Micro Structures & Sensors Lab
Kenny Group @ Stanford

David Heinz


MS/PhD Student

dheinz :at: mems.stanford.edu
440 Escondido Mall, Bldg 530-224 Stanford, CA 94305, USA
Advisor: Thomas W. Kenny

Research

Surface Adhesion (Stiction) in Encapsulated Silicon MEMS

Epi-Seal MEMS Process

My research focusses on the fundamental problem of surface adhesion (stiction) in micro and nano-scale mechanical devices arising from the dominant scaling of surface effects. In particular, I am investigating stiction in epitaxially encapsulated, pure-silicon MEMS devices, and mechanical means of overcoming these forces. This aims to develop robust, shock-tolerant physical MEMS sensors.



Education

Stanford University
(2014- ) PhD Candidate

Stanford University
(2012-2014) MS Mechanical Engineering

Princeton University
(2008-2012) B.S.E. Mechanical and Aerospace Engineering
Certificates in Applications of Computing and Materials Engineering


Experience



Fellowships / Awards

Stanford Graduate Fellowship
2012 Recipient of the three-year SGF

Publications

Journal
Gabrielle D. Vukasin, Veronica K. Sanchez, Janna Glaze, Nicholas E. Bousse, Nathan Bissel, Dongsuk D. Shin, Hyun-Keun Kwon, David Heinz, Ernest T.-T. Yen, and Thomas W. Kenny, "Anchor Design Affects Dominant Energy Loss Mechanism in a Lamé Mode MEM Resonator," Journal of Microelectromechanical Systems, pp. 1-7, 2020.
Journal
Lizmarie Comenencia Ortiz, Hyun-Keun Kwon, Janna Rodriguez, Yunhan Chen, Gabrielle D. Vukasin, David B. Heinz, Dongsuk D. Shin, and Thomas W. Kenny, "Low-Power Dual Mode MEMS Resonators With PPB Stability Over Temperature," Journal of Microelectromechanical Systems, pp. 1-12, 2020.
Journal
James M. L. Miller, Nicholas E. Bousse, David B. Heinz, Hyo Jin K. Kim, Hyun-Keun Kwon, Gabrielle D. Vukasin, and Thomas W. Kenny, "Thermomechanical-Noise-Limited Capacitive Transduction of Encapsulated MEM Resonators," Journal of Microelectromechanical Systems, Vol. 28, No. 6, pp. 965-976, Dec 2019.
Journal
Ian B. Flader, Yunhan Chen, Yushi Yang, Eldwin J. Ng, Dongsuk D. Shin, David B. Heinz, Lizmarie Comenencia Ortiz, Anne L. Alter, Woosung Park, Kenneth E. Goodson, and Thomas W. Kenny, "Micro-Tethering for Fabrication of Encapsulated Inertial Sensors With High Sensitivity," Journal of Microelectromechanical Systems, Vol. 28, No. 3, pp. 372-381, Jun 2019.
Journal
Hyo Jin K. Kim, Kirsten E. Kaplan, Peter Schindler, Shicheng Xu, Martin M. Winterkorn, David B. Heinz, Timothy S. English, J. Provine, Fritz B. Prinz, and Thomas W. Kenny, "Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition," ACS Appl. Mater. Interfaces, Vol. 11, No. 9, pp. 9594-9599, 2019.
Journal
James M. Lehto Miller, Azadeh Ansari, David B. Heinz, Yunhan Chen, Ian B. Flader, Dongsuk D. Shin, L. Guillermo Villanueva, and Thomas W. Kenny, "Effective Quality Factor Tuning Mechanisms in Micromechanical Resonators," Applied Physics Reviews, Vol. 5, pp. 41307, Dec 2018.
Journal
James M. Lehto Miller, Haoshen Zhu, David B. Heinz, Yunhan Chen, Ian B. Flader, Dongsuk D. Shin, Joshua E.-Y. Lee, and Thomas W. Kenny, "Thermal-Piezoresistive Tuning of the Effective Quality Factor of a Micromechanical Resonator," Physical Review Applied, Vol. 10, No. 4, pp. 1-10, Oct 2018.
Conference
Hyun-Keun Kwon, David B. Heinz, Dongsuk D. Shin, Yunhan Chen, Lizmarie C. Ortiz, Gabrielle D. Vukasin, and Thomas W. Kenny, "PRECISE LOCAL TEMPERATURE MEASUREMENT OF FULLY ENCAPSULATED OVENIZED MEMS DEVICES," Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2018, pp. 358-361, Jun 2018.
Conference
Yusheng Wang, Yu-Wei Lin, Janna Rodriguez, Gabrielle D. Vukasin, Dongsuk D. Shin, Hyun-Keun Kwon, David B. Heinz, Yunhan Chen, Dustin D. Gerrard, Thomas W. Kenny, and Andrei M. Shkel, "ON DECOUPLED QUANTIFICATION OF ENERGY DISSIPATION MECHANISMS IN TOROIDAL RING GYROSCOPES," Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2018, pp. 318-321, Jun 2018.
Conference
James M. Lehto Miller, Azadeh Ansari, David B. Heinz, Yunhan Chen, Ian B. Flader, Dongsuk D. Shin, L. Guillermo Villanueva, and Thomas W. Kenny, "WHAT IS EFFECTIVE QUALITY FACTOR?," Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2018, pp. 240-241, Jun 2018.
Conference
Lizmarie Comenencia Ortiz, Dustin D. Gerrard, Ian B. Flader, Gabrielle D. Vukasin, David B. Heinz, Janna Rodriguez, Saisneha Koppaka, Dongsuk D. Shin, Hyun-Keun Kwon, Saurabh Chandorkar, and Thomas W. Kenny, "ENHANCING MICRO-OVEN POWER AND STIFFNESS IN ENCAPSULATED DEVICES FOR TIMING REFERENCE APPLICATIONS," Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2018, pp. 214-217, Jun 2018.
Conference
Anne L. Alter, Ian B. Flader, Yunhan Chen, Lizmarie Comenencia Ortiz, Dongsuk D. Shin, David B. Heinz, and Thomas W. Kenny, "FIRST FATIGUE MEASUREMENTS ON THICK EPI-POLYSILICON MEMS IN ULTRA-CLEAN ENVIRONMENT," Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2018, pp. 132-135, Jun 2018.
Conference
Lizmarie Comenencia Ortiz, Hyun-Keun Kwon, Janna Rodriguez, David B. Heinz, Yunhan Chen, Gabrielle D. Vukasin, Dongsuk D. Shin and Thomas W. Kenny, "A NEW LOW POWER MEMS DUAL MODE CLOCK WITH PPB STABILITY OVER TEMPERATURE," Solid-State Sensors, Actuators and Microsystems Workshop 2018, pp. 90-91, Jun 2018.
Journal
Lizmarie Comenencia Ortiz, David B. Heinz, Ian B. Flader, Anne L. Alter, Dongsuk D. Shin, Yunhan Chen, and Thomas W. Kenny, "Assessing failure in epitaxially encapsulated micro-scale sensors using micro and nano x-ray computed tomography," MRS Communications, pp. 1-8, Apr 2018.
Conference
Dongsuk D. Shin, David B. Heinz, Hyun-Keun Kwon, Yunhan Chen, and Thomas W. Kenny, "Lateral diffusion doping of silicon for temperature compensation of MEMS resonators," 2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), pp. 1-4, Mar 2018.
Conference
Verena Maiwald, Ian B. Flader, Michelle Müller, Yunhan Chen, Silvan Plüss, Dongsuk D. Shin, Cosmin Roman, David B. Heinz, Thomas W. Kenny, and Christofer Hierold, "Experimental fractal-like instability bands in a resonant silicon-silicon contact pull-in vibration detector," 2018 IEEE 31st International Conference on Micro Electro Mechanical Systems (MEMS), pp. 984-987, Jan 2018.
Conference
Lizmarie Comenencia Ortiz, Ian B. Flader, Gabrielle D. Vukasin, Dustin D. Gerrard, Saurabh A. Chandorkar, Janna Rodriguez, Dongsuk D. Shin, Ryan Kwon, David B. Heinz, Yunhan Chen, Woosung Park, Kenneth E. Goodson, and Thomas W. Kenny, "Thermal effects of ovenized clocks on episeal encapsulated inertial measurement units," 2018 IEEE 31st International Conference on Micro Electro Mechanical Systems (MEMS), pp. 980-983, Jan 2018.
Conference
V. Maiwald, Y. Chen, M. Muller, I. B. Flader, C. Roman, D. B. Heinz, D. D. Shin, T. W. Kenny, and C. Hierold, "Transfer function tuning of a broadband shoaling mechanical amplifier near the electrostatic instability," 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp. 802-805, Jun 2017.
Conference
David B. Heinz, Ian B. Flader, Yunhan Chen, Gabrielle D. Vukasin, Lizmarie Comenencia Ortiz, and Thomas W. Kenny, "Direct comparison of stiction properties of oxide coated polysilicon and smooth single crystal silicon," 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp. 1203-1206, Jun 2017.
Conference
James M.L. Miller, David B. Heinz, Ian B. Flader, Yunhan Chen, Dongsuk D. Shin, and Thomas W. Kenny, "Effective quality factor and temperature dependence of self-oscillations in a thermal-piezoresistively pumped resonator," 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp. 1907-1910, Jun 2017.
Conference
David B. Heinz, Vu A. Hong, Yushi Yang, Chae-Hyuck Ahn, and Thomas W. Kenny, "High-G (>20,000g) inertial shock survivability of epitaxially encapsulated silicon MEMS devices," 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 1122-1125, Jan 2017.
Conference
Ian B. Flader, Yunhan Chen, Dongsuk D. Shin, David B. Heinz, Lizmarie Comenencia Ortiz, Anne L. Alter, Woosung Park, Kenneth E. Goodson, Thomas W. Kenny, "Micro-tethering for in-process stiction mitigation of highly compliant structures," 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), Jan 2017.
Conference
C. H. Ahn, D. L. Christensen, D. B. Heinz, V. A. Hong, E. J. Ng, J. Rodriguez, Y. Yang, G. O'Brien, and T. W. Kenny, "Encapsulated inertial systems," 2016 IEEE International Electron Devices Meeting (IEDM), pp. 263-263, Dec 2016.
Conference
David B. Heinz, Vu A. Hong, Chae-Hyuck. Ahn, Yushi Yang and Thomas W. Kenny, "Stiction at High Temperature (>250C) in Encapsulated MEMS Devices for Harsh Environment Applications," Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2016, pp. 189-192, Jun 2016.
Journal
David B. Heinz, Vu A. Hong, Chae Hyuck Ahn, Eldwin J. Ng, Yushi Yang, and Thomas W. Kenny, "Experimental Investigation Into Stiction Forces and Dynamic Mechanical Anti-Stiction Solutions in Ultra-Clean Encapsulated MEMS Devices," Journal of Microelectromechanical Systems, Vol. 25, No. 3, pp. 469-478, Jun 2016.
Conference
Vu A. Hong, David B. Heinz, David L. Christensen, Dongsuk D. Shin, Yunhan Chen, Chae Hyuck Ahn, Yushi Yang, Eldwin J. Ng, Ian B. Flader, and Thomas W. Kenny, "Overcoming stiction forces with resonant over-travel stops," 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 47-50, Jan 2016.
Conference
S. Wisher, P. Shao, A. Norouzpour-Shirazi, Y. Yang, E. Ng, I. Flader, Y. Chen, D. Heinz, T. Kenny, and F. Ayazi, "A high-frequency epitaxially encapsulated single-drive quad-mass tri-axial resonant tuning fork gyroscope," 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 930-933, Jan 2016.
Conference
V.A. Hong, J. Stehle, C.H. Ahn, D.B. Heinz, G. Yama, B. Kim, G.J. O'Brien, and T.W. Kenny, "Capacitive sensor fusion: Co-fabricated X/Y and Z-axis accelerometers, pressure sensor, thermometer," 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp. 295-298, Jun 2015.
Conference
E. Ng, Y. Yang, V.A. Hong, C.H. Ahn, D.B. Heinz, I. Flader, Y. Chen, C.L.M. Everhart, B. Kim, R. Melamud, R.N. Candler, M.A. Hopcroft, J.C. Salvia, S. Yoneoka, A.B. Graham, M. Agarwal, M.W. Messana, K.L. Chen, H.K. Lee, S. Wang, G. Bahl, V. Qu, C.F. Chiang, T.W. Kenny, A. Partridge, M. Lutz, G. Yama, and G.J. O'Brien, "The long path from MEMS resonators to timing products," 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 1-2, Jan 2015.
Conference
D.B. Heinz, V.A. Hong, T.S. Kimbrell, J. Stehle, C.H. Ahn, E.J. Ng, Y. Yang, G. Yama, G.J. O'Brien, and T.W. Kenny, "Stiction forces and reduction by dynamic contact in ultra-clean encapsulated MEMS devices," 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 393-396, Jan 2015.
Conference
David B. Heinz, Vu A. Hong, Eldwin J. Ng, Chae Hyuck Ahn, Yushi Yang, and Thomas W. Kenny, "Characterization of stiction forces in ultra-clean encapsulated MEMS devices," 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 588-591, Jan 2014.
Conference
E. J. Ng, K. L. Harrison, C. L. Everhart, V. A. Hong, Y. Yang, C. H. Ahn, D. B. Heinz, R. T. Howe and T. W. Kenny, "Stable Charge-Biased Capacitive Resonators with Encapsulated Switches," IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2014, pp. 1277-1280, Jan 2014.
Conference
V. A. Hong, B. J. Lee, D. L. Christensen, D. B. Heinz, E. J. Ng, C. H. Ahn, Y. Yang, and T. W. Kenny, "X-Y and Z-axis capacitive accelerometers packaged in an ultra-clean hermetic environment," 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), pp. 618-621, Jun 2013.
Journal
Y. Xu, C. Chen, V. V. Deshpande, F. A. DiRenno, A. Gondarenko, D.B. Heinz, S. Liu, P. Kim, and J. Hone, "Radio Frequency Electrical Transduction of Graphene Mechanical Resonators," Appl. Phys. Lett. 97, 243111, 2010.