Micro Structures & Sensors Lab
Kenny Group @ Stanford

Chae Hyuck Ahn


Ph.D Candidate

ahn1229 :at: mems.stanford.edu
440 Escondido Mall, Bldg 530, Rm 224, Stanford, CA 94305, USA
Advisor: Thomas W. Kenny

Research

Design/Characterize MEMS sensors
- 3-axis Disk Resonating Gyroscope
- Develop the platform for multi-sensor integration

Integrated Epi-Seal MEMS

Disk Resonator Gyroscope (DRG)


Education

Stanford University
(2012 - present) PhD Candidate in Mechanical Engineering

Stanford University
(2010 - 2012) M.S. in Mechanical Engineering, Depth: Mechatronics, MEMS

Seoul National University (Seoul, South Korea)
(2003 - 2010) B.S. in Mechanical Engineering, Combined major in Biotechnology (Interdisciplinary Program)

Experience

Military Service in Republic of Korea Air Force, Seoul, South Korea
(2005 - 2007)

Fellowships / Awards

Kwanjeong foundation Scholarship - Seoul, South Korea
(Aug.2013 - present)

KETEP Scholarship, Korea Institute of Energy Technology Evaluation and Planning - Seoul, South Korea
(Sep.2010 – Jun.2012)

Korea Science and Engineering Foundation (KOSEF) Scholarship, KOSEF
(Spring 2004)

Publications

Conference
C.H. Ahn, V.A. Hong, W. Park, Y. Yang, Y. Chen, E.J. Ng, J. Huynh, A.D. Challoner, K.E. Goodson, and T.W. Kenny, "On-chip ovenization of encapsulated Disk Resonator Gyroscope (drg)," 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp. 39-42, Jun 2015.
Conference
V.A. Hong, J. Stehle, C.H. Ahn, D.B. Heinz, G. Yama, B. Kim, G.J. O'Brien, and T.W. Kenny, "Capacitive sensor fusion: Co-fabricated X/Y and Z-axis accelerometers, pressure sensor, thermometer," 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp. 295-298, Jun 2015.
Conference
Yushi Yang, Eldwin J. Ng, Yunhan Chen, Ian B. Flader, Chae Hyuck Ahn, Vu A. Hong, and Thomas W. Kenny, "A unified epi-seal process for resonators and inertial sensors," 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp. 1326-1329, Jun 2015.
Conference
Dustin D. Gerrard, Eldwin J. Ng, Chae H. Ahn, Vu A. Hong, Yushi Yang, and Thomas W. Kenny, "Modeling the effect of anchor geometry on the quality factor of bulk mode resonators," 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp. 1997-2000, Jun 2015.
Conference
J. Rodriguez, Y. Yang, C.H. Ahn, Y. Chen, E.J. Ng, V.A. Hong, S. Ghaffari, and T.W. Kenny, "Damping mechanisms in light and heavy-doped dual-ring and double-ended tuning fork resonators (DETF)," 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp. 2005-2008, Jun 2015.
Journal
V. Zega, S. Nitzan, M. Li, C. H. Ahn, E. Ng, V. Hong, Y. Yang, T. Kenny, A. Corigliano, and D. A. Horsley, "Predicting the closed-loop stability and oscillation amplitude of nonlinear parametrically amplified oscillators," Applied Physics Letters, Vol. 106, No. 23, pp. 233111, Jun 2015.
Journal
Eldwin J. Ng, Vu A. Hong, Yushi Yang, Chae Hyuck Ahn, Camille L. M. Everhart, and Thomas W. Kenny, "Temperature Dependence of the Elastic Constants of Doped Silicon," Journal of Microelectromechanical Systems, Vol. 24, No. 3, pp. 730-741, Jun 2015.
Journal
Shirin Ghaffari, Eldwin Jiaqiang Ng, Chae Hyuck Ahn, Yushi Yang, Shasha Wang, Vu A. Hong, and Thomas W. Kenny, "Accurate Modeling of Quality Factor Behavior of Complex Silicon MEMS Resonators," Journal of Microelectromechanical Systems, Vol. 24, No. 2, pp. 276-288, Apr 2015.
Journal
Chae Hyuck Ahn, Eldwin J. Ng, Vu A. Hong, Yushi Yang, Brian J. Lee, Ian Flader, Thomas W. Kenny, "Mode-Matching of Wineglass Mode Disk Resonator Gyroscope in (100) Single Crystal Silicon," Journal of Microelectromechanical Systems, Vol. 24, No. 2, pp. 343-350, Apr 2015.
Conference
C.H. Ahn, E. Ng, V.A. Hong, J. Huynh, T.W. Kenny, and S. Wang, "Oxide-coated polysilicon disk resonator gyroscope (DRG) within the wafer-scale encapsulation process," 2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings, pp. 1-2, Mar 2015.
Conference
Parsa Taheri-Tehrani, Oleg Izyumin, Igor Izyumin, Chae H. Ahn, Eldwin J. Ng, Vu A. Hong, Yushi Yang, Thomas W. Kenny, Bernhard E. Boser, and David A. Horsley, "Disk resonator gyroscope with whole-angle mode operation," 2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings, pp. 1-4, Mar 2015.
Journal
Sarah H. Nitzan, Valentina Zega, Mo Li, Chae H. Ahn, Alberto Corigliano, Thomas W. Kenny, and David A. Horsley, "Self-induced parametric amplification arising from nonlinear elastic coupling in a micromechanical resonating disk gyroscope," Scientific Reports, Vol. 5, pp. 9036, Mar 2015.
Conference
E. Ng, Y. Yang, V.A. Hong, C.H. Ahn, D.B. Heinz, I. Flader, Y. Chen, C.L.M. Everhart, B. Kim, R. Melamud, R.N. Candler, M.A. Hopcroft, J.C. Salvia, S. Yoneoka, A.B. Graham, M. Agarwal, M.W. Messana, K.L. Chen, H.K. Lee, S. Wang, G. Bahl, V. Qu, C.F. Chiang, T.W. Kenny, A. Partridge, M. Lutz, G. Yama, and G.J. O'Brien, "The long path from MEMS resonators to timing products," 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 1-2, Jan 2015.
Conference
D. Senkal, E.J. Ng, V. Hong, Y. Yang, C.H. Ahn, T.W. Kenny, and A.M. Shkel, "Parametric drive of a toroidal MEMS rate integrating gyroscope demonstrating < 20 PPM scale factor stability," 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 29-32, Jan 2015.
Conference
Igor I. Izyumin, Mitchell H. Kline, Yu-Ching Yeh, Burak Eminoglu, Chae Hyuck Ahn, Vu A. Hong, Yushi Yang, Eldwin J. Ng, Thomas W. Kenny, and Bernhard E. Boser, "A 7ppm, 6°/hr frequency-output MEMS gyroscope," 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 33-36, Jan 2015.
Conference
D.B. Heinz, V.A. Hong, T.S. Kimbrell, J. Stehle, C.H. Ahn, E.J. Ng, Y. Yang, G. Yama, G.J. O'Brien, and T.W. Kenny, "Stiction forces and reduction by dynamic contact in ultra-clean encapsulated MEMS devices," 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 393-396, Jan 2015.
Conference
Yushi Yang, Eldwin Ng, Pavel Polunin, Yunhan Chen, Scott Strachan, Vu Hong, Chae Hyuck Ahn, Ori Shoshani, Steven Shaw, Mark Dykman, and Thomas Kenny, "Experimental investigation on mode coupling of bulk mode silicon MEMS resonators," 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 1008-1011, Jan 2015.
Conference
Yunhan Chen, Eldwin J. Ng, Yushi Yang, Chae Hyuck Ahn, Ian Flader, and Thomas W. Kenny, "In-situ ovenization of Lamé-mode silicon resonators for temperature compensation," 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 809-812, Jan 2015.
Journal
C. H. Ahn, S. Nitzan, E. J. Ng, V. A. Hong, Y. Yang, T. Kimbrell, D. A. Horsley, and T. W. Kenny, "Encapsulated high frequency (235 kHz), high-Q (100 k) disk resonator gyroscope with electrostatic parametric pump," Applied Physics Letters, Vol. 105, No. 24, pp. 243504, Dec 2014.
Journal
Bo Woon Soon, Eldwin J. Ng, Vu A. Hong, Yushi Yang, Chae Hyuck Ahn, You Qian, Thomas W. Kenny, and Chengkuo Lee, "Fabrication and Characterization of a Vacuum Encapsulated Curved Beam Switch for Harsh Environment Application," Journal of Microelectromechanical Systems, Vol. 23, No. 5, pp. 1121-1130, Dec 2014.
Journal
Clifton L. Roozeboom, Bridget E. Hill, Vu Anh Hong, Chae Hyuck Ahn, Eldwin J. Ng, Yushi Yang, Thomas W. Kenny, Matthew A. Hopcroft, and Beth L. Pruitt, "Multifunctional Integrated Sensors for Multiparameter Monitoring Applications," Journal of Microelectromechanical Systems, Sep 2014.
Conference
C.L. Roozeboom, B.E. Hill, V.A. Hong, C.H. Ahn, E.J. Ng, Y. Yang, M.A. Hopcroft, and B.L. Pruitt, "Multifunctional Integrated Sensor Monitoring," Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2014, pp. 447-448, Jun 2014.
Conference
Yushi Yang, Eldwin J. Ng, Vu A. Hong, Chae Hyuck Ahn, Yunhan Chen, Elia Ahadi, Mark Dykman, and Thomas W. Kenny, "Measurement of the nonlinear elasticity of doped bulk-mode MEMS resonators," Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2014, pp. 285-288, Jun 2014.
Conference
M. Li, S. Sonmezoglu, E.J. Ng, V.A. Hong, C.H. Ahn, Y. Yang, T.W. Kenny, and D.A. Horsley, "Lorentz force magnetometer with quadratrue frequency modulation," Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2014, pp. 52-55, Jun 2014.
Conference
S. Nitzan, T-H. Su, C. Ahn, E. Ng, V. Hong, Y. Yang, T. Kenny, and D. A. Horsley, "Impact of gyroscope operation above the critical bifurcation threshold on scale factor and bias instability," 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 749-752, Jan 2014.
Conference
David B. Heinz, Vu A. Hong, Eldwin J. Ng, Chae Hyuck Ahn, Yushi Yang, and Thomas W. Kenny, "Characterization of stiction forces in ultra-clean encapsulated MEMS devices," 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 588-591, Jan 2014.
Conference
C. L. Roozeboom, V. A. Hong, C. H. Ahn, E. J. Ng, Y. Yang, B. E. Hill, M. A. Hopcroft, and B. L. Pruitt, "Multifunctional integrated sensor in A 2×2 mm epitaxial sealed chip operating in a wireless sensor node," 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 773-776, Jan 2014.
Conference
Mo Li, Eldwin J. Ng, Vu A. Hong, Chae H. Ahn, Yushi Yang, Thomas W. Kenny, and David A. Horsley, "Single-structure 3-axis lorentz force magnetometer with sub-30 nT/√HZ resolution," 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 80-83, Jan 2014.
Conference
D. Senkal, S. Askari, M. J. Ahamed, E. J. Ng, V. Hong, Y. Yang, C. H. Ahn, T. W. Kenny, and A. M. Shkel, "100K Q-factor toroidal ring gyroscope implemented in wafer-level epitaxial silicon encapsulation process," 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 24-27, Jan 2014.
Conference
E. J. Ng, Y. Yang,V. A. Hong, C. H. Ahn, D. L. Christensen, B. A. Gibson, K. R. Qalandar, K. L. Turner, T. W. Kenny, "Stable Pull-In Electrodes for Narrow Gap Actuation," IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2014, pp. 1281-1284, Jan 2014.
Conference
E. J. Ng, K. L. Harrison, C. L. Everhart, V. A. Hong, Y. Yang, C. H. Ahn, D. B. Heinz, R. T. Howe and T. W. Kenny, "Stable Charge-Biased Capacitive Resonators with Encapsulated Switches," IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2014, pp. 1277-1280, Jan 2014.
Journal
Shirin Ghaffari, Saurabh A. Chandorkar, Shasha Wang, Eldwin J. Ng, Chae H. Ahn, Vu Hong, Yushi Yang, and Thomas W. Kenny, "Quantum Limit of Quality Factor in Silicon Micro and Nano Mechanical Resonators," Scientific Reports, Vol. 3, Nov 2013.
Journal
M. Li, E. J. Ng, V. A. Hong, C. H. Ahn, Y. Yang, T. W. Kenny, and D. A. Horsley, "Lorentz force magnetometer using a micromechanical oscillator," Applied Physics Letters, Vol. 103, No. 17, pp. 173504, Oct 2013.
Journal
Shirin Ghaffari, Chae H. Ahn, Eldwin J. Ng, Shasha Wang, and Thomas W. Kenny, "Crystallographic effects in modeling fundamental behavior of MEMS silicon resonators," Microelectronics Journal, Vol. 44, No. 7, pp. 586-591, Jul 2013.
Conference
Y. Yang, E. J. Ng, C. H. Ahn, V. A. Hong, E. Ahadi, and T. W. Kenny, "Mechanical coupling of dual breathe-mode ring resonator," 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), pp. 502-505, Jun 2013.
Conference
V. A. Hong, B. J. Lee, D. L. Christensen, D. B. Heinz, E. J. Ng, C. H. Ahn, Y. Yang, and T. W. Kenny, "X-Y and Z-axis capacitive accelerometers packaged in an ultra-clean hermetic environment," 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), pp. 618-621, Jun 2013.
Conference
E. J. Ng, C.-F. Chiang, Y. Yang, V. A. Hong, C. H. Ahn, and T. W. Kenny, "Ultra-high aspect ratio trenches in single crystal silicon with epitaxial gap tuning," 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), pp. 182-185, Jun 2013.
Conference
E. J. Ng, C. H. Ahn, Y. Yang, V. A. Hong, C.-F. Chiang, E. Ahadi, M. W. Ward, and T. W. Kenny, "Localized, degenerately doped epitaxial silicon for temperature compensation of resonant MEMS systems," 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), pp. 2419-2422, Jun 2013.
Conference
C. H. Ahn, E. J. Ng, V. A. Hong, Y. Yang, B. J. Lee, M. W. Ward, and T. W. Kenny, "Geometric compensation of (100) single crystal silicon disk resonating gyroscope for mode-matching," 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), pp. 1723-1726, Jun 2013.
Conference
D. L. Christensen, C. H. Ahn, V. A. Hong, E. J. Ng, Y. Yang, B. J. Lee, and T. W. Kenny, "Hermetically encapsulated differential resonant accelerometer," 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), pp. 606-609, Jun 2013.
Journal
Eldwin J. Ng, Hyung Kyu Lee, Chae Hyuck Ahn, Renata Melamud, and Thomas W. Kenny, "Stability of Silicon Microelectromechanical Systems Resonant Thermometers," IEEE Sensors Journal, Vol. 13, No. 3, pp. 987-993, Mar 2013.
Conference
S. Nitzan, C. H. Ahn, T.-H. Su, M. Li, E. J. Ng, S. Wang, Z. M. Yang, G. O'Brien, B. E. Boser, T. W. Kenny, and D. A. Horsley, "Epitaxially-encapsulated polysilicon disk resonator gyroscope," 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 625-628, Jan 2013.
Conference
Chia-Fang Chiang, Andrew B. Graham, Brian J. Lee, Chae Hyuck Ahn, Eldwin J. Ng, Gary J. O'Brien, and Thomas W. Kenny, "Resonant pressure sensor with on-chip temperature and strain sensors for error correction," 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 45-48, Jan 2013.
Conference
Chia-Fang Chiang, Andrew B. Graham, Eldwin J. Ng, Chae Hyuck Ahn, Gary J. O'Brien, and Thomas W. Kenny, "A novel, high-resolution resonant thermometer used for temperature compensation of a cofabricated pressure sensor," Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2012, pp. 54-57, Jun 2012.
Conference
Eldwin J. Ng, Hyung Kyu Lee, Chae Hyuck Ahn, Renata Melamud, and Thomas W. Kenny, "Stability measurements of silicon MEMS resonant thermometers," 2011 IEEE SENSORS Proceedings, pp. 1257-1260, Oct 2011.