Micro Structures & Sensors Lab
Kenny Group @ Stanford

David Heinz


MS/PhD Student

dheinz :at: mems.stanford.edu
440 Escondido Mall, Bldg 530-224 Stanford, CA 94305, USA
Advisor: Thomas W. Kenny

Research

Integrated Epi-Seal MEMS


My research focusses on robust methods of integrating sensors requiring different operating environments into a single process flow. In particular, I am developing passive mechanical systems to overcome the surface adhesion forces (stiction) in bare silicon devices, and studying methods of energy dissipation in MEMS to increase damping coefficients for vacuum packaged devices.

Education

Stanford University
(2012-Present) MS Candidate in Mechanical Engineering

Princeton University
(2008-2012) B.S.E. Mechanical and Aerospace Engineering
Certificates in Applications of Computing and Materials Engineering


Experience



Fellowships / Awards

Stanford Graduate Fellowship
2012 Recipient of the three-year SGF

Publications

Journal
Y. Xu, C. Chen, V. V. Deshpande, F. A. DiRenno, A. Gondarenko, D.B. Heinz, S. Liu, P. Kim, and J. Hone, "Radio Frequency Electrical Transduction of Graphene Mechanical Resonators," Appl. Phys. Lett. 97, 243111, 2010.