Micro Structures & Sensors Lab
Kenny Group @ Stanford

David Heinz


MS/PhD Student

dheinz :at: mems.stanford.edu
440 Escondido Mall, Bldg 530-224 Stanford, CA 94305, USA
Advisor: Thomas W. Kenny

Research

Surface Adhesion (Stiction) in Encapsulated Silicon MEMS

Integrated Epi-Seal MEMS

My research focusses on the fundamental problem of surface adhesion (stiction) in micro and nano-scale mechanical devices arising from the dominant scaling of surface effects. In particular, I am investigating stiction in epitaxially encapsulated, pure-silicon MEMS devices, and mechanical means of overcoming these forces. This aims to develop robust, shock-tolerant physical MEMS sensors.



Education

Stanford University
(2014- ) PhD Candidate

Stanford University
(2012-2014) MS Mechanical Engineering

Princeton University
(2008-2012) B.S.E. Mechanical and Aerospace Engineering
Certificates in Applications of Computing and Materials Engineering


Experience



Fellowships / Awards

Stanford Graduate Fellowship
2012 Recipient of the three-year SGF

Publications

Conference
David B. Heinz, Vu A. Hong, Chae-Hyuck. Ahn, Yushi Yang and Thomas W. Kenny, "Stiction at High Temperature (>250C) in Encapsulated MEMS Devices for Harsh Environment Applications," Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2016, pp. 189-192, Jun 2016.
Journal
David B. Heinz, Vu A. Hong, Chae Hyuck Ahn, Eldwin J. Ng, Yushi Yang, and Thomas W. Kenny, "Experimental Investigation Into Stiction Forces and Dynamic Mechanical Anti-Stiction Solutions in Ultra-Clean Encapsulated MEMS Devices," Journal of Microelectromechanical Systems, Vol. 25, No. 3, pp. 469-478, Jun 2016.
Conference
Vu A. Hong, David B. Heinz, David L. Christensen, Dongsuk D. Shin, Yunhan Chen, Chae Hyuck Ahn, Yushi Yang, Eldwin J. Ng, Ian B. Flader, and Thomas W. Kenny, "Overcoming stiction forces with resonant over-travel stops," 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 47-50, Jan 2016.
Conference
S. Wisher, P. Shao, A. Norouzpour-Shirazi, Y. Yang, E. Ng, I. Flader, Y. Chen, D. Heinz, T. Kenny, and F. Ayazi, "A high-frequency epitaxially encapsulated single-drive quad-mass tri-axial resonant tuning fork gyroscope," 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 930-933, Jan 2016.
Conference
V.A. Hong, J. Stehle, C.H. Ahn, D.B. Heinz, G. Yama, B. Kim, G.J. O'Brien, and T.W. Kenny, "Capacitive sensor fusion: Co-fabricated X/Y and Z-axis accelerometers, pressure sensor, thermometer," 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp. 295-298, Jun 2015.
Conference
E. Ng, Y. Yang, V.A. Hong, C.H. Ahn, D.B. Heinz, I. Flader, Y. Chen, C.L.M. Everhart, B. Kim, R. Melamud, R.N. Candler, M.A. Hopcroft, J.C. Salvia, S. Yoneoka, A.B. Graham, M. Agarwal, M.W. Messana, K.L. Chen, H.K. Lee, S. Wang, G. Bahl, V. Qu, C.F. Chiang, T.W. Kenny, A. Partridge, M. Lutz, G. Yama, and G.J. O'Brien, "The long path from MEMS resonators to timing products," 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 1-2, Jan 2015.
Conference
D.B. Heinz, V.A. Hong, T.S. Kimbrell, J. Stehle, C.H. Ahn, E.J. Ng, Y. Yang, G. Yama, G.J. O'Brien, and T.W. Kenny, "Stiction forces and reduction by dynamic contact in ultra-clean encapsulated MEMS devices," 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 393-396, Jan 2015.
Conference
David B. Heinz, Vu A. Hong, Eldwin J. Ng, Chae Hyuck Ahn, Yushi Yang, and Thomas W. Kenny, "Characterization of stiction forces in ultra-clean encapsulated MEMS devices," 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 588-591, Jan 2014.
Conference
E. J. Ng, K. L. Harrison, C. L. Everhart, V. A. Hong, Y. Yang, C. H. Ahn, D. B. Heinz, R. T. Howe and T. W. Kenny, "Stable Charge-Biased Capacitive Resonators with Encapsulated Switches," IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2014, pp. 1277-1280, Jan 2014.
Conference
V. A. Hong, B. J. Lee, D. L. Christensen, D. B. Heinz, E. J. Ng, C. H. Ahn, Y. Yang, and T. W. Kenny, "X-Y and Z-axis capacitive accelerometers packaged in an ultra-clean hermetic environment," 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), pp. 618-621, Jun 2013.
Journal
Y. Xu, C. Chen, V. V. Deshpande, F. A. DiRenno, A. Gondarenko, D.B. Heinz, S. Liu, P. Kim, and J. Hone, "Radio Frequency Electrical Transduction of Graphene Mechanical Resonators," Appl. Phys. Lett. 97, 243111, 2010.