Hyo Jin K. Kim, Kirsten E. Kaplan, Peter Schindler, Shicheng Xu, Martin M. Winterkorn, David B. Heinz, Timothy S. English, J. Provine, Fritz B. Prinz and Thomas W. Kenny, "Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition", ACS Appl. Mater. Interfaces, ASAP, 2019
J. Provine, Peter Schindler, Yongmin Kim, Steve P. Walch, Hyo Jin Kim, Ki-Hyun Kim and Fritz B. Prinz, "Correlation of film density and wet etch rate in hydrofluoric acid of plasma enhanced atomic layer deposited silicon nitride", AIP Advances, 6, 065012, 2016
Yongmin Kim, J. Provine, Stephen P. Walch, Joonsuk Park, Witchukorn Phuthong, Anup L. Dadlani, Hyo-Jin Kim, Peter Schindler, Kihyun Kim, and Fritz B. Prinz, "Plasma-Enhanced Atomic Layer Deposition of SiN–AlN Composites for Ultra Low Wet Etch Rates in Hydrofluoric Acid", ACS Appl. Mater. Interfaces, 8, 27, 2016
J Provine, Peter Schindler, Jan Torgersen, Hyo Jin Kim, Hans-Peter Karnthaler and Fritz B. Prinz, "Atomic layer deposition by reaction of molecular oxygen with tetrakisdimethylamido-metal precursors", J. Vac. Sci. Technol. A, 34, 2016