.2100027
     
  9. Kuan-Lin Chen, Shasha Wang, James C. Salvia, Renata Melamud, Roger T. Howe, and Thomas W. Kenny, "Wafer-Level Epitaxial Silicon Packaging for Out-of-Plane RF MEMS Resonators With Integrated Actuation Electrodes," IEEE Transactions on Components, Packaging and Manufacturing Technology, Vol. 1, No. 3, pp. 310-317, 2011.
    10.1109/TCPMT.2010.2100711
     
  10. G. C. Hill, D. R. Soto, A. M. Peattie, R. J. Full, and T. W. Kenny, "Orientation angle and the adhesion of single gecko setae," Journal of The Royal Society Interface, Vol. 8, No. 60, pp. 926-933, 2011.
    10.1098/rsif.2010.0720
     
  11. Hyung Kyu Lee, Bongsang Kim, Renata Melamud, Matthew A. Hopcroft, James C. Salvia, and Thomas W. Kenny, "Influence of the temperature dependent nonlinearities on the performance of micromechanical resonators," Applied Physics Letters, Vol. 99, No. 19, pp. 194102, 2011.
    10.1063/1.3660235
     
  12. Shingo Yoneoka, James C. Salvia, Gaurav Bahl, Renata Melamud, Saurabh A. Chandorkar, and Thomas W. Kenny, "Active Electrostatic Compensation of Micromechanical Resonators Under Random Vibrations," Journal of Microelectromechanical Systems, Vol. 19, No. 5, pp. 1270-1272, 2010.
    10.1109/JMEMS.2010.2067444
     
  13. Matthew A. Hopcroft, William D. Nix, and Thomas W. Kenny, "What is the Young's Modulus of Silicon?," Journal of Microelectromechanical Systems, Vol. 19, No. 2, pp. 229-238, 2010.
    10.1109/JMEMS.2009.2039697
     
  14. Shingo Yoneoka, Christopher S. Roper, Robert N. Candler, Saurabh A. Chandorkar, Andrew B. Graham, J. Provine, Roya Maboudian, Roger T. Howe, and Thomas W. Kenny, "Characterization of Encapsulated Micromechanical Resonators Sealed and Coated With Polycrystalline SiC," Journal of Microelectromechanical Systems, Vol. 19, No. 2, pp. 357-366, 2010.
    10.1109/JMEMS.2010.2040460
     
  15. James C. Salvia, Renata Melamud, Saurabh A. Chandorkar, Scott F. Lord, and Thomas W. Kenny, "Real-Time Temperature Compensation of MEMS Oscillators Using an Integrated Micro-Oven and a Phase-Locked Loop," Journal of Microelectromechanical Systems, Vol. 19, No. 1, pp. 192-201, 2010.
    10.1109/JMEMS.2009.2035932
     
  16. Andrew B. Graham, Matthew W. Messana, Peter G. Hartwell, J. Provine, Shingo Yoneoka, Renata Melamud, Bongsang Kim, Roger T. Howe, and Thomas W. Kenny, "A Method for Wafer-Scale Encapsulation of Large Lateral Deflection MEMS Devices," Journal of Microelectromechanical Systems, Vol. 19, No. 1, pp. 28-37, 2010.
    10.1109/JMEMS.2009.2035717
     
  17. Gaurav Bahl, Renata Melamud, Bongsang Kim, Saurabh A. Chandorkar, James C. Salvia, Matthew A. Hopcroft, David Elata, Robert G. Hennessy, Rob N. Candler, Roger T. Howe, and Thomas W. Kenny, "Model and Observations of Dielectric Charge in Thermally Oxidized Silicon Resonators," Journal of Microelectromechanical Systems, Vol. 19, No. 1, pp. 162-174, 2010.
    10.1109/JMEMS.2009.2036274
     
  18. Daniel Soto, Ginel Hill, Aaron Parness, Noé Esparza, Mark Cutkosky, and Tom Kenny, "Effect of fibril shape on adhesive properties," Applied Physics Letters, Vol. 97, No. 5, pp. 53701, 2010.
    10.1063/1.3464553
     
  19. R. Melamud, S.A. Chandorkar, Bongsang Kim, Hyung Kyu Lee, J.C. Salvia, G. Bahl, M.A. Hopcroft, and T.W. Kenny, "Temperature-Insensitive Composite Micromechanical Resonators," Journal of Microelectromechanical Systems, Vol. 18, No. 6, pp. 1409-1419, 2009.
    10.1109/JMEMS.2009.2030074
     
  20. Kuan-Lin Chen, J. Salvia, R. Potter, R.T. Howe, and T.W. Kenny, "Performance Evaluation and Equivalent Model of Silicon Interconnects for Fully-Encapsulated RF MEMS Devices," IEEE Transactions on Advanced Packaging, Vol. 32, No. 2, pp. 402-409, 2009.
    10.1109/TADVP.2008.2005114
     
  21. Bongsang Kim, Rob N. Candler, Renata Melamud, Matthew A. Hopcroft, Shingo Yoneoka, Hyung Kyu Lee, Manu Agarwal, Saurabh A. Chandorkar, Gary Yama, and Thomas W. Kenny, "Hermeticity and diffusion investigation in polysilicon film encapsulation for microelectromechanical systems," Journal of Applied Physics, Vol. 105, No. 1, pp. 13514, 2009.
    10.1063/1.3054366
     
  22. Bongsang Kim, Matthew A. Hopcroft, Rob N. Candler, Chandra Mohan Jha, Manu Agarwal, Renata Melamud, Saurabh A. Chandorkar, Gary Yama, and Thomas W. Kenny, "Temperature Dependence of Quality Factor in MEMS Resonators," Journal of Microelectromechanical Systems, Vol. 17, No. 3, pp. 755-766, 2008.
    10.1109/JMEMS.2008.924253
     
  23. C.M. Jha, M.A. Hopcroft, S.A. Chandorkar, J.C. Salvia, M. Agarwal, R.N. Candler, R. Melamud, Bongsang Kim, and T.W. Kenny, "Thermal Isolation of Encapsulated MEMS Resonators," Journal of Microelectromechanical Systems, Vol. 17, No. 1, pp. 175-184, 2008.
    10.1109/JMEMS.2007.904332
     
  24. C. M. Jha, J. Salvia, S. A. Chandorkar, R. Melamud, E. Kuhl, and T. W. Kenny, "Acceleration insensitive encapsulated silicon microresonator," Applied Physics Letters, Vol. 93, No. 23, pp. 234103, 2008.
    10.1063/1.3036536
     
  25. Manu Agarwal, Saurabh A. Chandorkar, Harsh Mehta, Robert N. Candler, Bongsang Kim, Matthew A. Hopcroft, Renata Melamud, Chandra M. Jha, Gaurav Bahl, Gary Yama, Thomas W. Kenny, and Boris Murmann, "A study of electrostatic force nonlinearities in resonant microstructures," Applied Physics Letters, Vol. 92, No. 10, pp. 104106, 2008.
    10.1063/1.2834707
     
  26. Woo-Tae Park, Kevin N. O’Connor, Kuan-Lin Chen, Joseph R. Mallon, Toshiki Maetani, Parmita Dalal, Rob N. Candler, Vipin Ayanoor-Vitikkate, Joseph B. Roberson, Sunil Puria, and Thomas W. Kenny, "Ultraminiature encapsulated accelerometers as a fully implantable sensor for implantable hearing aids," Biomedical Microdevices, Vol. 9, No. 6, pp. 939-949, 2007.
    10.1007/s10544-007-9072-4
     
  27. Bongsang Kim, Rob N. Candler, Matthew A. Hopcroft, Manu Agarwal, Woo-Tae Park, and Thomas W. Kenny, "Frequency stability of wafer-scale film encapsulated silicon based MEMS resonators," Sensors and Actuators A: Physical, Vol. 136, No. 1, pp. 125-131, 2007.
    10.1016/j.sna.2006.10.040
     
  28. Manu Agarwal, Harsh Mehta, Robert N. Candler, Saurabh A. Chandorkar, Bongsang Kim, Matthew A. Hopcroft, Renata Melamud, Gaurav Bahl, Gary Yama, Thomas W. Kenny, and Boris Murmann, "Scaling of amplitude-frequency-dependence nonlinearities in electrostatically transduced microresonators," Journal of Applied Physics, Vol. 102, No. 7, pp. 74903, 2007.
    10.1063/1.2785018
     
  29. C. M. Jha, G. Bahl, R. Melamud, S. A. Chandorkar, M. A. Hopcroft, B. Kim, M. Agarwal, J. Salvia, H. Mehta, and T. W. Kenny, "High resolution microresonator-based digital temperature sensor," Applied Physics Letters, Vol. 91, No. 7, pp. 74101, 2007.
    10.1063/1.2768629
     
  30. Renata Melamud, Bongsang Kim, Saurabh A. Chandorkar, Matthew A. Hopcroft, Manu Agarwal, Chandra M. Jha, and Thomas W. Kenny, "Temperature-compensated high-stability silicon resonators," Applied Physics Letters, Vol. 90, No. 24, pp. 244107, 2007.
    10.1063/1.2748092
     
  31. M. A. Hopcroft, B. Kim, S. Chandorkar, R. Melamud, M. Agarwal, C. M. Jha, G. Bahl, J. Salvia, H. Mehta, H. K. Lee, R. N. Candler, and T. W. Kenny, "Using the temperature dependence of resonator quality factor as a thermometer," Applied Physics Letters, Vol. 91, No. 1, pp. 13505, 2007.
    10.1063/1.2753758
     
  32. Manu Agarwal, Kwan K. Park, Saurabh A. Chandorkar, Rob N. Candler, Bongsang Kim, Matthew A. Hopcroft, Renata Melamud, Thomas W. Kenny, and Boris Murmann, "Acceleration sensitivity in beam-type electrostatic microresonators," Applied Physics Letters, Vol. 90, No. 1, pp. 14103, 2007.
    10.1063/1.2426884
     
  33. Rob N. Candler, Matthew A. Hopcroft, Bongsang Kim, Woo-Tae Park, Renata Melamud, Manu Agarwal, Gary Yama, Aaron Partridge, Markus Lutz, and Thomas W. Kenny, "Long-Term and Accelerated Life Testing of a Novel Single-Wafer Vacuum Encapsulation for MEMS Resonators," Journal of Microelectromechanical Systems, Vol. 15, No. 6, pp. 1446-1456, 2006.
    10.1109/JMEMS.2006.883586
     
  34. Amy Duwel, Rob N. Candler, Thomas W. Kenny, and Mathew Varghese, "Engineering MEMS Resonators With Low Thermoelastic Damping," Journal of Microelectromechanical Systems, Vol. 15, No. 6, pp. 1437-1445, 2006.
    10.1109/JMEMS.2006.883573
     
  35. R.N. Candler, A. Duwel, M. Varghese, S.A. Chandorkar, M.A. Hopcroft, W.-T. Park, B. Kim, G. Yama, A. Partridge, M. Lutz, and T.W. Kenny, "Impact of Geometry on Thermoelastic Dissipation in Micromechanical Resonant Beams," Journal of Microelectromechanical Systems, Vol. 15, No. 4, pp. 927-934, 2006.
    10.1109/JMEMS.2006.879374
     
  36. W.-T. Park, A. Partridge, R.N. Candler, V. Ayanoor-Vitikkate, G. Yama, M. Lutz, and T.W. Kenny, "Encapsulated Submillimeter Piezoresistive Accelerometers," Journal of Microelectromechanical Systems, Vol. 15, No. 3, pp. 507-514, 2006.
    10.1109/JMEMS.2006.876648
     
  37. Carlos H. Hidrovo, Theresa A. Kramer, Evelyn N. Wang, Sébastien Vigneron, Julie E. Steinbrenner, Jae-Mo Koo, Fu-Min Wang, David W. Fogg, Roger D. Flynn, Eon Soo Lee, Ching-Hsiang Cheng, Thomas W. Kenny, John K. Eaton, and Kenneth E. Goodson, "Two-Phase Microfluidics for Semiconductor Circuits and Fuel Cells," Heat Transfer Engineering, Vol. 27, No. 4, pp. 53-63, 2006.
    10.1080/01457630500523816
     
  38. Evelyn N. Wang, Shankar Devasenathipathy, Hao Lin, Carlos H. Hidrovo, Juan G. Santiago, Kenneth E. Goodson, and Thomas W. Kenny, "A hybrid method for bubble geometry reconstruction in two-phase microchannels," Experiments in Fluids, Vol. 40, No. 6, pp. 847-858, 2006.
    10.1007/s00348-006-0123-z
     
  39. Manu Agarwal, Saurabh A. Chandorkar, Rob N. Candler, Bongsang Kim, Matthew A. Hopcroft, Renata Melamud, Chandra M. Jha, Thomas W. Kenny, and Boris Murmann, "Optimal drive condition for nonlinearity reduction in electrostatic microresonators," Applied Physics Letters, Vol. 89, No. 21, pp. 214105, 2006.
    10.1063/1.2388886
     
  40. A. Patridge, J. McDonald, and B. Kim, "Silicon MEMS Oscillators to Replace Quartz Crystals," Electronic Science (in Korean), Vol. 564, pp. 149-152, 2006.

     
  41. Lian Zhang, Evelyn N. Wang, Kenneth E. Goodson, and Thomas W. Kenny, "Phase change phenomena in silicon microchannels," International Journal of Heat and Mass Transfer, Vol. 48, No. 8, pp. 1572-1582, 2005.
    10.1016/j.ijheatmasstransfer.2004.09.048
     
  42. E.N. Wang, L. Zhang, L. Jiang, J.-M. Koo, J.G. Maveety, E.A. Sanchez, K.E. Goodson, and T.W. Kenny, "Micromachined Jets for Liquid Impingement Cooling of VLSI Chips," Journal of Microelectromechanical Systems, Vol. 13, No. 5, pp. 833-842, 2004.
    10.1109/JMEMS.2004.835768
     
  43. Emily D. Renuart, Alissa M. Fitzgerald, Thomas W. Kenny, and Reinhold H. Dauskardt, "Fatigue crack growth in micro-machined single-crystal silicon," Journal of Materials Research, Vol. 19, No. 9, pp. 2635-2640, 2004.
    10.1557/JMR.2004.0343
     
  44. Evelyn N. Wang, Shankar Devasenathipathy, Juan G. Santiago, Kenneth E. Goodson, and Thomas W. Kenny, "Nucleation and Growth of Vapor Bubbles in a Heated Silicon Microchannel," Journal of Heat Transfer, Vol. 126, No. 4, pp. 497, 2004.
    10.1115/1.1811716
     
  45. William P. King, Thomas W. Kenny, and Kenneth E. Goodson, "Comparison of thermal and piezoresistive sensing approaches for atomic force microscopy topography measurements," Applied Physics Letters, Vol. 85, No. 11, pp. 2086, 2004.
    10.1063/1.1787160
     
  46. R.N. Candler, Woo-Tae Park, Huimou Li, G. Yama, A. Partridge, M. Lutz, and T.W. Kenny, "Single wafer encapsulation of mems devices," IEEE Transactions on Advanced Packaging, Vol. 26, No. 3, pp. 227-232, 2003.
    10.1109/TADVP.2003.818062
     
  47. J.P. Lynch, A. Sundararajan, K.H. Law, A.S. Kiremidjian, T. Kenny and E. Carryer, "Embedment of structural monitoring algorithms in a wireless sensing unit," Structural Engineering and Mechanics, Vol. 15, No. 3, pp. 285-297, 2003.

     
  48. Jerome P. Lynch, Aaron Partridge, Kincho H. Law, Thomas W. Kenny, Anne S. Kiremidjian, and Ed Carryer, "Design of Piezoresistive MEMS-Based Accelerometer for Integration with Wireless Sensing Unit for Structural Monitoring," Journal of Aerospace Engineering, Vol. 16, No. 3, pp. 108, 2003.
    10.1061/(ASCE)0893-1321(2003)16:3(108)
     
  49. Yoshikazu Hishinuma, Theodore H. Geballe, Boris Y. Moyzhes, and Thomas W. Kenny, "Measurements of cooling by room-temperature thermionic emission across a nanometer gap," Journal of Applied Physics, Vol. 94, No. 7, pp. 4690, 2003.
    10.1063/1.1606852
     
  50. Y. Hishinuma, T. H. Geballe, B. Y. Moyzhes, and T. W. Kenny, "Refrigeration by combined tunneling and thermionic emission in vacuum: Use of nanometer scale design," Applied Physics Letters, Vol. 78, No. 17, pp. 2572, 2001.
    10.1063/1.1365944
     
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    10.1109/MEMSYS.2001.906477
     

Conference Publications

  1. Chia-Fang Chiang, Andrew B. Graham, Brian J. Lee, Chae Hyuck Ahn, Eldwin J. Ng, Gary J. O'Brien, and Thomas W. Kenny, "Resonant pressure sensor with on-chip temperature and strain sensors for error correction," 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 45-48, 2013.
    10.1109/MEMSYS.2013.6474172
     
  2. Fabian Purkl, Tim English, Gary Yama, J Provine, Ashwin K. Samarao, Ando Feyh, Gary O'Brien, Oliver Ambacher, Roger T. Howe, and Thomas W. Kenny, "Sub-10 nanometer uncooled platinum bolometers via plasma enhanced atomic layer deposition," 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 185-188, 2013.
    10.1109/MEMSYS.2013.6474208
     
  3. M.A. Philippine, O. Sigmund, G.M. Rebeiz, and T.W. Kenny, "Topology optimization, or how to generate cutting-edge designs," Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 201, 2012.

     
  4. V.A. Hong, S. Yoneoka, M.W. Messana, A.B. Graham, J.C. Salvia, T.T. Branchflower, E.J. Ng, and T.W. Kenny, "High-stress fatigue experiments on single crystal silicon in an oxygen-free environment," Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2012, pp. 453-456, 2012.

     
  5. E.J. Ng, S. Wang, D. Buchman, C.-F. Chiang, T.W. Kenny, H. Muenzel, M. Fuertsch, J. Marek, U.M. Gomez, G. Yama, and G. O’Brien, "Ultra-stable epitaxial polysilicon resonators," Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2012, pp. 271-274, 2012.

     
  6. Chia-Fang Chiang, Andrew B. Graham, Eldwin J. Ng, Chae Hyuck Ahn, Gary J. O'Brien, and Thomas W. Kenny, "A novel, high-resolution resonant thermometer used for temperature compensation of a cofabricated pressure sensor," Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2012, pp. 54-57, 2012.

     
  7. Chia-Fang Chiang, Andrew B. Graham, Gary J. O'Brien, and Thomas W. Kenny, "A single process for building capacitive pressure sensors and timing references with precise control of released area using lateral etch stop," 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 519-522, 2012.
    10.1109/MEMSYS.2012.6170177
     
  8. Eldwin J. Ng, Hyung Kyu Lee, Chae Hyuck Ahn, Renata Melamud, and Thomas W. Kenny, "Stability measurements of silicon MEMS resonant thermometers," 2011 IEEE SENSORS Proceedings, pp. 1257-1260, 2011.
    10.1109/ICSENS.2011.6127252
     
  9. H.K. Lee, R. Melamud, S.A. Chandorkar, Y.Q. Qu, J.C. Salvia, B. Kim, M.A. Hopcroft, and T.W. Kenny, "Influence of the A-F effect on the temperature stability of silicon micromechanical resonators," 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, pp. 506-509, 2011.
    10.1109/TRANSDUCERS.2011.5969666
     
  10. H.K. Lee, P.A. Ward, A.E. Duwel, J.C. Salvia, Y.Q. Qu, R. Melamud, S.A. Chandorkar, M.A. Hopcroft, B. Kim, and T.W. Kenny, "Verification of the phase-noise model for MEMS oscillators operating in the nonlinear regime," 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, pp. 510-513, 2011.
    10.1109/TRANSDUCERS.2011.5969667
     
  11. Chia-Fang Chiang, Andrew B. Graham, Matthew W. Messana, J Provine, Daniela T. Buchman, Gary J. O'Brien, and Thomas W. Kenny, "Capacitive absolute pressure sensor with independent electrode and membrane sizes for improved fractional capacitance change," 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, pp. 894-897, 2011.
    10.1109/TRANSDUCERS.2011.5969187
     
  12. S. Wang, S. A. Chandorkar, A. B. Graham, M. W. Messana, J. Salvia, and T.W. Kenny, "Encapsulated mechanically coupled fully-differential breathe-mode ring filters with ultra-narrow bandwidth," 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, pp. 942-945, 2011.
    10.1109/TRANSDUCERS.2011.5969668
     
  13. S. Yoneoka, M. Liger, G. Yama, R. Schuster, F. Purkl, J Provine, F. B. Prinz, R. T. Howe, and T. W. Kenny, "ALD-metal uncooled bolometer," 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, pp. 676-679, 2011.
    10.1109/MEMSYS.2011.5734515
     
  14. Kristen P. Bloschock, Adam R. Schofield, and Thomas W. Kenny, "Tip-based nanofabrication: an approach to true nanotechnology," Proceedings of the SPIE, Vol. 8031, pp. 803102-803102, 2011.
    10.1117/12.887266
     
  15. G. Bahl, J. Salvia, H. K. Lee, R. Melamud, B. Kim, R.T. Howe, and T. W. Kenny, "Heterodyned electrostatic transduction oscillators evade low frequency noise aliasing," Proceedings of the 2010 Solid State Sensors and Actuators Workshop, Hilton Head, 2010.

     
  16. H.K. Lee, J. C. Salvia, S. Yoneoka, G. Bahl, Y.Q. Qu, R. Melamud, S. Chandorkar, M.A. Hopcroft, B. Kim, and T.W. Kenny, "Stable oscillation of MEMS resonators beyond the critical bifuracation point," Proceedings of the 2010 Solid State Sensors and Actuators Workshop, Hilton Head, pp. 70-73, 2010.

     
  17. M. W. Messana, A. B. Graham, S. Yoneoka, R. T. Howe, and T. W. Kenny, "Packaging of large lateral deflection MEMS using a combination of fusion bonding and epitaxial reactor sealing," Proceedings of the 2010 Solid State Sensors and Actuators Workshop, Hilton Head, pp. 336-339, 2010.

     
  18. M.A. Philippine, C.-F. Chiang, J. Salvia, C.M. Jha, S. Yoneoka, and T.W. Kenny, "Material distribution design for a piezoelectric energy harvester displaying geometric nonlinearity," Proceedings of the 2010 Solid State Sensors and Actuators Workshop, Hilton Head, pp. 451-454, 2010.

     
  19. Shingo Yoneoka, Yu Qiao Qu, Shasha Wang, Matthew W Messana, Andrew B Graham, James Salvia, Bongsang Kim, Renata Melamud, Gaurav Bahl, and Thomas W Kenny, "High-cyclic fatigue experiments of single crystal silicon in an oxygen-free environment," 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), pp. 224-227, 2010.
    10.1109/MEMSYS.2010.5442524
     
  20. Gaurav Bahl, James Salvia, Igor Bargatin, Shingo Yoneoka, Renata Melamud, Bongsang Kim, Saurabh Chandorkar, Matthew A. Hopcroft, Rajendar Bahl, Roger T. Howe, and Thomas W. Kenny, "Charge-drift elimination in resonant electrostatic MEMS," 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), pp. 108-111, 2010.
    10.1109/MEMSYS.2010.5442555
     
  21. Hyung Kyu Lee, James Salvia, Gaurav Bahl, Renata Melamud, Shingo Yoneoka, Yu Qiao Qu, Saurabh Chandorkar, Matthew A Hopcroft, Bongsang Kim, and Thomas W Kenny, "Influence of the temperature dependent A-f effect on the design and performance of oscillators," 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), pp. 699-702, 2010.
    10.1109/MEMSYS.2010.5442312
     
  22. Shasha Wang, Saurabh Chandorkar, James Salvia, Renata Melamud, Yu-Qiao Qu, Hyung Kyu Lee, and Thomas W. Kenny, "Nonlinearity of hermetically encapsulated high-Q double balanced breathe-mode ring resonator," 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), pp. 715-718, 2010.
    10.1109/MEMSYS.2010.5442308
     
  23. Hyung Kyu Lee, Shingo Yoneoka, Gaurav Bahl, James Salvia, Yu Qiao Qu, Renata Melamud, Saurabh Chandorkar, Bongsang Kim, Matthew A Hopcroft, and Thomas W Kenny, "A novel characterization method for temperature compensation of composite resonators," 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), pp. 743-746, 2010.
    10.1109/MEMSYS.2010.5442299
     
  24. Adam R. Schofield, Kristen P. Bloschock, and Thomas W. Kenny, "Tip-based nanofabrication: an approach to true nanotechnology," Proceedings of the SPIE, Vol. 7637, pp. 76371-76371, 2010.
    10.1117/12.852269
     
  25. J. Salvia , P. Lajevardi, M. Hekmat, and B. Murmann, "A 56M-Ohm CMOS TIA for MEMS applications," Proc. IEEE 2009 CICC, San Jose, CA, USA, pp. 199-202, 2009.

     
  26. Kevin A. Lohner, Yaniv D. Scherson, Brian W. Lariviere, Brian J. Cantwell, and T.W. Kenny, "A Monopropellant Gas Generator Based on N2O Decomposition for "Green" Propulsion and Power Applications," 45th AIAA/ASME/SAE/ASEE Joint Propulsion Conference & Exhibit, Denver, Colorado, 2009.

     
  27. C. S. Roper, R. Candler, S. Yoneoka, T. Kenny, R. T. Howe, and R. Maboudian, "Simultaneous wafer-scale vacuum encapsulation and microstructure cladding with LPCVD polycrystalline 3C-SiC," TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference, pp. 1031-1034, 2009.
    10.1109/SENSOR.2009.5285964
     
  28. Y.Q. Qu, R. Melamud, and T.W. Kenny, "Using encapsulated MEMS resonators to measure evolution in thin film stress," TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference, pp. 1138-1141, 2009.
    10.1109/SENSOR.2009.5285931
     
  29. Kuan-Lin Chen, Shasha Wang, James Salvia, Roger T. Howe, and Thomas W. Kenny, "Encapsulated out-of-plane differential square-plate resonator with integrated actuation electrodes," TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference, pp. 1421-1424, 2009.
    10.1109/SENSOR.2009.5285839
     
  30. Kuan-Lin Chen, S. Wang, T.W. Kenny, "Encapsulated out-of-plane differential square-plate resonator with integrated actuation electrodes," IMAPS International Conference and Exhibition on Device Packaging, 2009, Arizona, USA, 2009.

     
  31. J. Salvia, R. Melamud, S. Chandorkar, H.K. Lee, Y.Q. Qu, S.F. Lord, B. Murmann, and T.W. Kenny, "Phase Lock Loop based Temperature Compensation for MEMS Oscillators," 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems, pp. 661-664, 2009.
    10.1109/MEMSYS.2009.4805469
     
  32. A.B. Graham, M. Messana, P. Hartwell, J. Provine, S. Yoneoka, B. Kim, R. Melamud, R.T. Howe, and T.W. Kenny, "Wafer Scale Encapsulation of Large Lateral Deflection MEMS Structures," 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems, pp. 745-748, 2009.
    10.1109/MEMSYS.2009.4805490
     
  33. S. Yoneoka, G. Bahl, J. Salvia, K. L. Chen, A. B. Graham, H. K. Lee, G. Yama, R. N. Candler, and T. W. Kenny, "Acceleration Compensation of MEMS Resonators using Electrostatic Tuning," 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems, pp. 805-808, 2009.
    10.1109/MEMSYS.2009.4805505
     
  34. Kuan-Lin Chen, Hengky Chandrahalim, Andrew B. Graham, Sunil A. Bhave, Roger T. Howe, and Thomas W. Kenny, "Epitaxial Silicon Microshell Vacuum-Encapsulated CMOS-Compatible 200 MHz Bulk-Mode Resonator," 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems, pp. 23-26, 2009.
    10.1109/MEMSYS.2009.4805309
     
  35. Kuan-Lin Chen, Renata Melamud, Shasha Wang, and Thomas W. Kenny, "An Integrated Solution for Wafer-Level Packaging and Electrostatic Actuation of Out-of-Plane Devices," 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems, pp. 1071-1074, 2009.
    10.1109/MEMSYS.2009.4805572
     
  36. Kevin A. Lohner, Yaniv D. Scherson, Brian W. Lariviere, Brian J. Cantwell, and T.W. Kenny, "Nitrous Oxide Monopropellant Gas Generator Development," JANNAF / 3rd Spacecraft Propulsion Joint Subcommittee Meeting, Orlando, FL, 2008.

     
  37. J. Salvia, M. Messana, M. Ohline, M.A. Hopcroft, R. Melamud, S. Chandorkar, H.K. Lee, G. Bahl, B. Murmann, and T.W. Kenny, "Exploring the limits and practicality of Q-based temperature compensation for silicon resonators," 2008 IEEE International Electron Devices Meeting, pp. 1-4, 2008.
    10.1109/IEDM.2008.4796783
     
  38. S. A. Chandorkar, M. Agarwal, R. Melamud, R. N. Candler, K. E. Goodson, and T. W. Kenny, "Limits of quality factor in bulk-mode micromechanical resonators," 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems, pp. 74-77, 2008.
    10.1109/MEMSYS.2008.4443596
     
  39. Bongsang Kim, Rob N. Candler, Renata Melamud, Shingo Yoneoka, Hyung Kyu Lee, Gary Yama, and Thomas W. Kenny, "Identification and management of diffusion pathways in polysilicon encapsulation for MEMS devices," 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems, pp. 104-107, 2008.
    10.1109/MEMSYS.2008.4443603
     
  40. H. K. Lee, M. A. Hopcroft, R. Melamud, B. Kim, J. Salvia, S. Chandorkar, and T. W. Kenny, "Electrostatic-Tuning of Hermetically Encapsulated Composite Resonator," Solid-State Sensors, Actuators, and Microsystems Workshop, pp. 48-51, 2008.

     
  41. B. Kim, M. Hopcroft, C.M Jha, R. Melamud, S. Chandorkar, M. Agarwal, K. L. Chen, W. T. Park, R. Candler, G. Yama, A. Partridge, M. Lutz, and T. W. Kenny, "Using MEMS to Build the Device and the Package," TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference, pp. 331-334, 2007.
    10.1109/SENSOR.2007.4300135
     
  42. M.A. Hopcroft, H.K. Lee, B. Kim, R. Melamud, S. Chandorkar, M. Agarwal, C.M. Jha, J. Salvia, G. Bahl, H. Mehta, and T.W. Kenny, "A High-Stability MEMS Frequency Reference," TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference, pp. 1307-1309, 2007.
    10.1109/SENSOR.2007.4300378
     
  43. C. M. Jha, G. Bahl, R. Melamud, S. A. Chandorkar, M. A. Hopcroft, B. Kim, M. Agarwal, J. Salvia, H. Mehta, and T. W. Kenny, "Cmos-Compatible Dual-Resonator MEMS Temperature Sensor with Milli-Degree Accuracy," TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference, pp. 229-232, 2007.
    10.1109/SENSOR.2007.4300111
     
  44. Bongsang Kim, R. Melamud, M.A. Hopcroft, S.A. Chandorkar, G. Bahl, M. Messana, R.N. Candler, G. Yama, and T. Kenny, "Si-SiO2 Composite MEMS Resonators in CMOS Compatible Wafer-scale Thin-Film Encapsulation," 2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum, pp. 1214-1219, 2007.
    10.1109/FREQ.2007.4319270
     
  45. S. A. Chandorkar, H. Mehta, M. Agarwal, M.A. Hopcroft, C. M. Jha, R.N. Candler, G. Yama, G. Bahl, B. Kim, R. Melamud, K. E. Goodson, and T. W. Kenny, "Non-isothermal micromechanical resonators," 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 211-214, 2007.
    10.1109/MEMSYS.2007.4433138
     
  46. Renata Melamud, Bongsang Kim, Matthew A. Hopcroft, S. Chandorkar, M. Agarwal, C.M. Jha, and T.W. Kenny, "Composite flexural-mode resonator with controllable turnover temperature," 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 199-202, 2007.
    10.1109/MEMSYS.2007.4433054
     
  47. M. Agarwal, H. Mehta, R.N. Candler, S.A. Chandorkar, Bongsang Kim, M.A. Hopcroft, R. Melamud, G. Bahl, G. Yama, T.W. Kenny, and B. Murmann, "Impact of miniaturization on the current handling of electrostatic MEMS resonators," 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 783-786, 2007.
    10.1109/MEMSYS.2007.4433092
     
  48. Bongsang Kim, Matthew A. Hopcroft, Renata Melamud, Chandra M. Jha, Manu Agarwal, Saurabh A. Chandorkar, and Thomas W. Kenny, "CMOS Compatible Wafer-Scale Encapsulation MEMS Resonators," ASME 2007 InterPACK Conference, Volume 1, pp. 499-504, 2007.
    10.1115/IPACK2007-33234
     
  49. Manu Agarwal, Kwan Park, Rob Candler, Bongsang Kim, Matthew Hopcroft, Saurabh Chandorkar, Chandra Jha, Renata Melamud, Thomas Kenny, and Boris Murmann, "Nonlinear Characterization of Electrostatic MEMS Resonators," 2006 IEEE International Frequency Control Symposium and Exposition, pp. 209-212, 2006.
    10.1109/FREQ.2006.275380
     
  50. THOMAS W. KENNY, KENNETH E. GOODSON, JUAN G. SANTIAGO, EVELYN WANG, JAE-MO KOO, LINAN JIANG, ERIC POP, SANJIV SINHA, LIAN ZHANG, DAVID FOGG, SHUHUAI YAO, ROGER FLYNN, CHING-HSIANG CHANG, and CARLOS H. HIDROVO, "ADVANCED COOLING TECHNOLOGIES FOR MICROPROCESSORS," Frontiers in Electronics - Proceedings of the WOFE-04, pp. 301-313, 2006.
    10.1142/9789812773081_0016
     
  51. V. Ayanoor Vitikkate, K.-L. Chen, W.T. Park, T.W. Kenny, "Development of a process for wafer scale encapsulation of devices with very wide trenches," ASME IMECE, 2006.

     
  52. V. Ayanoor Vitikkate, K.-L. Chen, W.T. Park, G. Yama, T.W. Kenny, "Wafer Scale Encapsulation of Wide Gaps using oxidation of Sacrificial Beam," IEEE IEMT, 2006.

     
  53. R. Melamud, B. Kim, M. A. Hopcroft, S. Chandorkar, M. Agarwal, C. M. Jha, K. K. Park, and T. W. Kenny, "Composite Flexural Mode Resonator with Reduced Temperature Coefficient of Frequency," Solid-State Sensors, Actuators, and Microsystems Workshop, 2006.

     
  54. B. Kim, C.M. Jha, T. White, R.N. Candler, M. Hopcroft, M. Agarwal, K.K. Park, R. Melamud, S. Chandorkar, and T.W. Kenny, "Temperature Dependence of Quality Factor in MEMS Resonators," 19th IEEE International Conference on Micro Electro Mechanical Systems, pp. 590-593, 2006.
    10.1109/MEMSYS.2006.1627868
     
  55. M.A. Hopcroft, M. Agarwal, K.K. Park, B. Kim, C.M. Jha, R.N. Candler, G. Yama, B. Murmann, and T.W. Kenny, "Temperature Compensation of a MEMS Resonator Using Quality Factor as a Thermometer," 19th IEEE International Conference on Micro Electro Mechanical Systems, pp. 222-225, 2006.
    10.1109/MEMSYS.2006.1627776
     
  56. M. Agarwal, K.K. Park, M. Hopcroft, S. Chandorkar, R.N. Candler, B. Kim, R. Melamud, G. Yama, B. Murmann, and T.W. Kenny, "Effects of Mechanical Vibrations and Bias Voltage Noise on Phase Noise of MEMS Resonator Based Oscillators," 19th IEEE International Conference on Micro Electro Mechanical Systems, pp. 154-157, 2006.
    10.1109/MEMSYS.2006.1627759
     
  57. Chandra M. Jha, Matthew A. Hopcroft, Manu Agarwal, Saurabh A. Chandorkar, Rob N. Candler, Vijay Subramaniun, Renata Melamud, Suhrid Bhat, Bongsang Kim, Kwan K. Park, and Thomas W. Kenny, "In-Chip Device-Layer Thermal Isolation of MEMS Resonator for Lower Power Budget," Microelectromechanical Systems, Vol. 2006, No. 1, pp. 97-103, 2006.
    10.1115/IMECE2006-15176
     
  58. M. Agarwal, K. Park, R. Candler, M. Hopcroft, C. Jha, R. Melamud, B. Kim, B. Murmann, and T.W. Kenny, "Non-linearity cancellation in MEMS resonators for improved power-handling," IEEE InternationalElectron Devices Meeting, 2005. IEDM Technical Digest., pp. 286-289, 2005.
    10.1109/IEDM.2005.1609330
     
  59. A. Patridge, M. Lutz, B. Kim, M. Hopcroft, R. N. Candler, T. W. Kenny, K Petersen, M Esashi, "MEMS Resonators: Getting the Packaging Right," Semicon Japan, 2005.

     
  60. B. Kim, R. N. Candler, M. Hopcroft, M. Agarwal, W.-T. Park, T. W. Kenny, "Frequency Stability of Wafer-Scale Encapsulated MEMS Resonators," The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05., Vol. 2, pp. 1965-1968, 2005.

     
  61. R. Melamud, M. Hoperoft, C. Jha, Bongsang Kim, S. Chandorkar, R. Candler, and T.W. Kenny, "Effects of stress on the temperature coefficient of frequency in double clamped resonators," The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05., Vol. 1, No. 2, pp. 392-395, 2005.
    10.1109/SENSOR.2005.1496438
     
  62. R.N. Candler, M. Hopcroft, C.W. Low, S. Chandorkar, B. Kim, M. Varghese, A. Dowel, and T.W. Kenny, "Impact of slot location on thermoelastic dissipation in micromechanical resonators," The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05., Vol. 1, pp. 597-600, 2005.
    10.1109/SENSOR.2005.1496488
     
  63. R.N. Candler, Woo-Tae Park, M. Hopcroft, Bongsang Kim, and T.W. Kenny, "Hydrogen diffusion and pressure control of encapsulated MEMS resonators," The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05., Vol. 1, pp. 920-923, 2005.
    10.1109/SENSOR.2005.1496568
     
  64. W.T. Park, K.N. O'Connor, J.R. Mallon, T. Maetani, R.N. Candler, V. Ayanoor-Vitikkate, J. Roberson, S. Puria, and T.W. Kenny, "Sub-Millimeter Encapsulated Accelerometers : A Fully Implantable Sensor for Cochlear Implants," The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05., pp. 109-112, 2005.
    10.1109/SENSOR.2005.1496371
     
  65. M. Hopcroft, R. Melamud, R. N. Candler, W.-T. Park, B. Kim, G. Yama, A. Patridge, M. Lutz, and T. W. Kenny, "Active Temperature Compensation for Micromachined Resonator," IEEE Solid-State Sensor and Actuator Workshop 2004, 2004.

     
  66. Bongsang Kim, Rob N. Candler, Matthew Hopcroft, Manu Agarwal, Woo-Tae Park, Jeffrey T. Li, and Thomas Kenny, "Investigation of MEMS Resonator Characteristics for Long-Term and Wide Temperature Variation Operation," Microelectromechanical Systems, Vol. 2004, pp. 413-416, 2004.
    10.1115/IMECE2004-61727
     
  67. M. Hopcroft, R. Melamud, R.N. Candler, W-T. Park, B. Kim, G. Yama, A. Partridge, M. Lutz, and T.W. Kenny, "Active Temperature Compensation for Micromachined Resonators," Proceedings of the 2004 Solid State Sensors and Actuators Workshop, pp. 364-367, 2004.

     
  68. E.N. Wang, S. Devasenathipathy, C.H. Hidrovo, D.W. Fogg, J.M. Koo, J.G. Santiago. K.E. Goodson and T.W. Kenny, "A Quantitative Understanding of Transient Bubble Growth in Microchannelsusing PIV," Proceedings of the 2004 Solid State Sensors and Actuators Workshop, pp. 101-102, 2004.

     
  69. R.N. Candler, M. Hopcroft, WT. Park, S.A. Chandorkar, G. Yama, K.E. Goodson, M. Varghese, A.E. Duwel, A. Partridge, M. Lutz and T.W. Kenny, "Reduction in Thermoelastic Dissipation in Micromechanical Resonators by Disruption of Heat Transport," Proceedings of the 2004 Solid State Sensors and Actuators Workshop, pp. 45-48, 2004.

     
  70. Thomas W. Kenny, "Fundamental noise in MEMS force sensors," Proceedings of SPIE Conference on Noise and Information in Nanoelectronics, Sensors, and Standards II, Vol. 5472, pp. 143-151, 2004.
    10.1117/12.549814
     
  71. G. Upadhya, P. Zhou, K. Goodson, M. Munch, and T. Kenny, "Closed-loop cooling technologies for microprocessors," IEEE International Electron Devices Meeting 2003, pp. 324-324, 2003.
    10.1109/IEDM.2003.1269395
     
  72. Woo-Tae Park, Rob N. Candler, Huimou J. Li, Junghwa Cho, Holden Li, Thomas W. Kenny, Aaron Partridge, Gary Yama, and Markus Lutz, "Wafer Scale Encapsulation of MEMS Devices," 2003 International Electronic Packaging Technical Conference and Exhibition, Volume 1, pp. 209-212, 2003.
    10.1115/IPACK2003-35032
     
  73. W.-T. Park, R.N. Candler, S. Kronmueller, M. Lutz, A. Partridge, G. Yama, and T.W. Kenny, "Wafer-scale film encapsulation of micromachined accelerometers," TRANSDUCERS , pp. 1903-1906, 2003.
    10.1109/SENSOR.2003.1217163
     
  74. B.W. Chui, Y. Hishinuma, R. Budakian, H.J. Mamin, T.W. Kenny, and D. Rugar, "Mass-loaded cantilevers with suppressed higher-order modes for magnetic resonance force microscopy," TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664), pp. 1120-1123, 2003.
    10.1109/SENSOR.2003.1216966
     
  75. M.S. Bartsch, W. Federle, R.J. Full, and T.W. Kenny, "Small insect measurements using a custom MEMS force sensor," TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664), pp. 1039-1042, 2003.
    10.1109/SENSOR.2003.1216946
     
  76. R.N. Candler, H. Li, M. Lutz, W.-T. Park, A. Partridge, G. Yama, and T.W. Kenny, "Investigation of energy loss mechanisms in micromechanical resonators," TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664), Vol. 79, No. 8, pp. 332-335, 2003.
    10.1109/SENSOR.2003.1215320
     
  77. D.J. Laser, A.M. Myers, Shuhuai Yao, K.F. Bell, K.E. Goodson, J.G. Santiago, and T.W. Kenny, "Silicon electroosmotic micropumps for integrated circuit thermal management," TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664), pp. 151-154, 2003.
    10.1109/SENSOR.2003.1215275