Micro Structures & Sensors Lab
Kenny Group @ Stanford

Dongsuk (Daniel) Shin


ddshin :at: mems.stanford.edu

Advisor:

Research



Education



Experience



Publications

Conference
James M.L. Miller, Anne L. Alter, Nicholas E. Bousse, Yunhan Chen, Ian B. Flader, Dongsuk D. Shin, Thomas W. Kenny, Steven W. Shaw, "Influence of clamping loss and electrical damping on nonlinear dissipation in micromechanical resonators," 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 507-510, Jan 2022.
Journal
James M. L. Miller, Ariosto Gomez-Franco, Dongsuk D. Shin, Hyun-Keun Kwon, and Thomas W. Kenny, "Amplitude stabilization of micromechanical oscillators using engineered nonlinearity," Physical Review Research, Vol. 3, pp. 33268, Sep 2021.
Journal
James M. L. Miller, Haoshen Zhu, Subramanian Sundaram, Gabrielle D. Vukasin, Yunhan Chen, Ian B. Flader, Dongsuk D. Shin, and Thomas W. Kenny, "Limits to Thermal-Piezoresistive Cooling in Silicon Micromechanical Resonators," Journal of Microelectromechanical Systems, Vol. 29, No. 5, pp. 677-684, Oct 2020.
Journal
Zohreh Mohammadi, Toni L. Heugel, James M. L. Miller, Dongsuk D. Shin, Hyun-Keun Kwon, Thomas W. Kenny, Ramasubramanian Chitra, Oded Zilberberg, and Luis Guillermo Villanueva, "On the effect of linear feedback and parametric pumping on a resonator's frequency stability," New Journal of Physics, Vol. 22, pp. 93049, Sep 2020.
Journal
James M. L. Miller, Dongsuk D. Shin, Hyun-Keun Kwon, Steven W. Shaw, and Thomas W. Kenny, "Spectral narrowing of parametrically pumped thermomechanical noise," Applied Physics Letters, Vol. 117, pp. 33504, Jul 2020.
Journal
Anne L. Alter, Ian B. Flader, Yunhan Chen, Lizmarie Comenencia Ortiz, Dongsuk D. Shin, and Thomas W. Kenny, "Characterization of Accelerated Fatigue in Thick Epi-Polysilicon Vacuum Encapsulated MEMS Resonators," Journal of Microelectromechanical Systems, pp. 1-10, 2020.
Journal
Anne L. Alter, Ian B. Flader, Yunhan Chen, Dongsuk D. Shin, and Thomas W. Kenny, "Nonlinear Dissipation in Epitaxial SCS and Polysilicon MEMS Driven at Large Amplitudes," Journal of Microelectromechanical Systems, pp. 1-3, 2020.
Journal
Gabrielle D. Vukasin, Veronica K. Sanchez, Janna Glaze, Nicholas E. Bousse, Nathan Bissel, Dongsuk D. Shin, Hyun-Keun Kwon, David Heinz, Ernest T.-T. Yen, and Thomas W. Kenny, "Anchor Design Affects Dominant Energy Loss Mechanism in a Lamé Mode MEM Resonator," Journal of Microelectromechanical Systems, pp. 1-7, 2020.
Journal
Lizmarie Comenencia Ortiz, Hyun-Keun Kwon, Janna Rodriguez, Yunhan Chen, Gabrielle D. Vukasin, David B. Heinz, Dongsuk D. Shin, and Thomas W. Kenny, "Low-Power Dual Mode MEMS Resonators With PPB Stability Over Temperature," Journal of Microelectromechanical Systems, pp. 1-12, 2020.
Journal
James M. L. Miller, Dongsuk D. Shin, Hyun-Keun Kwon, Steven W. Shaw, and Thomas W. Kenny, "Phase control of self-excited parametric resonators," Physical Review Applied, Vol. 12, No. 4, pp. 44053, Oct 2019.
Conference
Hyun-Keun Kwon, Lizmarie Comenencia Ortiz, Gabrielle D. Vukasin, Yunhan Chen, Dongsuk D. Shin and Thomas W. Kenny, "AN OVEN-CONTROLLED MEMS OSCILLATOR (OCMO) WITH SUB 10MW, ± 1.5 PPB STABILITY OVER TEMPERATURE," Transducers 2019 - EUROSENSORS XXXIII, pp. 2072-2075, Jun 2019.
Conference
Saisneha Koppaka, Anne L. Alter, Gabrielle D. Vukasin, Dongsuk D. Shin, Ian B. Flader, Yunhan Chen, and Thomas W. Kenny, "NONLINEARITY OF DEGENERATELY DOPED FLEXURAL MODE SILICON MICROMECHANICAL RESONATORS," Transducers 2019 - EUROSENSORS XXXIII, pp. 1897-1900, Jun 2019.
Conference
Anne L. Alter, Gabrielle D. Vukasin, Ian B. Flader, Hyo Jin Kim, Yunhan Chen, Daniel D. Shin, and Thomas W. Kenny, "EXPERIMENTALLY OBSERVED NONLINEAR DISSIPATION LINKED TO CONTRIBUTIONS FROM GAS DAMPING AND TED IN MEMS FLEXURAL MODE RESONATORS," Transducers 2019 - EUROSENSORS XXXIII, pp. 2095-2098, Jun 2019.
Conference
James M. L. Miller, Nicholas E. Bousse, Dongsuk D. Shin, Hyun-Keun Kwon, and Thomas W. Kenny, "SIGNAL ENHANCEMENT IN MEM RESONANT SENSORS USING PARAMETRIC SUPPRESSION," Transducers 2019 - EUROSENSORS XXXIII, pp. 881-884, Jun 2019.
Journal
Ian B. Flader, Yunhan Chen, Yushi Yang, Eldwin J. Ng, Dongsuk D. Shin, David B. Heinz, Lizmarie Comenencia Ortiz, Anne L. Alter, Woosung Park, Kenneth E. Goodson, and Thomas W. Kenny, "Micro-Tethering for Fabrication of Encapsulated Inertial Sensors With High Sensitivity," Journal of Microelectromechanical Systems, Vol. 28, No. 3, pp. 372-381, Jun 2019.
Conference
I. P. Prikhodko, J. A. Gregory, D. Shin, R. Kwon, T. W. Kenny and M. W. Judy, "Psuedo-Extensional Mode MEMS Ring Gyroscope," The 6th IEEE International Symposium on Inertial Sensors & Systems, pp. 167-170, Apr 2019.
Journal
James M. Lehto Miller, Azadeh Ansari, David B. Heinz, Yunhan Chen, Ian B. Flader, Dongsuk D. Shin, L. Guillermo Villanueva, and Thomas W. Kenny, "Effective Quality Factor Tuning Mechanisms in Micromechanical Resonators," Applied Physics Reviews, Vol. 5, pp. 41307, Dec 2018.
Journal
James M. Lehto Miller, Haoshen Zhu, David B. Heinz, Yunhan Chen, Ian B. Flader, Dongsuk D. Shin, Joshua E.-Y. Lee, and Thomas W. Kenny, "Thermal-Piezoresistive Tuning of the Effective Quality Factor of a Micromechanical Resonator," Physical Review Applied, Vol. 10, No. 4, pp. 1-10, Oct 2018.
Conference
Hyun-Keun Kwon, David B. Heinz, Dongsuk D. Shin, Yunhan Chen, Lizmarie C. Ortiz, Gabrielle D. Vukasin, and Thomas W. Kenny, "PRECISE LOCAL TEMPERATURE MEASUREMENT OF FULLY ENCAPSULATED OVENIZED MEMS DEVICES," Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2018, pp. 358-361, Jun 2018.
Conference
Yusheng Wang, Yu-Wei Lin, Janna Rodriguez, Gabrielle D. Vukasin, Dongsuk D. Shin, Hyun-Keun Kwon, David B. Heinz, Yunhan Chen, Dustin D. Gerrard, Thomas W. Kenny, and Andrei M. Shkel, "ON DECOUPLED QUANTIFICATION OF ENERGY DISSIPATION MECHANISMS IN TOROIDAL RING GYROSCOPES," Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2018, pp. 318-321, Jun 2018.
Conference
James M. Lehto Miller, Azadeh Ansari, David B. Heinz, Yunhan Chen, Ian B. Flader, Dongsuk D. Shin, L. Guillermo Villanueva, and Thomas W. Kenny, "WHAT IS EFFECTIVE QUALITY FACTOR?," Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2018, pp. 240-241, Jun 2018.
Conference
Lizmarie Comenencia Ortiz, Dustin D. Gerrard, Ian B. Flader, Gabrielle D. Vukasin, David B. Heinz, Janna Rodriguez, Saisneha Koppaka, Dongsuk D. Shin, Hyun-Keun Kwon, Saurabh Chandorkar, and Thomas W. Kenny, "ENHANCING MICRO-OVEN POWER AND STIFFNESS IN ENCAPSULATED DEVICES FOR TIMING REFERENCE APPLICATIONS," Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2018, pp. 214-217, Jun 2018.
Conference
Anne L. Alter, Ian B. Flader, Yunhan Chen, Lizmarie Comenencia Ortiz, Dongsuk D. Shin, David B. Heinz, and Thomas W. Kenny, "FIRST FATIGUE MEASUREMENTS ON THICK EPI-POLYSILICON MEMS IN ULTRA-CLEAN ENVIRONMENT," Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2018, pp. 132-135, Jun 2018.
Conference
Lizmarie Comenencia Ortiz, Hyun-Keun Kwon, Janna Rodriguez, David B. Heinz, Yunhan Chen, Gabrielle D. Vukasin, Dongsuk D. Shin and Thomas W. Kenny, "A NEW LOW POWER MEMS DUAL MODE CLOCK WITH PPB STABILITY OVER TEMPERATURE," Solid-State Sensors, Actuators and Microsystems Workshop 2018, pp. 90-91, Jun 2018.
Journal
Lizmarie Comenencia Ortiz, David B. Heinz, Ian B. Flader, Anne L. Alter, Dongsuk D. Shin, Yunhan Chen, and Thomas W. Kenny, "Assessing failure in epitaxially encapsulated micro-scale sensors using micro and nano x-ray computed tomography," MRS Communications, pp. 1-8, Apr 2018.
Conference
Kirsten E. Kaplan, Martin M. Winterkorn, Camille L.M. Everhart, Dongsuk D. Shin, Gary J. O'Brien, Fritz B. Prinz, and Thomas W. Kenny, "Active temperature compensation of thermal accelerometer for improved stability," 2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), pp. 1-2, Mar 2018.
Conference
Dongsuk D. Shin, David B. Heinz, Hyun-Keun Kwon, Yunhan Chen, and Thomas W. Kenny, "Lateral diffusion doping of silicon for temperature compensation of MEMS resonators," 2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), pp. 1-4, Mar 2018.
Conference
Dongsuk D. Shin, Yunhan Chen, Ian B. Flader, and Thomas W. Kenny, "Temperature compensation of resonant accelerometer via nonlinear operation," 2018 IEEE 31st International Conference on Micro Electro Mechanical Systems (MEMS), pp. 1012-1015, Jan 2018.
Conference
Verena Maiwald, Ian B. Flader, Michelle Müller, Yunhan Chen, Silvan Plüss, Dongsuk D. Shin, Cosmin Roman, David B. Heinz, Thomas W. Kenny, and Christofer Hierold, "Experimental fractal-like instability bands in a resonant silicon-silicon contact pull-in vibration detector," 2018 IEEE 31st International Conference on Micro Electro Mechanical Systems (MEMS), pp. 984-987, Jan 2018.
Conference
Lizmarie Comenencia Ortiz, Ian B. Flader, Gabrielle D. Vukasin, Dustin D. Gerrard, Saurabh A. Chandorkar, Janna Rodriguez, Dongsuk D. Shin, Ryan Kwon, David B. Heinz, Yunhan Chen, Woosung Park, Kenneth E. Goodson, and Thomas W. Kenny, "Thermal effects of ovenized clocks on episeal encapsulated inertial measurement units," 2018 IEEE 31st International Conference on Micro Electro Mechanical Systems (MEMS), pp. 980-983, Jan 2018.
Conference
Janna Rodriguez, Dustin D. Gerrard, Grant M. Glaze, Saurabh Chandorkar, Yunhan Chen, Ian B. Flader, Dongsuk D. Shin, and Thomas W. Kenny, "Unanticipated results in the first direct measurements of anchor damping in MEMS resonators," 2018 IEEE 31st International Conference on Micro Electro Mechanical Systems (MEMS), pp. 543-546, Jan 2018.
Conference
Ian B. Flader, Yunhan Chen, Chae Hyuck Ahn, Dongsuk D. Shin, Anne L. Alter, Janna Rodriguez, and Thomas W. Kenny, "Epitaxial encapsulation of fully differential electrodes and large transduction gaps for MEMS resonant structures," 2018 IEEE 31st International Conference on Micro Electro Mechanical Systems (MEMS), pp. 483-486, Jan 2018.
Journal
Yunhan Chen, Ian B. Flader, Dongsuk D. Shin, Chae Hyuck Ahn, Janna Rodriguez, and Thomas W. Kenny, "Robust Method of Fabricating Epitaxially Encapsulated MEMS Devices with Large Gaps," Journal of Microelectromechanical Systems, Vol. 26, No. 6, pp. 1235-1243, Dec 2017.
Conference
V. Maiwald, Y. Chen, M. Muller, I. B. Flader, C. Roman, D. B. Heinz, D. D. Shin, T. W. Kenny, and C. Hierold, "Transfer function tuning of a broadband shoaling mechanical amplifier near the electrostatic instability," 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp. 802-805, Jun 2017.
Conference
Dustin D. Gerrard, Yunhan Chen, Saurabh A. Chandorkar, Guo Yu, Janna Rodriguez, Ian B. Flader, Dongsuk D. Shin, Carl D. Meinhart, Ole Sigmund, and Thomas W. Kenny, "Topology optimization for reduction of thermo-elastic dissipation in MEMS resonators," 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp. 794-797, Jun 2017.
Conference
Dongsuk D. Shin, Yunhan Chen, Ian B. Flader, and Thomas W. Kenny, "Epitaxially encapsulated resonant accelerometer with an on-chip micro-oven," 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp. 595-598, Jun 2017.
Conference
Soner Sonmezoglu, Ian B. Flader, Yunhan Chen, Dongsuk D. Shin, Thomas W. Kenny, and David A. Horsley, "Dual-resonator MEMS magnetic sensor with differential amplitude modulation," 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp. 814-817, Jun 2017.
Conference
James M.L. Miller, David B. Heinz, Ian B. Flader, Yunhan Chen, Dongsuk D. Shin, and Thomas W. Kenny, "Effective quality factor and temperature dependence of self-oscillations in a thermal-piezoresistively pumped resonator," 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp. 1907-1910, Jun 2017.
Journal
Woosung Park, Dongsuk D. Shin, Soo Jin Kim, Joseph S. Katz, Joonsuk Park, Chae Hyuck Ahn, Takashi Kodama, Mehdi Asheghi, Thomas W. Kenny, and Kenneth E. Goodson, "Phonon conduction in silicon nanobeams," Applied Physics Letters, Vol. 110, No. 21, pp. 213102, May 2017.
Conference
Dongsuk D. Shin, Chae Hyuck Ahn, Yunhan Chen, Vu A. Hong, Eldwin J. Ng, Yushi Yang, and Thomas W. Kenny, "Electrostatic tuning of temperature coefficient of frequency of anisotropic disk-shaped resonators," 2017 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), pp. 164-167, Mar 2017.
Conference
Yunhan Chen, Ian B. Flader, Dongsuk D. Shin, Chae Hyuck Ahn, Lizmarie Comenencia Ortiz, and Thomas W. Kenny, "Fabrication of wide and deep cavities for silicon MEMS devices without wafer bonding," 2017 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), pp. 113-116, Mar 2017.
Conference
Soner Sonmezoglu, Ian B. Flader, Yunhan Chen, Dongsuk D. Shin, Thomas W. Kenny, and David A. Horsley, "Dual-resonator MEMS Lorentz force magnetometer based on differential frequency modulation," 2017 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), pp. 160-163, Mar 2017.
Conference
Yunhan Chen, Dongsuk D. Shin, Ian B. Flader, and Thomas W. Kenny, "Tri-mode operation of highly doped silicon resonators for temperature compensated timing references," 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 1158-1161, Jan 2017.
Conference
Dustin D. Gerrard, Janna Rodriguez, Lizmarie Comenencia Ortiz, Saurabh A. Chandorkar, Ian B. Flader, Yunhan Chen, Dongsuk D. Shin, and Thomas W. Kenny, "Manipulation of heat flux paths in thermo-elastically damped resonators for Q optimization," 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 1130-1133, Jan 2017.
Conference
Parsa Taheri-Tehrani, Martial Defoort, Yunhan Chen, Ian Flader, Dongsuk D. Shin, Thomas W. Kenny, and David A. Horsley, "Epitaxially-encapsulated quad mass resonator with shaped comb fingers for frequency tuning," 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 1111-1114, Jan 2017.
Conference
Dongsuk D. Shin, Chae Hyuck Ahn, Yunhan Chen, David L. Christensen, Ian B. Flader, and Thomas W. Kenny, "Environmentally robust differential resonant accelerometer in a wafer-scale encapsulation process," 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 17-20, Jan 2017.
Conference
Ian B. Flader, Yunhan Chen, Dongsuk D. Shin, David B. Heinz, Lizmarie Comenencia Ortiz, Anne L. Alter, Woosung Park, Kenneth E. Goodson, Thomas W. Kenny, "Micro-tethering for in-process stiction mitigation of highly compliant structures," 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), Jan 2017.
Conference
Chae Hyuck Ahn, Dongsuk D. Shin, Vu A. Hong, Yushi Yang, Eldwin J. Ng, Yunhan Chen, Ian B. Flader, and Thomas W. Kenny, "Encapsulated disk resonator gyroscope with differential internal electrodes," 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 962-965, Jan 2016.
Conference
Yunhan Chen, Eldwin J. Ng, Dongsuk D. Shin, Chae H. Ahn, Yushi Yang, Ian B. Flader, Vu A. Hong, and Thomas W. Kenny, "Ovenized dual-mode clock (ODMC) based on highly doped single crystal silicon resonators," 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 91-94, Jan 2016.
Conference
Vu A. Hong, David B. Heinz, David L. Christensen, Dongsuk D. Shin, Yunhan Chen, Chae Hyuck Ahn, Yushi Yang, Eldwin J. Ng, Ian B. Flader, and Thomas W. Kenny, "Overcoming stiction forces with resonant over-travel stops," 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 47-50, Jan 2016.