Ian B. Flader, Yunhan Chen, Yushi Yang, Eldwin J. Ng, Dongsuk D. Shin, David B. Heinz,
Lizmarie Comenencia Ortiz, Anne L. Alter, Woosung Park, Kenneth E. Goodson, and Thomas W. Kenny, "Micro-Tethering for Fabrication of Encapsulated Inertial Sensors With High Sensitivity," Journal of Microelectromechanical Systems, Vol. 28, No. 3, pp. 372-381, Jun 2019.