Micro Structures & Sensors Lab
Kenny Group @ Stanford

Yunhan Chen


PhD Candidate

yunhanc :at: mems.stanford.edu
440 Escondido Mall, Bldg 530 Rm 224, Stanford, CA 94305, USA
Advisor: Thomas W. Kenny

Research

Epi-Seal Process, Ovenized MEMS Resonators, Topology Optimization

Integrated Epi-Seal MEMS

Ovenized Dual-Mode Clock (ODMC)


Education

Stanford University
(2013 - present) PhD Candidate in Mechanical Engineering

Stanford University
(2011 - 2013) M.S. in Mechanical Engineering

Tsinghua University
(2007 - 2011) B.S. in Precision Instrument and Mechanology

Experience

Class Experience
ME218 Smart Product Design Series
ME218A: http://me218aproject- theforbiddenforest.weebly.com/
ME218B: http://cuckoocrab.weebly.com/
ME218C: http://me218buzzboat.weebly.com/

Teaching Experience
Teaching Assistant for:
ME 70, Introductory Fluids Engineering (Spring 2012)
ME 321, Optofluidics: Interplay of Light and Fluids at the Micro and Nanoscale (Fall 2012)
ENGR 240, Introduction to Micro and Nano Electromechanical Systems (Winter 2013)


Fellowships / Awards

Stanford Graduate Fellowship
(2013) Larry Yung Fellow

Publications

Conference
V. Maiwald, Y. Chen, M. Muller, I. B. Flader, C. Roman, D. B. Heinz, D. D. Shin, T. W. Kenny, and C. Hierold, "Transfer function tuning of a broadband shoaling mechanical amplifier near the electrostatic instability," 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp. 802-805, Jun 2017.
Conference
J. Rodriguez, D. D. Gerrard, S. Chandorkar, Y. Chen, G. M. Glaze, I. B. Flader, C. H. Ahn, E. J. Ng, and T. W. Kenny, "Wide-range temperature dependence studies for devices limited by thermoelastic dissipation and anchor damping," 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp. 1100-1103, Jun 2017.
Conference
Dustin D. Gerrard, Yunhan Chen, Saurabh A. Chandorkar, Guo Yu, Janna Rodriguez, Ian B. Flader, Dongsuk D. Shin, Carl D. Meinhart, Ole Sigmund, and Thomas W. Kenny, "Topology optimization for reduction of thermo-elastic dissipation in MEMS resonators," 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp. 794-797, Jun 2017.
Conference
Ian B. Flader, Yunhan Chen, Dustin D. Gerrard, and Thomas W. Kenny, "Wafer-scale encapsulation of fully differential electrodes for mutli-axis inertial sensing," 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp. 591-594, Jun 2017.
Conference
Dongsuk D. Shin, Yunhan Chen, Ian B. Flader, and Thomas W. Kenny, "Epitaxially encapsulated resonant accelerometer with an on-chip micro-oven," 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp. 595-598, Jun 2017.
Conference
David B. Heinz, Ian B. Flader, Yunhan Chen, Gabrielle D. Vukasin, Lizmarie Comenencia Ortiz, and Thomas W. Kenny, "Direct comparison of stiction properties of oxide coated polysilicon and smooth single crystal silicon," 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp. 1203-1206, Jun 2017.
Conference
Soner Sonmezoglu, Ian B. Flader, Yunhan Chen, Dongsuk D. Shin, Thomas W. Kenny, and David A. Horsley, "Dual-resonator MEMS magnetic sensor with differential amplitude modulation," 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp. 814-817, Jun 2017.
Conference
James M.L. Miller, David B. Heinz, Ian B. Flader, Yunhan Chen, Dongsuk D. Shin, and Thomas W. Kenny, "Effective quality factor and temperature dependence of self-oscillations in a thermal-piezoresistively pumped resonator," 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp. 1907-1910, Jun 2017.
Conference
Dongsuk D. Shin, Chae Hyuck Ahn, Yunhan Chen, Vu A. Hong, Eldwin J. Ng, Yushi Yang, and Thomas W. Kenny, "Electrostatic tuning of temperature coefficient of frequency of anisotropic disk-shaped resonators," 2017 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), pp. 164-167, Mar 2017.
Conference
Yunhan Chen, Ian B. Flader, Dongsuk D. Shin, Chae Hyuck Ahn, Lizmarie Comenencia Ortiz, and Thomas W. Kenny, "Fabrication of wide and deep cavities for silicon MEMS devices without wafer bonding," 2017 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), pp. 113-116, Mar 2017.
Conference
Alexandra Efimovskaya, Yushi Yang, Eldwin Ng, Yunhan Chen, Ian Flader, Thomas W. Kenny, and Andrei M. Shkel, "Compact roll-pitch-yaw gyroscope implemented in wafer-level Epitaxial Silicon Encapsulation process," 2017 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), pp. 1-2, Mar 2017.
Conference
Soner Sonmezoglu, Ian B. Flader, Yunhan Chen, Dongsuk D. Shin, Thomas W. Kenny, and David A. Horsley, "Dual-resonator MEMS Lorentz force magnetometer based on differential frequency modulation," 2017 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), pp. 160-163, Mar 2017.
Conference
Yunhan Chen, Dongsuk D. Shin, Ian B. Flader, and Thomas W. Kenny, "Tri-mode operation of highly doped silicon resonators for temperature compensated timing references," 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 1158-1161, Jan 2017.
Conference
Alexandra Efimovskaya, Yu-Wei Lin, Yushi Yang, Eldwin Ng, Yunhan Chen, Ian Flader, Chae H. Ahn, Vu Hong, Thomas W. Kenny, and Andrei M. Shkel, "On cross-talk between gyroscopes integrated on a folded MEMS IMU Cube," 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 1142-1145, Jan 2017.
Conference
Dustin D. Gerrard, Janna Rodriguez, Lizmarie Comenencia Ortiz, Saurabh A. Chandorkar, Ian B. Flader, Yunhan Chen, Dongsuk D. Shin, and Thomas W. Kenny, "Manipulation of heat flux paths in thermo-elastically damped resonators for Q optimization," 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 1130-1133, Jan 2017.
Conference
Parsa Taheri-Tehrani, Martial Defoort, Yunhan Chen, Ian Flader, Dongsuk D. Shin, Thomas W. Kenny, and David A. Horsley, "Epitaxially-encapsulated quad mass resonator with shaped comb fingers for frequency tuning," 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 1111-1114, Jan 2017.
Conference
Dongsuk D. Shin, Chae Hyuck Ahn, Yunhan Chen, David L. Christensen, Ian B. Flader, and Thomas W. Kenny, "Environmentally robust differential resonant accelerometer in a wafer-scale encapsulation process," 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 17-20, Jan 2017.
Conference
Ian B. Flader, Yunhan Chen, Dongsuk D. Shin, David B. Heinz, Lizmarie Comenencia Ortiz, Anne L. Alter, Woosung Park, Kenneth E. Goodson, Thomas W. Kenny, "Micro-tethering for in-process stiction mitigation of highly compliant structures," 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), Jan 2017.
Journal
Yushi Yang, Eldwin J. Ng, Pavel M. Polunin, Yunhan Chen, Ian B. Flader, Steven W. Shaw, Mark I. Dykman, and Thomas W. Kenny, "Nonlinearity of Degenerately Doped Bulk-Mode Silicon MEMS Resonators," Journal of Microelectromechanical Systems, Vol. 25, No. 5, pp. 859-869, Oct 2016.
Journal
Yushi Yang, Eldwin J. Ng, Yunhan Chen, Ian B. Flader, and Thomas W. Kenny, "A Unified Epi-Seal Process for Fabrication of High-Stability Microelectromechanical Devices," Journal of Microelectromechanical Systems, Vol. 25, No. 3, pp. 489-497, Jun 2016.
Conference
Chae Hyuck Ahn, Dongsuk D. Shin, Vu A. Hong, Yushi Yang, Eldwin J. Ng, Yunhan Chen, Ian B. Flader, and Thomas W. Kenny, "Encapsulated disk resonator gyroscope with differential internal electrodes," 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 962-965, Jan 2016.
Conference
Yunhan Chen, Eldwin J. Ng, Dongsuk D. Shin, Chae H. Ahn, Yushi Yang, Ian B. Flader, Vu A. Hong, and Thomas W. Kenny, "Ovenized dual-mode clock (ODMC) based on highly doped single crystal silicon resonators," 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 91-94, Jan 2016.
Conference
Parsa Taheri-Tehrani, Mitchell Kline, Igor Izyumin, Burak Eminoglu, Yu-Ching Yeh, Yushi Yang, Yunhan Chen, Ian Flader, Eldwin J. Ng, Thomas W. Kenny, Bernhard E. Boser, and David A. Horsley, "Epitaxially-encapsulated quad mass gyroscope with nonlinearity compensation," 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 966-969, Jan 2016.
Conference
Vu A. Hong, David B. Heinz, David L. Christensen, Dongsuk D. Shin, Yunhan Chen, Chae Hyuck Ahn, Yushi Yang, Eldwin J. Ng, Ian B. Flader, and Thomas W. Kenny, "Overcoming stiction forces with resonant over-travel stops," 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 47-50, Jan 2016.
Conference
S. Wisher, P. Shao, A. Norouzpour-Shirazi, Y. Yang, E. Ng, I. Flader, Y. Chen, D. Heinz, T. Kenny, and F. Ayazi, "A high-frequency epitaxially encapsulated single-drive quad-mass tri-axial resonant tuning fork gyroscope," 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 930-933, Jan 2016.
Conference
Dustin D. Gerrard, Chae H. Ahn, Ian B. Flader, Yunhan Chen, Eldwin J. Ng, Yushi Yang, and Thomas W. Kenny, "Q-factor optimization in disk resonator gyroscopes via geometric parameterization," 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 994-997, Jan 2016.
Conference
C.H. Ahn, V.A. Hong, W. Park, Y. Yang, Y. Chen, E.J. Ng, J. Huynh, A.D. Challoner, K.E. Goodson, and T.W. Kenny, "On-chip ovenization of encapsulated Disk Resonator Gyroscope (drg)," 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp. 39-42, Jun 2015.
Conference
Yushi Yang, Eldwin J. Ng, Yunhan Chen, Ian B. Flader, Chae Hyuck Ahn, Vu A. Hong, and Thomas W. Kenny, "A unified epi-seal process for resonators and inertial sensors," 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp. 1326-1329, Jun 2015.
Conference
J. Rodriguez, Y. Yang, C.H. Ahn, Y. Chen, E.J. Ng, V.A. Hong, S. Ghaffari, and T.W. Kenny, "Damping mechanisms in light and heavy-doped dual-ring and double-ended tuning fork resonators (DETF)," 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp. 2005-2008, Jun 2015.
Conference
E. Ng, Y. Yang, V.A. Hong, C.H. Ahn, D.B. Heinz, I. Flader, Y. Chen, C.L.M. Everhart, B. Kim, R. Melamud, R.N. Candler, M.A. Hopcroft, J.C. Salvia, S. Yoneoka, A.B. Graham, M. Agarwal, M.W. Messana, K.L. Chen, H.K. Lee, S. Wang, G. Bahl, V. Qu, C.F. Chiang, T.W. Kenny, A. Partridge, M. Lutz, G. Yama, and G.J. O'Brien, "The long path from MEMS resonators to timing products," 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 1-2, Jan 2015.
Conference
Yushi Yang, Eldwin Ng, Pavel Polunin, Yunhan Chen, Scott Strachan, Vu Hong, Chae Hyuck Ahn, Ori Shoshani, Steven Shaw, Mark Dykman, and Thomas Kenny, "Experimental investigation on mode coupling of bulk mode silicon MEMS resonators," 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 1008-1011, Jan 2015.
Conference
Yunhan Chen, Eldwin J. Ng, Yushi Yang, Chae Hyuck Ahn, Ian Flader, and Thomas W. Kenny, "In-situ ovenization of Lamé-mode silicon resonators for temperature compensation," 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 809-812, Jan 2015.
Conference
Yushi Yang, Eldwin J. Ng, Vu A. Hong, Chae Hyuck Ahn, Yunhan Chen, Elia Ahadi, Mark Dykman, and Thomas W. Kenny, "Measurement of the nonlinear elasticity of doped bulk-mode MEMS resonators," Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2014, pp. 285-288, Jun 2014.
Conference
Eldwin J. Ng, Yushi Yang, Yunhan Chen, and Thomas W. Kenny, "An etch hole-free process for temperature-compensated, high Q, encapsulated resonators," Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2014, pp. 99-100, Jun 2014.
Journal
L. Gerber, L. Rosenfeld, Y. Chen, and S. K.Y. Tang, "Time Capsule: An autonomous sensor and recorder based on diffusion-reaction", Lab on a Chip, 14, 4324-4328, 2014.
Journal
L. Rosenfeld*, L. Fan*, Y. Chen, R. Swoboda, and S. K.Y. Tang, "Break-up of droplets in a concentrated emulsion flowing through a narrow constriction", Soft Matter, 10, 421-430, 2014.
Conference
Y. Chen, M. Pan, S. K.Y. Yang, "Characterization of Dye Leakage in Microfluidic Droplets", The 17th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2013), Freiburg, Germany, pp. 1947-1949, Oct 2013.
Conference
Y. Chen, S. K.Y. Yang, "Time Capsule: A Diffusion-Reaction Based Passive Sensing System with Timing and Recording Functions", The 17th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2013), Freiburg, Germany, pp. 17-19, Oct 2013.
Journal
Y. Chen, A. W. Gani, and S. K. Y. Tang, "Characterization of Sensitivity and Specificity in Leaky Droplet-based Assays," Lab on a Chip, 12, 5093 – 5103, 2012.
Journal
C. Zhang, H. Huang, Y. Chen, Z. You, "Research on Two-Dimensional Scanning Characteristics of MEMS Resonant Mirror," Key Engineering Materials, Vol. 503, pp. 24-28, 2012