A variety of piezoresistive cantilevers.

Publications

Here are PDF downloads of my publications from graduate school, and one from Agilent.

Thesis: Advances in Piezoresistive Probes for Atomic Force Microscopy

JMEMS:  1/f Noise Considerations for the Design and Process Optimization of Piezoresistive Cantilevers

APL:  High Sensitivity Piezoresistive Cantilevers under 1000 Angstroms Thick

ASME:  Design of Resonant Beam Transducers:  An Axial Force Probe for Atomic Force Microscopy

Transducers: A High-Performance Dipole Surface Drive for Large Travel and Force