Micro Structures & Sensors Lab
Kenny Group @ Stanford

Karen Hyo Jin Kim


PhD Candidate

karenhjkim :at: mems.stanford.edu
440 Escondido Mall, Bldg 530 Rm 224, Stanford, CA 94305, USA
Advisor: Thomas W. Kenny

Research

Thermal Accelerometer / Thin Film Deposition

Education

Stanford University
(2013- present) PhD Candidate in Mechanical Engineering

ChungAng University
(2009- 2013) B.S in Mechanical Engineering

Experience



Publications

Journal
J. Provine, Peter Schindler, Yongmin Kim, Steve P. Walch, Hyo Jin Kim, Ki-Hyun Kim and Fritz B. Prinz, "Correlation of film density and wet etch rate in hydrofluoric acid of plasma enhanced atomic layer deposited silicon nitride", AIP Advances, 6, 065012, 2016
Journal
Yongmin Kim, J. Provine, Stephen P. Walch, Joonsuk Park, Witchukorn Phuthong, Anup L. Dadlani, Hyo-Jin Kim, Peter Schindler, Kihyun Kim, and Fritz B. Prinz, "Plasma-Enhanced Atomic Layer Deposition of SiN–AlN Composites for Ultra Low Wet Etch Rates in Hydrofluoric Acid", ACS Appl. Mater. Interfaces, 8, 27, 2016
Journal
J Provine, Peter Schindler, Jan Torgersen, Hyo Jin Kim, Hans-Peter Karnthaler and Fritz B. Prinz, "Atomic layer deposition by reaction of molecular oxygen with tetrakisdimethylamido-metal precursors", J. Vac. Sci. Technol. A, 34, 2016