Micro Structures & Sensors Lab
Kenny Group @ Stanford

Publications

Journal Publications

  1. Vu A. Hong, Shingo Yoneoka, Matthew W. Messana, Andrew B. Graham, James C. Salvia, Todd T. Branchflower, Eldwin J. Ng, and Thomas W. Kenny, "Fatigue Experiments on Single Crystal Silicon in an Oxygen-Free Environment," Journal of Microelectromechanical Systems, Jul 2014.
  2. Chae Hyuck Ahn, Eldwin J. Ng, Vu A. Hong, Yushi Yang, Brian J. Lee, Ian Flader, Thomas W. Kenny, "Mode-Matching of Wineglass Mode Disk Resonator Gyroscope in (100) Single Crystal Silicon," Journal of Microelectromechanical Systems, Jun 2014.
  3. Bo Woon Soon, Eldwin J. Ng, Vu A. Hong, Yushi Yang, Chae Hyuck Ahn, You Qian, Thomas W. Kenny, and Chengkuo Lee, "Fabrication and Characterization of a Vacuum Encapsulated Curved Beam Switch for Harsh Environment Application," Journal of Microelectromechanical Systems, Mar 2014.
  4. Eldwin J. Ng, Vu A. Hong, Yushi Yang, Chae Hyuck Ahn, Camille L. M. Everhart, and Thomas W. Kenny, "Temperature Dependence of the Elastic Constants of Doped Silicon," Journal of Microelectromechanical Systems, pp. 1-1, 2014.
  5. Mandy Axelle Philippine, Hosein Zareie, Ole Sigmund, Gabriel M. Rebeiz, and Thomas W. Kenny, "Experimental Validation of Topology Optimization for RF MEMS Capacitive Switch Design," Journal of Microelectromechanical Systems, Vol. 22, No. 6, pp. 1296-1309, Dec 2013.
  6. Shirin Ghaffari, Saurabh A. Chandorkar, Shasha Wang, Eldwin J. Ng, Chae H. Ahn, Vu Hong, Yushi Yang, and Thomas W. Kenny, "Quantum Limit of Quality Factor in Silicon Micro and Nano Mechanical Resonators," Scientific Reports, Vol. 3, Nov 2013.
  7. M. Li, E. J. Ng, V. A. Hong, C. H. Ahn, Y. Yang, T. W. Kenny, and D. A. Horsley, "Lorentz force magnetometer using a micromechanical oscillator," Applied Physics Letters, Vol. 103, No. 17, pp. 173504, Oct 2013.
  8. Shirin Ghaffari, Chae H. Ahn, Eldwin J. Ng, Shasha Wang, and Thomas W. Kenny, "Crystallographic effects in modeling fundamental behavior of MEMS silicon resonators," Microelectronics Journal, Vol. 44, No. 7, pp. 586-591, Jul 2013.
  9. Eldwin J. Ng, Hyung Kyu Lee, Chae Hyuck Ahn, Renata Melamud, and Thomas W. Kenny, "Stability of Silicon Microelectromechanical Systems Resonant Thermometers," IEEE Sensors Journal, Vol. 13, No. 3, pp. 987-993, Mar 2013.
  10. Mandy A. Philippine, Ole Sigmund, Gabriel M. Rebeiz, and Thomas W. Kenny, "Topology Optimization of Stressed Capacitive RF MEMS Switches," Journal of Microelectromechanical Systems, Vol. 22, No. 1, pp. 206-215, Feb 2013.
  11. Hyung Kyu Lee, Renata Melamud, Bongsang Kim, Saurabh Chandorkar, James C. Salvia, and Thomas W. Kenny, "The effect of the temperature-dependent nonlinearities on the temperature stability of micromechanical resonators," Journal of Applied Physics, Vol. 114, No. 15, pp. 153513, 2013.
  12. Shirin Ghaffari and Thomas W. Kenny, "Thermoelastic Dissipation in Composite Silicon MEMS Resonators with Thin Film Silicon Dioxide Coating," MRS Proceedings, Vol. 1426, May 2012.
  13. Yoonjin Won, Yuan Gao, Matthew A. Panzer, Senyo Dogbe, Lawrence Pan, Thomas W. Kenny, and Kenneth E. Goodson, "Mechanical characterization of aligned multi-walled carbon nanotube films using microfabricated resonators," Carbon, Vol. 50, No. 2, pp. 347-355, Feb 2012.
  14. Shingo Yoneoka, Jaeho Lee, Matthieu Liger, Gary Yama, Takashi Kodama, Marika Gunji, J. Provine, Roger T. Howe, Kenneth E. Goodson, and Thomas W. Kenny, "Electrical and Thermal Conduction in Atomic Layer Deposition Nanobridges Down to 7 nm Thickness," Nano Letters, Vol. 12, No. 2, pp. 683-686, Feb 2012.
  15. Yoonjin Won, Jaeho Lee, Mehdi Asheghi, Thomas W. Kenny, and Kenneth E. Goodson, "Phase and thickness dependent modulus of Ge2Sb2Te5 films down to 25 nm thickness," Applied Physics Letters, Vol. 100, No. 16, pp. 161905, 2012.
  16. Hyung Kyu Lee, Renata Melamud, Bongsang Kim, Matthew A. Hopcroft, James C. Salvia, and Thomas W. Kenny, "Electrostatic Tuning to Achieve Higher Stability Microelectromechanical Composite Resonators," Journal of Microelectromechanical Systems, Vol. 20, No. 6, pp. 1355-1365, Dec 2011.
  17. Hyung Kyu Lee, Renata Melamud, Saurabh Chandorkar, James Salvia, Shingo Yoneoka, and Thomas W. Kenny, "Stable Operation of MEMS Oscillators Far Above the Critical Vibration Amplitude in the Nonlinear Regime," Journal of Microelectromechanical Systems, Vol. 20, No. 6, pp. 1228-1230, Dec 2011.
  18. Gaurav Bahl, James C. Salvia, Renata Melamud, Bongsang Kim, Roger T. Howe, and Thomas W. Kenny, "AC Polarization for Charge-Drift Elimination in Resonant Electrostatic MEMS and Oscillators," Journal of Microelectromechanical Systems, Vol. 20, No. 2, pp. 355-364, Apr 2011.
  19. Kuan-Lin Chen, Shasha Wang, James C. Salvia, Renata Melamud, Roger T. Howe, and Thomas W. Kenny, "Wafer-Level Epitaxial Silicon Packaging for Out-of-Plane RF MEMS Resonators With Integrated Actuation Electrodes," IEEE Transactions on Components, Packaging and Manufacturing Technology, Vol. 1, No. 3, pp. 310-317, Mar 2011.
  20. G. C. Hill, D. R. Soto, A. M. Peattie, R. J. Full, and T. W. Kenny, "Orientation angle and the adhesion of single gecko setae," Journal of The Royal Society Interface, Vol. 8, No. 60, pp. 926-933, Feb 2011.
  21. Hyung Kyu Lee, Bongsang Kim, Renata Melamud, Matthew A. Hopcroft, James C. Salvia, and Thomas W. Kenny, "Influence of the temperature dependent nonlinearities on the performance of micromechanical resonators," Applied Physics Letters, Vol. 99, No. 19, pp. 194102, 2011.
  22. Shingo Yoneoka, James C. Salvia, Gaurav Bahl, Renata Melamud, Saurabh A. Chandorkar, and Thomas W. Kenny, "Active Electrostatic Compensation of Micromechanical Resonators Under Random Vibrations," Journal of Microelectromechanical Systems, Vol. 19, No. 5, pp. 1270-1272, Oct 2010.
  23. Matthew A. Hopcroft, William D. Nix, and Thomas W. Kenny, "What is the Young's Modulus of Silicon?," Journal of Microelectromechanical Systems, Vol. 19, No. 2, pp. 229-238, Apr 2010.
  24. Shingo Yoneoka, Christopher S. Roper, Robert N. Candler, Saurabh A. Chandorkar, Andrew B. Graham, J. Provine, Roya Maboudian, Roger T. Howe, and Thomas W. Kenny, "Characterization of Encapsulated Micromechanical Resonators Sealed and Coated With Polycrystalline SiC," Journal of Microelectromechanical Systems, Vol. 19, No. 2, pp. 357-366, Apr 2010.
  25. James C. Salvia, Renata Melamud, Saurabh A. Chandorkar, Scott F. Lord, and Thomas W. Kenny, "Real-Time Temperature Compensation of MEMS Oscillators Using an Integrated Micro-Oven and a Phase-Locked Loop," Journal of Microelectromechanical Systems, Vol. 19, No. 1, pp. 192-201, Feb 2010.
  26. Andrew B. Graham, Matthew W. Messana, Peter G. Hartwell, J. Provine, Shingo Yoneoka, Renata Melamud, Bongsang Kim, Roger T. Howe, and Thomas W. Kenny, "A Method for Wafer-Scale Encapsulation of Large Lateral Deflection MEMS Devices," Journal of Microelectromechanical Systems, Vol. 19, No. 1, pp. 28-37, Feb 2010.
  27. Gaurav Bahl, Renata Melamud, Bongsang Kim, Saurabh A. Chandorkar, James C. Salvia, Matthew A. Hopcroft, David Elata, Robert G. Hennessy, Rob N. Candler, Roger T. Howe, and Thomas W. Kenny, "Model and Observations of Dielectric Charge in Thermally Oxidized Silicon Resonators," Journal of Microelectromechanical Systems, Vol. 19, No. 1, pp. 162-174, Feb 2010.
  28. Daniel Soto, Ginel Hill, Aaron Parness, Noé Esparza, Mark Cutkosky, and Tom Kenny, "Effect of fibril shape on adhesive properties," Applied Physics Letters, Vol. 97, No. 5, pp. 53701, 2010.
  29. R. Melamud, S.A. Chandorkar, Bongsang Kim, Hyung Kyu Lee, J.C. Salvia, G. Bahl, M.A. Hopcroft, and T.W. Kenny, "Temperature-Insensitive Composite Micromechanical Resonators," Journal of Microelectromechanical Systems, Vol. 18, No. 6, pp. 1409-1419, Dec 2009.
  30. Kuan-Lin Chen, J. Salvia, R. Potter, R.T. Howe, and T.W. Kenny, "Performance Evaluation and Equivalent Model of Silicon Interconnects for Fully-Encapsulated RF MEMS Devices," IEEE Transactions on Advanced Packaging, Vol. 32, No. 2, pp. 402-409, May 2009.
  31. Bongsang Kim, Rob N. Candler, Renata Melamud, Matthew A. Hopcroft, Shingo Yoneoka, Hyung Kyu Lee, Manu Agarwal, Saurabh A. Chandorkar, Gary Yama, and Thomas W. Kenny, "Hermeticity and diffusion investigation in polysilicon film encapsulation for microelectromechanical systems," Journal of Applied Physics, Vol. 105, No. 1, pp. 13514, 2009.
  32. Bongsang Kim, Matthew A. Hopcroft, Rob N. Candler, Chandra Mohan Jha, Manu Agarwal, Renata Melamud, Saurabh A. Chandorkar, Gary Yama, and Thomas W. Kenny, "Temperature Dependence of Quality Factor in MEMS Resonators," Journal of Microelectromechanical Systems, Vol. 17, No. 3, pp. 755-766, Jun 2008.
  33. C.M. Jha, M.A. Hopcroft, S.A. Chandorkar, J.C. Salvia, M. Agarwal, R.N. Candler, R. Melamud, Bongsang Kim, and T.W. Kenny, "Thermal Isolation of Encapsulated MEMS Resonators," Journal of Microelectromechanical Systems, Vol. 17, No. 1, pp. 175-184, Feb 2008.
  34. C. M. Jha, J. Salvia, S. A. Chandorkar, R. Melamud, E. Kuhl, and T. W. Kenny, "Acceleration insensitive encapsulated silicon microresonator," Applied Physics Letters, Vol. 93, No. 23, pp. 234103, 2008.
  35. Manu Agarwal, Saurabh A. Chandorkar, Harsh Mehta, Robert N. Candler, Bongsang Kim, Matthew A. Hopcroft, Renata Melamud, Chandra M. Jha, Gaurav Bahl, Gary Yama, Thomas W. Kenny, and Boris Murmann, "A study of electrostatic force nonlinearities in resonant microstructures," Applied Physics Letters, Vol. 92, No. 10, pp. 104106, 2008.
  36. Woo-Tae Park, Kevin N. O’Connor, Kuan-Lin Chen, Joseph R. Mallon, Toshiki Maetani, Parmita Dalal, Rob N. Candler, Vipin Ayanoor-Vitikkate, Joseph B. Roberson, Sunil Puria, and Thomas W. Kenny, "Ultraminiature encapsulated accelerometers as a fully implantable sensor for implantable hearing aids," Biomedical Microdevices, Vol. 9, No. 6, pp. 939-949, Jun 2007.
  37. Bongsang Kim, Rob N. Candler, Matthew A. Hopcroft, Manu Agarwal, Woo-Tae Park, and Thomas W. Kenny, "Frequency stability of wafer-scale film encapsulated silicon based MEMS resonators," Sensors and Actuators A: Physical, Vol. 136, No. 1, pp. 125-131, May 2007.
  38. Manu Agarwal, Harsh Mehta, Robert N. Candler, Saurabh A. Chandorkar, Bongsang Kim, Matthew A. Hopcroft, Renata Melamud, Gaurav Bahl, Gary Yama, Thomas W. Kenny, and Boris Murmann, "Scaling of amplitude-frequency-dependence nonlinearities in electrostatically transduced microresonators," Journal of Applied Physics, Vol. 102, No. 7, pp. 74903, 2007.
  39. C. M. Jha, G. Bahl, R. Melamud, S. A. Chandorkar, M. A. Hopcroft, B. Kim, M. Agarwal, J. Salvia, H. Mehta, and T. W. Kenny, "High resolution microresonator-based digital temperature sensor," Applied Physics Letters, Vol. 91, No. 7, pp. 74101, 2007.
  40. Renata Melamud, Bongsang Kim, Saurabh A. Chandorkar, Matthew A. Hopcroft, Manu Agarwal, Chandra M. Jha, and Thomas W. Kenny, "Temperature-compensated high-stability silicon resonators," Applied Physics Letters, Vol. 90, No. 24, pp. 244107, 2007.
  41. M. A. Hopcroft, B. Kim, S. Chandorkar, R. Melamud, M. Agarwal, C. M. Jha, G. Bahl, J. Salvia, H. Mehta, H. K. Lee, R. N. Candler, and T. W. Kenny, "Using the temperature dependence of resonator quality factor as a thermometer," Applied Physics Letters, Vol. 91, No. 1, pp. 13505, 2007.
  42. Manu Agarwal, Kwan K. Park, Saurabh A. Chandorkar, Rob N. Candler, Bongsang Kim, Matthew A. Hopcroft, Renata Melamud, Thomas W. Kenny, and Boris Murmann, "Acceleration sensitivity in beam-type electrostatic microresonators," Applied Physics Letters, Vol. 90, No. 1, pp. 14103, 2007.
  43. Rob N. Candler, Matthew A. Hopcroft, Bongsang Kim, Woo-Tae Park, Renata Melamud, Manu Agarwal, Gary Yama, Aaron Partridge, Markus Lutz, and Thomas W. Kenny, "Long-Term and Accelerated Life Testing of a Novel Single-Wafer Vacuum Encapsulation for MEMS Resonators," Journal of Microelectromechanical Systems, Vol. 15, No. 6, pp. 1446-1456, Dec 2006.
  44. Amy Duwel, Rob N. Candler, Thomas W. Kenny, and Mathew Varghese, "Engineering MEMS Resonators With Low Thermoelastic Damping," Journal of Microelectromechanical Systems, Vol. 15, No. 6, pp. 1437-1445, Dec 2006.
  45. R.N. Candler, A. Duwel, M. Varghese, S.A. Chandorkar, M.A. Hopcroft, W.-T. Park, B. Kim, G. Yama, A. Partridge, M. Lutz, and T.W. Kenny, "Impact of Geometry on Thermoelastic Dissipation in Micromechanical Resonant Beams," Journal of Microelectromechanical Systems, Vol. 15, No. 4, pp. 927-934, Aug 2006.
  46. W.-T. Park, A. Partridge, R.N. Candler, V. Ayanoor-Vitikkate, G. Yama, M. Lutz, and T.W. Kenny, "Encapsulated Submillimeter Piezoresistive Accelerometers," Journal of Microelectromechanical Systems, Vol. 15, No. 3, pp. 507-514, Jun 2006.
  47. Carlos H. Hidrovo, Theresa A. Kramer, Evelyn N. Wang, Sébastien Vigneron, Julie E. Steinbrenner, Jae-Mo Koo, Fu-Min Wang, David W. Fogg, Roger D. Flynn, Eon Soo Lee, Ching-Hsiang Cheng, Thomas W. Kenny, John K. Eaton, and Kenneth E. Goodson, "Two-Phase Microfluidics for Semiconductor Circuits and Fuel Cells," Heat Transfer Engineering, Vol. 27, No. 4, pp. 53-63, May 2006.
  48. Evelyn N. Wang, Shankar Devasenathipathy, Hao Lin, Carlos H. Hidrovo, Juan G. Santiago, Kenneth E. Goodson, and Thomas W. Kenny, "A hybrid method for bubble geometry reconstruction in two-phase microchannels," Experiments in Fluids, Vol. 40, No. 6, pp. 847-858, Mar 2006.
  49. Manu Agarwal, Saurabh A. Chandorkar, Rob N. Candler, Bongsang Kim, Matthew A. Hopcroft, Renata Melamud, Chandra M. Jha, Thomas W. Kenny, and Boris Murmann, "Optimal drive condition for nonlinearity reduction in electrostatic microresonators," Applied Physics Letters, Vol. 89, No. 21, pp. 214105, 2006.
  50. A. Patridge, J. McDonald, and B. Kim, "Silicon MEMS Oscillators to Replace Quartz Crystals," Electronic Science (in Korean), Vol. 564, pp. 149-152, 2006.
  51. Lian Zhang, Evelyn N. Wang, Kenneth E. Goodson, and Thomas W. Kenny, "Phase change phenomena in silicon microchannels," International Journal of Heat and Mass Transfer, Vol. 48, No. 8, pp. 1572-1582, Apr 2005.
  52. E.N. Wang, L. Zhang, L. Jiang, J.-M. Koo, J.G. Maveety, E.A. Sanchez, K.E. Goodson, and T.W. Kenny, "Micromachined Jets for Liquid Impingement Cooling of VLSI Chips," Journal of Microelectromechanical Systems, Vol. 13, No. 5, pp. 833-842, Oct 2004.
  53. Emily D. Renuart, Alissa M. Fitzgerald, Thomas W. Kenny, and Reinhold H. Dauskardt, "Fatigue crack growth in micro-machined single-crystal silicon," Journal of Materials Research, Vol. 19, No. 9, pp. 2635-2640, Mar 2004.
  54. Evelyn N. Wang, Shankar Devasenathipathy, Juan G. Santiago, Kenneth E. Goodson, and Thomas W. Kenny, "Nucleation and Growth of Vapor Bubbles in a Heated Silicon Microchannel," Journal of Heat Transfer, Vol. 126, No. 4, pp. 497, 2004.
  55. William P. King, Thomas W. Kenny, and Kenneth E. Goodson, "Comparison of thermal and piezoresistive sensing approaches for atomic force microscopy topography measurements," Applied Physics Letters, Vol. 85, No. 11, pp. 2086, 2004.
  56. R.N. Candler, Woo-Tae Park, Huimou Li, G. Yama, A. Partridge, M. Lutz, and T.W. Kenny, "Single wafer encapsulation of mems devices," IEEE Transactions on Advanced Packaging, Vol. 26, No. 3, pp. 227-232, Aug 2003.
  57. J.P. Lynch, A. Sundararajan, K.H. Law, A.S. Kiremidjian, T. Kenny and E. Carryer, "Embedment of structural monitoring algorithms in a wireless sensing unit," Structural Engineering and Mechanics, Vol. 15, No. 3, pp. 285-297, Feb 2003.
  58. Jerome P. Lynch, Aaron Partridge, Kincho H. Law, Thomas W. Kenny, Anne S. Kiremidjian, and Ed Carryer, "Design of Piezoresistive MEMS-Based Accelerometer for Integration with Wireless Sensing Unit for Structural Monitoring," Journal of Aerospace Engineering, Vol. 16, No. 3, pp. 108, 2003.
  59. Yoshikazu Hishinuma, Theodore H. Geballe, Boris Y. Moyzhes, and Thomas W. Kenny, "Measurements of cooling by room-temperature thermionic emission across a nanometer gap," Journal of Applied Physics, Vol. 94, No. 7, pp. 4690, 2003.
  60. Y. Hishinuma, T. H. Geballe, B. Y. Moyzhes, and T. W. Kenny, "Refrigeration by combined tunneling and thermionic emission in vacuum: Use of nanometer scale design," Applied Physics Letters, Vol. 78, No. 17, pp. 2572, 2001.

Conference Publications

  1. J. Lake, Y.-H. Hwang, E. Ng, C.-H. Ahn, V. Hong, Y. Yang, Y. Dai, and R. Candler, "Experimental Validation of 3D Intuitive Modeling Approach for Anchor Loss in MEMS Resonators," Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2014, pp. 277-280, Jun 2014.
  2. C.L. Roozeboom, B.E. Hill, V.A. Hong, C.H. Ahn, E.J. Ng, Y. Yang, M.A. Hopcroft, and B.L. Pruitt, "Multifunctional Integrated Sensor Monitoring," Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2014, pp. 447-448, Jun 2014.
  3. Yushi Yang, Eldwin J. Ng, Vu A. Hong, Chae Hyuck Ahn, Yunhan Chen, Elia Ahadi, Mark Dykman, and Thomas W. Kenny, "Measurement of the nonlinear elasticity of doped bulk-mode MEMS resonators," Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2014, pp. 285-288, Jun 2014.
  4. M. Li, S. Sonmezoglu, E.J. Ng, V.A. Hong, C.H. Ahn, Y. Yang, T.W. Kenny, and D.A. Horsley, "Lorentz force magnetometer with quadratrue frequency modulation," Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2014, pp. 52-55, Jun 2014.
  5. T.S. English, F. Purkl, A. Daus, J Provine, Y. Won, G. Yama, A. Feyh, G. O’Brien, K.E. Goodson, O. Ambacher, and T.W. Kenny, "Atomic layer deposited platinum as a sensor material: uniformity, 1/f noise, and Young's modulus," Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2014, pp. 44-47, Jun 2014.
  6. J. Stehle, V.A. Hong, A. Feyh, G.J. O’Brien, G. Yama, O. Ambacher, B. Kim, and T.W. Kenny, "Silicon migration of through-holes in single- and poly-crystalline silicon membranes," Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2014, pp. 32-35, Jun 2014.
  7. Eldwin J. Ng, Yushi Yang, Yunhan Chen, and Thomas W. Kenny, "An etch hole-free process for temperature-compensated, high Q, encapsulated resonators," Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2014, pp. 99-100, Jun 2014.
  8. Rodriguez, Chen, Sheppard, Qu, Brunhaver, "Exploring Entrepreneurial Characteristics and Experiences of Engineering Alumni," American Society for Engineering Education, 2014, Apr 2014.
  9. S. Nitzan, T-H. Su, C. Ahn, E. Ng, V. Hong, Y. Yang, T. Kenny, and D. A. Horsley, "Impact of gyroscope operation above the critical bifurcation threshold on scale factor and bias instability," 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 749-752, Jan 2014.
  10. David B. Heinz, Vu A. Hong, Eldwin J. Ng, Chae Hyuck Ahn, Yushi Yang, and Thomas W. Kenny, "Characterization of stiction forces in ultra-clean encapsulated MEMS devices," 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 588-591, Jan 2014.
  11. C. L. Roozeboom, V. A. Hong, C. H. Ahn, E. J. Ng, Y. Yang, B. E. Hill, M. A. Hopcroft, and B. L. Pruitt, "Multifunctional integrated sensor in A 2×2 mm epitaxial sealed chip operating in a wireless sensor node," 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 773-776, Jan 2014.
  12. Mo Li, Eldwin J. Ng, Vu A. Hong, Chae H. Ahn, Yushi Yang, Thomas W. Kenny, and David A. Horsley, "Single-structure 3-axis lorentz force magnetometer with sub-30 nT/√HZ resolution," 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 80-83, Jan 2014.
  13. D. Senkal, S. Askari, M. J. Ahamed, E. J. Ng, V. Hong, Y. Yang, C. H. Ahn, T. W. Kenny, and A. M. Shkel, "100K Q-factor toroidal ring gyroscope implemented in wafer-level epitaxial silicon encapsulation process," 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 24-27, Jan 2014.
  14. E. J. Ng, Y. Yang,V. A. Hong, C. H. Ahn, D. L. Christensen, B. A. Gibson, K. R. Qalandar, K. L. Turner, T. W. Kenny, "Stable Pull-In Electrodes for Narrow Gap Actuation," IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2014, pp. 1281-1284, Jan 2014.
  15. E. J. Ng, K. L. Harrison, C. L. Everhart, V. A. Hong, Y. Yang, C. H. Ahn, D. B. Heinz, R. T. Howe and T. W. Kenny, "Stable Charge-Biased Capacitive Resonators with Encapsulated Switches," IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2014, pp. 1277-1280, Jan 2014.
  16. J. Lake, E. Ng, C.-H. Ahn, V. Hong, Y. Yang, J. Wong, and R. Candler, "Particle swarm optimization for design of MEMS resonators with low thermoelastic dissipation," 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), pp. 1456-1459, Jun 2013.
  17. Fabian Purkl, Timothy S. English, Gary Yama, John Provine, Ashwin K. Samarao, Ando Feyh, Bongsang Kim, Gary O'Brien, Oliver Ambacher, Roger T. Howe, and Thomas W. Kenny, "Serpentine geometry for enhanced performance of nanometer-thin platinum bolometers," 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), pp. 1507-1510, Jun 2013.
  18. Y. Yang, E. J. Ng, C. H. Ahn, V. A. Hong, E. Ahadi, and T. W. Kenny, "Mechanical coupling of dual breathe-mode ring resonator," 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), pp. 502-505, Jun 2013.
  19. M. A. Philippine, H. Zareie, O. Sigmund, G. M. Rebeiz, and T. W. Kenny, "Topology optimized RF MEMS switches," 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), pp. 2477-2480, Jun 2013.
  20. V. A. Hong, B. J. Lee, D. L. Christensen, D. B. Heinz, E. J. Ng, C. H. Ahn, Y. Yang, and T. W. Kenny, "X-Y and Z-axis capacitive accelerometers packaged in an ultra-clean hermetic environment," 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), pp. 618-621, Jun 2013.
  21. E. J. Ng, C.-F. Chiang, Y. Yang, V. A. Hong, C. H. Ahn, and T. W. Kenny, "Ultra-high aspect ratio trenches in single crystal silicon with epitaxial gap tuning," 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), pp. 182-185, Jun 2013.
  22. E. J. Ng, C. H. Ahn, Y. Yang, V. A. Hong, C.-F. Chiang, E. Ahadi, M. W. Ward, and T. W. Kenny, "Localized, degenerately doped epitaxial silicon for temperature compensation of resonant MEMS systems," 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), pp. 2419-2422, Jun 2013.
  23. C. H. Ahn, E. J. Ng, V. A. Hong, Y. Yang, B. J. Lee, M. W. Ward, and T. W. Kenny, "Geometric compensation of (100) single crystal silicon disk resonating gyroscope for mode-matching," 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), pp. 1723-1726, Jun 2013.
  24. D. L. Christensen, C. H. Ahn, V. A. Hong, E. J. Ng, Y. Yang, B. J. Lee, and T. W. Kenny, "Hermetically encapsulated differential resonant accelerometer," 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), pp. 606-609, Jun 2013.
  25. S. Nitzan, C. H. Ahn, T.-H. Su, M. Li, E. J. Ng, S. Wang, Z. M. Yang, G. O'Brien, B. E. Boser, T. W. Kenny, and D. A. Horsley, "Epitaxially-encapsulated polysilicon disk resonator gyroscope," 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 625-628, Jan 2013.
  26. Chia-Fang Chiang, Andrew B. Graham, Brian J. Lee, Chae Hyuck Ahn, Eldwin J. Ng, Gary J. O'Brien, and Thomas W. Kenny, "Resonant pressure sensor with on-chip temperature and strain sensors for error correction," 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 45-48, Jan 2013.
  27. Fabian Purkl, Tim English, Gary Yama, J Provine, Ashwin K. Samarao, Ando Feyh, Gary O'Brien, Oliver Ambacher, Roger T. Howe, and Thomas W. Kenny, "Sub-10 nanometer uncooled platinum bolometers via plasma enhanced atomic layer deposition," 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 185-188, Jan 2013.
  28. M.A. Philippine, O. Sigmund, G.M. Rebeiz, and T.W. Kenny, "Topology optimization, or how to generate cutting-edge designs," Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2012, Jun 2012.
  29. V. A. Hong, S. Yoneoka, M. W. Messana, A. B. Graham, J. C. Salvia, T. T. Branchflower, E. J. Ng, and T. W. Kenny, "High-stress fatigue experiments on single crystal silicon in an oxygen-free environment," Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2012, pp. 453-456, Jun 2012.
  30. E.J. Ng, S. Wang, D. Buchman, C.-F. Chiang, T.W. Kenny, H. Muenzel, M. Fuertsch, J. Marek, U.M. Gomez, G. Yama, and G. O’Brien, "Ultra-stable epitaxial polysilicon resonators," Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2012, pp. 271-274, Jun 2012.
  31. Chia-Fang Chiang, Andrew B. Graham, Eldwin J. Ng, Chae Hyuck Ahn, Gary J. O'Brien, and Thomas W. Kenny, "A novel, high-resolution resonant thermometer used for temperature compensation of a cofabricated pressure sensor," Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2012, pp. 54-57, Jun 2012.
  32. Chia-Fang Chiang, Andrew B. Graham, Gary J. O'Brien, and Thomas W. Kenny, "A single process for building capacitive pressure sensors and timing references with precise control of released area using lateral etch stop," 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 519-522, Jan 2012.
  33. Eldwin J. Ng, Hyung Kyu Lee, Chae Hyuck Ahn, Renata Melamud, and Thomas W. Kenny, "Stability measurements of silicon MEMS resonant thermometers," 2011 IEEE SENSORS Proceedings, pp. 1257-1260, Oct 2011.
  34. H.K. Lee, R. Melamud, S.A. Chandorkar, Y.Q. Qu, J.C. Salvia, B. Kim, M.A. Hopcroft, and T.W. Kenny, "Influence of the A-F effect on the temperature stability of silicon micromechanical resonators," 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, pp. 506-509, Jun 2011.
  35. H.K. Lee, P.A. Ward, A.E. Duwel, J.C. Salvia, Y.Q. Qu, R. Melamud, S.A. Chandorkar, M.A. Hopcroft, B. Kim, and T.W. Kenny, "Verification of the phase-noise model for MEMS oscillators operating in the nonlinear regime," 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, pp. 510-513, Jun 2011.
  36. Chia-Fang Chiang, Andrew B. Graham, Matthew W. Messana, J Provine, Daniela T. Buchman, Gary J. O'Brien, and Thomas W. Kenny, "Capacitive absolute pressure sensor with independent electrode and membrane sizes for improved fractional capacitance change," 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, pp. 894-897, Jun 2011.
  37. S. Wang, S. A. Chandorkar, A. B. Graham, M. W. Messana, J. Salvia, and T.W. Kenny, "Encapsulated mechanically coupled fully-differential breathe-mode ring filters with ultra-narrow bandwidth," 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, pp. 942-945, Jun 2011.
  38. S. Yoneoka, M. Liger, G. Yama, R. Schuster, F. Purkl, J Provine, F. B. Prinz, R. T. Howe, and T. W. Kenny, "ALD-metal uncooled bolometer," 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, pp. 676-679, Jan 2011.
  39. Kristen P. Bloschock, Adam R. Schofield, and Thomas W. Kenny, "Tip-based nanofabrication: an approach to true nanotechnology," Proceedings of the SPIE, Vol. 8031, pp. 803102-803102, 2011.
  40. G. Bahl, J. Salvia, H. K. Lee, R. Melamud, B. Kim, R.T. Howe, and T. W. Kenny, "Heterodyned electrostatic transduction oscillators evade low frequency noise aliasing," Proceedings of the 2010 Solid State Sensors and Actuators Workshop, Hilton Head, Jun 2010.
  41. H.K. Lee, J. C. Salvia, S. Yoneoka, G. Bahl, Y.Q. Qu, R. Melamud, S. Chandorkar, M.A. Hopcroft, B. Kim, and T.W. Kenny, "Stable oscillation of MEMS resonators beyond the critical bifuracation point," Proceedings of the 2010 Solid State Sensors and Actuators Workshop, Hilton Head, pp. 70-73, Jun 2010.
  42. M. W. Messana, A. B. Graham, S. Yoneoka, R. T. Howe, and T. W. Kenny, "Packaging of large lateral deflection MEMS using a combination of fusion bonding and epitaxial reactor sealing," Proceedings of the 2010 Solid State Sensors and Actuators Workshop, Hilton Head, pp. 336-339, Jun 2010.
  43. M.A. Philippine, C.-F. Chiang, J. Salvia, C.M. Jha, S. Yoneoka, and T.W. Kenny, "Material distribution design for a piezoelectric energy harvester displaying geometric nonlinearity," Proceedings of the 2010 Solid State Sensors and Actuators Workshop, Hilton Head, pp. 451-454, Jun 2010.
  44. Shingo Yoneoka, Yu Qiao Qu, Shasha Wang, Matthew W Messana, Andrew B Graham, James Salvia, Bongsang Kim, Renata Melamud, Gaurav Bahl, and Thomas W Kenny, "High-cyclic fatigue experiments of single crystal silicon in an oxygen-free environment," 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), pp. 224-227, Jan 2010.
  45. Gaurav Bahl, James Salvia, Igor Bargatin, Shingo Yoneoka, Renata Melamud, Bongsang Kim, Saurabh Chandorkar, Matthew A. Hopcroft, Rajendar Bahl, Roger T. Howe, and Thomas W. Kenny, "Charge-drift elimination in resonant electrostatic MEMS," 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), pp. 108-111, Jan 2010.
  46. Hyung Kyu Lee, James Salvia, Gaurav Bahl, Renata Melamud, Shingo Yoneoka, Yu Qiao Qu, Saurabh Chandorkar, Matthew A Hopcroft, Bongsang Kim, and Thomas W Kenny, "Influence of the temperature dependent A-f effect on the design and performance of oscillators," 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), pp. 699-702, Jan 2010.
  47. Shasha Wang, Saurabh Chandorkar, James Salvia, Renata Melamud, Yu-Qiao Qu, Hyung Kyu Lee, and Thomas W. Kenny, "Nonlinearity of hermetically encapsulated high-Q double balanced breathe-mode ring resonator," 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), pp. 715-718, Jan 2010.
  48. Hyung Kyu Lee, Shingo Yoneoka, Gaurav Bahl, James Salvia, Yu Qiao Qu, Renata Melamud, Saurabh Chandorkar, Bongsang Kim, Matthew A Hopcroft, and Thomas W Kenny, "A novel characterization method for temperature compensation of composite resonators," 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), pp. 743-746, Jan 2010.
  49. Adam R. Schofield, Kristen P. Bloschock, and Thomas W. Kenny, "Tip-based nanofabrication: an approach to true nanotechnology," Proceedings of the SPIE, Vol. 7637, pp. 76371-76371, 2010.
  50. J. Salvia , P. Lajevardi, M. Hekmat, and B. Murmann, "A 56M-Ohm CMOS TIA for MEMS applications," Proc. IEEE 2009 CICC, San Jose, CA, USA, pp. 199-202, Sep 2009.
  51. Kevin A. Lohner, Yaniv D. Scherson, Brian W. Lariviere, Brian J. Cantwell, and T.W. Kenny, "A Monopropellant Gas Generator Based on N2O Decomposition for "Green" Propulsion and Power Applications," 45th AIAA/ASME/SAE/ASEE Joint Propulsion Conference & Exhibit, Denver, Colorado, Aug 2009.
  52. C. S. Roper, R. Candler, S. Yoneoka, T. Kenny, R. T. Howe, and R. Maboudian, "Simultaneous wafer-scale vacuum encapsulation and microstructure cladding with LPCVD polycrystalline 3C-SiC," TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference, pp. 1031-1034, Jun 2009.
  53. Y.Q. Qu, R. Melamud, and T.W. Kenny, "Using encapsulated MEMS resonators to measure evolution in thin film stress," TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference, pp. 1138-1141, Jun 2009.
  54. Kuan-Lin Chen, Shasha Wang, James Salvia, Roger T. Howe, and Thomas W. Kenny, "Encapsulated out-of-plane differential square-plate resonator with integrated actuation electrodes," TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference, pp. 1421-1424, Jun 2009.
  55. Kuan-Lin Chen, S. Wang, T.W. Kenny, "Encapsulated out-of-plane differential square-plate resonator with integrated actuation electrodes," IMAPS International Conference and Exhibition on Device Packaging, 2009, Arizona, USA, Mar 2009.
  56. J. Salvia, R. Melamud, S. Chandorkar, H.K. Lee, Y.Q. Qu, S.F. Lord, B. Murmann, and T.W. Kenny, "Phase Lock Loop based Temperature Compensation for MEMS Oscillators," 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems, pp. 661-664, Jan 2009.
  57. A.B. Graham, M. Messana, P. Hartwell, J. Provine, S. Yoneoka, B. Kim, R. Melamud, R.T. Howe, and T.W. Kenny, "Wafer Scale Encapsulation of Large Lateral Deflection MEMS Structures," 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems, pp. 745-748, Jan 2009.
  58. S. Yoneoka, G. Bahl, J. Salvia, K. L. Chen, A. B. Graham, H. K. Lee, G. Yama, R. N. Candler, and T. W. Kenny, "Acceleration Compensation of MEMS Resonators using Electrostatic Tuning," 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems, pp. 805-808, Jan 2009.
  59. Kuan-Lin Chen, Hengky Chandrahalim, Andrew B. Graham, Sunil A. Bhave, Roger T. Howe, and Thomas W. Kenny, "Epitaxial Silicon Microshell Vacuum-Encapsulated CMOS-Compatible 200 MHz Bulk-Mode Resonator," 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems, pp. 23-26, Jan 2009.
  60. Kuan-Lin Chen, Renata Melamud, Shasha Wang, and Thomas W. Kenny, "An Integrated Solution for Wafer-Level Packaging and Electrostatic Actuation of Out-of-Plane Devices," 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems, pp. 1071-1074, Jan 2009.
  61. Kevin A. Lohner, Yaniv D. Scherson, Brian W. Lariviere, Brian J. Cantwell, and T.W. Kenny, "Nitrous Oxide Monopropellant Gas Generator Development," JANNAF / 3rd Spacecraft Propulsion Joint Subcommittee Meeting, Orlando, FL, Dec 2008.
  62. J. Salvia, M. Messana, M. Ohline, M.A. Hopcroft, R. Melamud, S. Chandorkar, H.K. Lee, G. Bahl, B. Murmann, and T.W. Kenny, "Exploring the limits and practicality of Q-based temperature compensation for silicon resonators," 2008 IEEE International Electron Devices Meeting, pp. 1-4, Dec 2008.
  63. S. A. Chandorkar, M. Agarwal, R. Melamud, R. N. Candler, K. E. Goodson, and T. W. Kenny, "Limits of quality factor in bulk-mode micromechanical resonators," 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems, pp. 74-77, Jan 2008.
  64. Bongsang Kim, Rob N. Candler, Renata Melamud, Shingo Yoneoka, Hyung Kyu Lee, Gary Yama, and Thomas W. Kenny, "Identification and management of diffusion pathways in polysilicon encapsulation for MEMS devices," 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems, pp. 104-107, Jan 2008.
  65. H. K. Lee, M. A. Hopcroft, R. Melamud, B. Kim, J. Salvia, S. Chandorkar, and T. W. Kenny, "Electrostatic-Tuning of Hermetically Encapsulated Composite Resonator," Solid-State Sensors, Actuators, and Microsystems Workshop, pp. 48-51, 2008.
  66. B. Kim, M. Hopcroft, C.M Jha, R. Melamud, S. Chandorkar, M. Agarwal, K. L. Chen, W. T. Park, R. Candler, G. Yama, A. Partridge, M. Lutz, and T. W. Kenny, "Using MEMS to Build the Device and the Package," TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference, pp. 331-334, Jun 2007.
  67. M.A. Hopcroft, H.K. Lee, B. Kim, R. Melamud, S. Chandorkar, M. Agarwal, C.M. Jha, J. Salvia, G. Bahl, H. Mehta, and T.W. Kenny, "A High-Stability MEMS Frequency Reference," TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference, pp. 1307-1309, Jun 2007.
  68. C. M. Jha, G. Bahl, R. Melamud, S. A. Chandorkar, M. A. Hopcroft, B. Kim, M. Agarwal, J. Salvia, H. Mehta, and T. W. Kenny, "Cmos-Compatible Dual-Resonator MEMS Temperature Sensor with Milli-Degree Accuracy," TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference, pp. 229-232, Jun 2007.
  69. Bongsang Kim, R. Melamud, M.A. Hopcroft, S.A. Chandorkar, G. Bahl, M. Messana, R.N. Candler, G. Yama, and T. Kenny, "Si-SiO2 Composite MEMS Resonators in CMOS Compatible Wafer-scale Thin-Film Encapsulation," 2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum, pp. 1214-1219, May 2007.
  70. S. A. Chandorkar, H. Mehta, M. Agarwal, M.A. Hopcroft, C. M. Jha, R.N. Candler, G. Yama, G. Bahl, B. Kim, R. Melamud, K. E. Goodson, and T. W. Kenny, "Non-isothermal micromechanical resonators," 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 211-214, Jan 2007.
  71. Renata Melamud, Bongsang Kim, Matthew A. Hopcroft, S. Chandorkar, M. Agarwal, C.M. Jha, and T.W. Kenny, "Composite flexural-mode resonator with controllable turnover temperature," 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 199-202, Jan 2007.
  72. M. Agarwal, H. Mehta, R.N. Candler, S.A. Chandorkar, Bongsang Kim, M.A. Hopcroft, R. Melamud, G. Bahl, G. Yama, T.W. Kenny, and B. Murmann, "Impact of miniaturization on the current handling of electrostatic MEMS resonators," 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 783-786, Jan 2007.
  73. Bongsang Kim, Matthew A. Hopcroft, Renata Melamud, Chandra M. Jha, Manu Agarwal, Saurabh A. Chandorkar, and Thomas W. Kenny, "CMOS Compatible Wafer-Scale Encapsulation MEMS Resonators," ASME 2007 InterPACK Conference, Volume 1, pp. 499-504, 2007.
  74. Manu Agarwal, Kwan Park, Rob Candler, Bongsang Kim, Matthew Hopcroft, Saurabh Chandorkar, Chandra Jha, Renata Melamud, Thomas Kenny, and Boris Murmann, "Nonlinear Characterization of Electrostatic MEMS Resonators," 2006 IEEE International Frequency Control Symposium and Exposition, pp. 209-212, Jun 2006.
  75. THOMAS W. KENNY, KENNETH E. GOODSON, JUAN G. SANTIAGO, EVELYN WANG, JAE-MO KOO, LINAN JIANG, ERIC POP, SANJIV SINHA, LIAN ZHANG, DAVID FOGG, SHUHUAI YAO, ROGER FLYNN, CHING-HSIANG CHANG, and CARLOS H. HIDROVO, "ADVANCED COOLING TECHNOLOGIES FOR MICROPROCESSORS," Frontiers in Electronics - Proceedings of the WOFE-04, pp. 301-313, 2006.
  76. V. Ayanoor Vitikkate, K.-L. Chen, W.T. Park, T.W. Kenny, "Development of a process for wafer scale encapsulation of devices with very wide trenches," ASME IMECE, 2006.
  77. V. Ayanoor Vitikkate, K.-L. Chen, W.T. Park, G. Yama, T.W. Kenny, "Wafer Scale Encapsulation of Wide Gaps using oxidation of Sacrificial Beam," IEEE IEMT, 2006.
  78. R. Melamud, B. Kim, M. A. Hopcroft, S. Chandorkar, M. Agarwal, C. M. Jha, K. K. Park, and T. W. Kenny, "Composite Flexural Mode Resonator with Reduced Temperature Coefficient of Frequency," Solid-State Sensors, Actuators, and Microsystems Workshop, 2006.
  79. B. Kim, C.M. Jha, T. White, R.N. Candler, M. Hopcroft, M. Agarwal, K.K. Park, R. Melamud, S. Chandorkar, and T.W. Kenny, "Temperature Dependence of Quality Factor in MEMS Resonators," 19th IEEE International Conference on Micro Electro Mechanical Systems, pp. 590-593, 2006.
  80. M.A. Hopcroft, M. Agarwal, K.K. Park, B. Kim, C.M. Jha, R.N. Candler, G. Yama, B. Murmann, and T.W. Kenny, "Temperature Compensation of a MEMS Resonator Using Quality Factor as a Thermometer," 19th IEEE International Conference on Micro Electro Mechanical Systems, pp. 222-225, 2006.
  81. M. Agarwal, K.K. Park, M. Hopcroft, S. Chandorkar, R.N. Candler, B. Kim, R. Melamud, G. Yama, B. Murmann, and T.W. Kenny, "Effects of Mechanical Vibrations and Bias Voltage Noise on Phase Noise of MEMS Resonator Based Oscillators," 19th IEEE International Conference on Micro Electro Mechanical Systems, pp. 154-157, 2006.
  82. Chandra M. Jha, Matthew A. Hopcroft, Manu Agarwal, Saurabh A. Chandorkar, Rob N. Candler, Vijay Subramaniun, Renata Melamud, Suhrid Bhat, Bongsang Kim, Kwan K. Park, and Thomas W. Kenny, "In-Chip Device-Layer Thermal Isolation of MEMS Resonator for Lower Power Budget," Microelectromechanical Systems, Vol. 2006, No. 1, pp. 97-103, 2006.
  83. M. Agarwal, K. Park, R. Candler, M. Hopcroft, C. Jha, R. Melamud, B. Kim, B. Murmann, and T.W. Kenny, "Non-linearity cancellation in MEMS resonators for improved power-handling," IEEE InternationalElectron Devices Meeting, 2005. IEDM Technical Digest., pp. 286-289, 2005.
  84. A. Patridge, M. Lutz, B. Kim, M. Hopcroft, R. N. Candler, T. W. Kenny, K Petersen, M Esashi, "MEMS Resonators: Getting the Packaging Right," Semicon Japan, 2005.
  85. B. Kim, R. N. Candler, M. Hopcroft, M. Agarwal, W.-T. Park, T. W. Kenny, "Frequency Stability of Wafer-Scale Encapsulated MEMS Resonators," The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05., Vol. 2, pp. 1965-1968, 2005.
  86. R. Melamud, M. Hoperoft, C. Jha, Bongsang Kim, S. Chandorkar, R. Candler, and T.W. Kenny, "Effects of stress on the temperature coefficient of frequency in double clamped resonators," The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05., Vol. 1, No. 2, pp. 392-395, 2005.
  87. R.N. Candler, M. Hopcroft, C.W. Low, S. Chandorkar, B. Kim, M. Varghese, A. Dowel, and T.W. Kenny, "Impact of slot location on thermoelastic dissipation in micromechanical resonators," The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05., Vol. 1, pp. 597-600, 2005.
  88. R.N. Candler, Woo-Tae Park, M. Hopcroft, Bongsang Kim, and T.W. Kenny, "Hydrogen diffusion and pressure control of encapsulated MEMS resonators," The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05., Vol. 1, pp. 920-923, 2005.
  89. W.T. Park, K.N. O'Connor, J.R. Mallon, T. Maetani, R.N. Candler, V. Ayanoor-Vitikkate, J. Roberson, S. Puria, and T.W. Kenny, "Sub-Millimeter Encapsulated Accelerometers : A Fully Implantable Sensor for Cochlear Implants," The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05., pp. 109-112, 2005.
  90. M. Hopcroft, R. Melamud, R. N. Candler, W.-T. Park, B. Kim, G. Yama, A. Patridge, M. Lutz, and T. W. Kenny, "Active Temperature Compensation for Micromachined Resonator," IEEE Solid-State Sensor and Actuator Workshop 2004, Jun 2004.
  91. Bongsang Kim, Rob N. Candler, Matthew Hopcroft, Manu Agarwal, Woo-Tae Park, Jeffrey T. Li, and Thomas Kenny, "Investigation of MEMS Resonator Characteristics for Long-Term and Wide Temperature Variation Operation," Microelectromechanical Systems, Vol. 2004, pp. 413-416, 2004.
  92. M. Hopcroft, R. Melamud, R.N. Candler, W-T. Park, B. Kim, G. Yama, A. Partridge, M. Lutz, and T.W. Kenny, "Active Temperature Compensation for Micromachined Resonators," Proceedings of the 2004 Solid State Sensors and Actuators Workshop, pp. 364-367, 2004.
  93. E.N. Wang, S. Devasenathipathy, C.H. Hidrovo, D.W. Fogg, J.M. Koo, J.G. Santiago. K.E. Goodson and T.W. Kenny, "A Quantitative Understanding of Transient Bubble Growth in Microchannelsusing PIV," Proceedings of the 2004 Solid State Sensors and Actuators Workshop, pp. 101-102, 2004.
  94. R.N. Candler, M. Hopcroft, WT. Park, S.A. Chandorkar, G. Yama, K.E. Goodson, M. Varghese, A.E. Duwel, A. Partridge, M. Lutz and T.W. Kenny, "Reduction in Thermoelastic Dissipation in Micromechanical Resonators by Disruption of Heat Transport," Proceedings of the 2004 Solid State Sensors and Actuators Workshop, pp. 45-48, 2004.
  95. Thomas W. Kenny, "Fundamental noise in MEMS force sensors," Proceedings of SPIE Conference on Noise and Information in Nanoelectronics, Sensors, and Standards II, Vol. 5472, pp. 143-151, 2004.
  96. G. Upadhya, P. Zhou, K. Goodson, M. Munch, and T. Kenny, "Closed-loop cooling technologies for microprocessors," IEEE International Electron Devices Meeting 2003, pp. 324-324, 2003.
  97. Woo-Tae Park, Rob N. Candler, Huimou J. Li, Junghwa Cho, Holden Li, Thomas W. Kenny, Aaron Partridge, Gary Yama, and Markus Lutz, "Wafer Scale Encapsulation of MEMS Devices," 2003 International Electronic Packaging Technical Conference and Exhibition, Volume 1, pp. 209-212, 2003.
  98. W.-T. Park, R.N. Candler, S. Kronmueller, M. Lutz, A. Partridge, G. Yama, and T.W. Kenny, "Wafer-scale film encapsulation of micromachined accelerometers," TRANSDUCERS , pp. 1903-1906, 2003.
  99. B.W. Chui, Y. Hishinuma, R. Budakian, H.J. Mamin, T.W. Kenny, and D. Rugar, "Mass-loaded cantilevers with suppressed higher-order modes for magnetic resonance force microscopy," TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664), pp. 1120-1123, 2003.
  100. M.S. Bartsch, W. Federle, R.J. Full, and T.W. Kenny, "Small insect measurements using a custom MEMS force sensor," TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664), pp. 1039-1042, 2003.
  101. R.N. Candler, H. Li, M. Lutz, W.-T. Park, A. Partridge, G. Yama, and T.W. Kenny, "Investigation of energy loss mechanisms in micromechanical resonators," TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664), Vol. 79, No. 8, pp. 332-335, 2003.
  102. D.J. Laser, A.M. Myers, Shuhuai Yao, K.F. Bell, K.E. Goodson, J.G. Santiago, and T.W. Kenny, "Silicon electroosmotic micropumps for integrated circuit thermal management," TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664), pp. 151-154, 2003.